Environment

) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360 310 270 LEJS63 200 W/ m60 B 10 600 460 370 300 250 210 180 150 130 (Motor rotation speed) (3600 rpm) (2790 rpm) (2220 rpm) (1800 rpm) (1500 rpm) (1260 rpm) (1080 rpm) (930 rpm) (810 rpm) 121 LEJ Series AC Servo Motor Clean Room Specication

Thermo-chiller/Rack Mount Type

Water-cooled Refrigeration HRR U 012 W 10 (UL Standards) Cooling capacity Option 2 (p. 35) 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) Nil None Y With feet/Without rack mounting brackets Z*1 Without either a flow sensor, water leakage sensor, particle filter, bypass valve or retaining clip Cooling method W Water-cooled refrigeration Z1*1 Without either a flow sensor or retaining

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

) (3938 rpm) (2925 rpm) (2250 rpm) (1800 rpm) (1463 rpm) (1200 rpm) (1013 rpm) H 30 1800 1390 1110 900 750 630 540 470 410 A 20 1200 930 740 600 500 420 360 310 270 LEJS63 200 W/ m60 B 10 600 460 370 300 250 210 180 150 130 (Motor rotation speed) (3600 rpm) (2790 rpm) (2220 rpm) (1800 rpm) (1500 rpm) (1260 rpm) (1080 rpm) (930 rpm) (810 rpm) 121 LEJ Series AC Servo Motor Clean Room Specication

MY1

The spacing (l) of the support must be no more than the values shown in the graph on the right. 200 kg m 190 (2100) (2100) (2100) (2100) 180 170 l 160 150 140 130 Weight m (1800) (1800) (1800) (1800) m l 120 Caution 110 MY1M63 MY1M63 MY1M63 MY1M63 m 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation.

Cylinder with Lock Series CLS

1801 to 2000 30 63 60 204 106 36 167 195 3/8 162 45 115 70 48 17 18.5 149 86 135 20 41 24 125 398 10 132 320 35 5 M18 x 1.5 16 118 Up to 1800 1801 to 2000 34 63 60 226 124 40.5 187 216 3/8 182 50 115 74 48 17 18.5 165 97 135 20 46 24 132 418 10 150 348 35 5.5 M20 x 1.5 21 131 Up to 2000 2001 to 2400 42 71 67 277 152 58 237 261.5 1/2 225 60 140 86 60 20 23 200 117 160 25 56 29 160 538

CLS

Up to 1500 M40 x 1.5 M12 x 1.75 0.2 stroke 257 111 523 90 153 541 120 427 30 to 1800 Up to 998 M45 x 1.5 M16 x 2 0.2 stroke 325 141 658 105 176 674 30 to 2000 M56 x 2 M20 x 2.5 0.17 stroke 9-9-13 14 Series CLS Dimensions Rod side flange style (F): CLSF BC CLS125 MODEL SMC BD FREE LOCK CHECK Cylinder With Locking Mechanism T Rc BP Unlocking port (Unlocked when pressurized) V GC Plug with

MY1

The spacing (l) of the support must be no more than the values shown in the graph on the right. 200 (kg) m 190 (2100) (2100) (2100) (2100) 180 170 l 160 150 140 130 (1800) (1800) (1800) (1800) Caution m l 120 Weight (m) 110 MY1M63 MY1M63 MY1M63 MY1M63 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation.

CE

Nil L 0.5 m Standard cylinder stroke (mm) Refer to Standard Stroke on page 10-12-9. 3 m Connector Nil Z With connector Without connector Fluoro rubber seals: -XC22 (Example) CEP1B12-100-M9N-XC22 Applicable counter Series CEU5 05 Extension cable CE1-R Mounting Bracket Part No. Cable length Suffix 05 10 15 20 Nil C Cylinder part no.

NCA1

Standard Stroke CM2 Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Bore size (in) 1.50 2, 2.50 3.25, 4 CG1 MB How to Order MB1 NC D A1 Mounting Bore Stroke Suffix XC22 CA2 Ex: NCDA1B 150-0400-XC22 CS1 Auto switch capable Fluoro rubber seals C76 C85 With Coil Scraper C95 Specifications

Slide Unit Series CX2/CXWM/CXWL

stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2 built-in magnets 537 478 418 358 299 239 179 14 597 119 XC22

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

Connector Sensor cable length With connector Without connector Nil Z 0.5 m 3 m Applicable counter CEU5 series Nil L Fluororubber seals: -XC22 (Example) CEP1B12-100-M9N-XC22 Mounting Bracket Part No. Foot Rod side flange Cylinder part no.

NCG/CG1

-XC11 Dual stroke cylinder/Single rod type -XC12 Tandem type cylinder -XC13 Auto switch rail mounting style -XC18 NPT finish piping port Rod Boot Material -XC20 Head cover axial port Maximum operating temperature -XC22 Fluoro rubber seals Symbol Rod boot material -XC29 Double knuckle joint with spring pin Nylon tarpaulin J 70C -XC35 With coil scraper 110C Heat resistant tarpaulin K -XC37

CE

Nil L 0.5 m Standard cylinder stroke (mm) Refer to Standard Stroke on page 10-12-9. 3 m Connector Nil Z With connector Without connector Fluoro rubber seals: -XC22 (Example) CEP1B12-100-M9N-XC22 Applicable counter Series CEU5 05 Extension cable CE1-R Mounting Bracket Part No. Cable length Suffix 05 10 15 20 Nil C Cylinder part no.

Stroke Reading Cylinder and Counter

Connector Sensor cable length With connector Without connector Nil Z Nil L 0.5 m 3 m Applicable counter CEU5 series Fluororubber seals: -XC22 (Example) CEP1B12-100-M9N-XC22 Mounting Bracket Part No. Cylinder part no.

Tie-rod Type Hydraulic Cylinder

Symbol -XC22 Fluororubber Seals 1 CHQ How to Order CHK XC22 Standard model no. CHN CHM Fluororubber seals CHS Specifications CH2 Note 1) Please confirm with SMC, as the type of chemical and the operating temperature may not allow the use of this product.

Slide Unit Series CX2/CXWM/CXWL

stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 6 101 20 X168 CX helical insert thread 186 166 145 124 104 83 62 8 207 41 X169 Individual -X 2 built-in magnets 537 478 418 358 299 239 179 14 597 119 XC22

CE

Nil L 0.5 m Standard cylinder stroke (mm) Refer to Standard Stroke on page 10-12-9. 3 m Connector Nil Z With connector Without connector Fluoro rubber seals: -XC22 (Example) CEP1B12-100-M9N-XC22 Applicable counter Series CEU5 05 Extension cable CE1-R Mounting Bracket Part No. Cable length Suffix 05 10 15 20 Nil C Cylinder part no.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

-XC6 Piston rod and rod end nut made of stainless steel -XC13 Auto switch rail mounting style Data -XC18 NPT finish piping port -XC22 Fluoro rubber seals Rod Boot Material With Auto Switch Symbol -XC37 Large throttle diameter of connecting port Maximum ambient temperature Rod boot material Double acting: Auto switch can be mounted for double rod.

CJ2

Bore size (mm) Standard stroke Bore size (mm) Retracted side Extended side CS1 6 15, 30, 45, 60 Symbol Specifications 6 10 16 1.77 3.72 10 15, 30, 45, 60 -XA C76 Change of rod end shape 3.53 6.86 16 15, 30, 45, 60, 75, 100, 125, 150 -XC22 Fluoro rubber seals 6.86 14.2 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.

MB

made of stainless steel -XC8 Adjustable stroke cylinder/Adjustable extend stroke Single knuckle joint -X -XC9 Adjustable stroke cylinder/Adjustable retract stroke Double knuckle joint (with pin) Option -XC10 Dual stroke cylinder/Double rod 20-XC11 Dual stroke cylinder/Single rod Rod boot -XC12 Tandem cylinder Data -XC14 Change of trunnion bracket mounting position Material of Rod Boot -XC22