With Factory Installed

Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

7

Hexagon socket head cap screw C (M4 x 5L) Switch mounting rod mounting tap (3 locations) Switch mounting rod mounting tap (3 locations) (Attached to auto switch) Hexagon socket head cap screw A (M2.5 x 11L) Auto switch Hexagon socket head cap screw (M3 tightening torque: 0.5 to 0.7 Nm) Auto switch mounting bracket Plugged Hexagon socket head cap screw B (M4 x 8L) Switch mounting rod E Auto

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C 54 56 ZPR10C I 56 ~PRllII ZPR10 ZPR16U 16 18 12.5 21.5 30.4 46.5 57.5 80.5 91.5 3.5 1.2 C Deep type 54 ZPR13 54 54 mml 54 'y o ' O A ~B Ij G 75 ~ 1 2 10 60 83 94 6 76 2; '" ZPR16D 16 18 15 6 5l 61 84 Z ~6 ~O 75 75 ZPR?S 76 76 76 Apphcable tube mm ZPI!~2 ZPR40 128 Q O P R .S 129 128 04 4. 20.6 15.6 10,4 130 .6 ' . 16.6 6 21.6 12.8 Applidal\le lWe 0.0 128 1 30 ZI!J!

CLQ

1) Remove the dust cover. 2) Supply air pressure of 0.2 MPa or more to the unlocking port, and set the lock ring to the perpendicular position. 3) Screw the attached bolt for unlocking (hexagon socket head cap screw/20, 25: M3 x 5l, 32: M3 x 10l) into the lock ring to hold the unlocked condition. Unlocking bolt Unlocking port Dust cover 2.

MLGP

In order to hold the locked state, be sure to follow the steps below after confirming safety. 1) Remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to the unlocking port (2) shown below and unlock. 3) Screw the attached hexagon socket head cap bolt (3) (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), into the lock ring to hold the unlocked condition. 2.

Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External

Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Solenoid Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Voltage: 24 VDC, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Electrical Entry Method

Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: No auto-switch (no magnet

Compact Cylinder with Linear Guide, MXS, GUIDED CYLINDER, 0.00000 lb

Bore Size: 25mm, Pilot Port Location: Front, Stroke: 35mm, Mounting Bolt: L (w/Mounting Bolt)

Bore Size: 25mm, Pilot Port Location: Front, Stroke: 30mm

Bore Size: 25mm, Pilot Port Location: Front, Stroke: 5mm

Bore Size: 25mm, Pilot Port Location: Front, Stroke: 30mm, Mounting Bolt: L (w/Mounting Bolt)

Bore Size: 25mm, Pilot Port Location: Front, Stroke: 40mm, Mounting Bolt: L (w/Mounting Bolt)

Bore Size: 25mm, Pilot Port Location: Front, Stroke: 25mm