Magnet: D (Built-in), Mounting: L (MS1, Foot), Bore Size: 325 (3 1/4"), Stroke: 0350 (3 1/2"), Air Cushion: Both Ends (Air Cushion), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC6 (Stainless Steel Rod)

Magnet: Built-in, Mounting: Foot, Bore Size: 3 1/4", Stroke: 24", Option: Both Ends (Air Cushion), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), X Option: None, Speed Control Type: Universal, Applicable Tubing: 3/8", Suffix: Required Selection w/

Magnet: Built-in, Mounting: Foot, Bore Size: 3 1/4", Stroke: 24", Option: Both Ends (Air Cushion), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), X Option: None, Speed Control Type: Right Angle, Applicable Tubing: 3/8", Suffix: Required Selection

Magnet: Built-in, Mounting: MS1, Foot, Bore Size: 3 1/4", Stroke: 3 1/2", Air Cushion: Both Ends (Air Cushion), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Integrated Controller

T1 = V/a1 = 100/5000 = 0.02 [s], T3 = V/a2 = 100/5000 = 0.02 [s] T2 = = = 1.98 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.02 + 0.02) 100 T4 = 0.15 [s] The cycle time can be found as follows.

IIIIIIIIII

Part Number Description SDU-5000/SDR-800/10 SDU-5000/SDR-800/30 SDU-5000/SDR-800/60 SDU-5000/SDR-800/90 SDU-5000/SDR-900/10 SDU-5000/SDR-900/30 SDU-5000/SDR-900/60 SDU-5000/SDR-900/90 SDU-5000/SDV-800/10 SDU-5000/SDV-800/30 SDU-5000/SDV-900/10 SDU-5000/SDV-900/30 Stepper Driven Regulator, 0.7-10 PSI, 1/8"NPT Ports Stepper Driven Regulator, 0.7-30 PSI, 1/8"NPT Ports Stepper Driven Regulator

Table of Contents

Series SX3000/5000 Mixed Mounting.

Table of Contents

Manifold/Plug-in Type Type 01C Circular Connector Type 01F D-sub Connector Series VFR2000/3000/4000/5000 Series VFR2000/3000/4000/5000 When multi-connector is used, mass-termination between power supply side and solenoid valve can be done.

Valve Single Unit

One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 One-touch fitting for 3/8" N11 SX7000 1-6-48 Body Ported Series SX3000/5000/7000 Manifold Specifications Multiple valve wiring is simplified through the use of the flat cable connector.

5 Port Air Operated Valve

5 Port Air Operated Valve VFA1000/3000/5000 Series RoHS SYA SYJA VZA VFA VFA VFRA VPA4 SYJA VZA VTA VGA VPA VPA3 1495 VFA1000/3000/5000 Series Model Selection by Operating Conditions q Air Operated Valve: Single Unit Series Sonic conductance C[dm3/(sbar)] Type of actuation Port size Pilot port direction VFA1000 2 position single VFA1000 (B)2 4(A) 1 (P) (EB)3 5(EA) M5 x 0.8 1/8 VFA3000 VFA5000

VF1000-OMP0001

5 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / DC 1 1 ()ISO VG32 (MSDS) 2 ()ISO VG32 M5 M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32

45

To order the SUP/EXH block assembly (SX3/5000-51-1A) mounted at a location order than the ends of manifold, refer to the manifold specification sheet along with assembly part no.

Fieldbus System

Note) Except SI Unit Manifold Solenoid Valves Manifold Solenoid Valves Manifold Solenoid Valves Series SY3000/5000 Series SV1000/2000/3000 Series S0700 Series VQC1000/2000/4000 IP67 IP40 IP67 IP67 Note) The SY3000/5000, S0700, and VQC1000/2000/4000 are not UL-compatible.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Valve-Connector Assembly No. for Wiring between Units A 127 DXT170 VZ100/1000 52 DXT192 VZ3000/5000 Single 1 A 2 52 DXT192 VZ3000/5000 Double, 3 position A Lead wire color Color Note For 100 VAC For 110 VAC For DC Symbol 1 3 4 Blue Gray Red, Blue Connector assembly Connector assembly (Double, 3 position) (Single) 3-3-7 7 Series VZ1000/3000/5000 Solenoid Valve Mounting Manifold Electrical

V

(N)AQ2000~5000 1MPa / 145 PSI Min Operating Pressure (N)AQ1500~1510 0.1MPa / 14.5 PSI (N)AQ2000~5000 0.05MPa / 8 PSI Ambient & Fluid Temperature 5 ~ 60C / 41 ~ 140F D I M E N S I O N S S E R I E S (N)AQ1500, 1510 Note: When ordering PT Ports, remove N from the model number.

45

Reference 1-6-88 Base Mounted Series SX3000/5000 Internal Wiring of Manifold Type 45T: Terminal Block <45T> A terminal block style permits direct cable connection without treatment of lead wires.

2

0 1000 2000 3000 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AR50(K)-B Rc1 AR60(K)-B Rc1 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 5000 10 0 0 0 5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) INDEX 280 Series AR10-A Series AR20-B to AR60-B Series AR20K-B to AR60K-B Pressure Characteristics (Representative

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

0EX500-AC 050 DN 7 1 2 5 14.9 Cable length (L) 4 3 40.7 50 Socket connector pin assignment 010 1000 mm 050 5000 mm L Terminal no.

Slider Type Ball Screw Drive/11-LEFS Series

5000 2500 2500 0 0 0 1 2 3 4 0 2 4 6 8 10 Work load [kg] Work load [kg] LEFS25SlA/Ball Screw Drive LEFS25SlA/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000 Duty ratio: 100% 12500 12500 10 10 7500 7500 Duty ratio: 100% 5000 5000 2500 2500

SYJ3000/5000/7000

Connector Socket Lead wire Hook 1-5-75 76 Series SYJ3000/5000/7000 Specific Product Precautions 3 Be sure to read before handling.