Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

MM M 6 x 1.0 depth 12 M 6 x 1.0 depth 12 FY LF LH U FD FT LA FX ZX F LB LD 212 (245) 247 (285.5) 287 (331) 347 (413) LT Model ZY H LC LE 236 (269) 275 (313.5) 329 (373) 389 (455) Model 20CDRA1F50 CDRA1L50 50 9 90 110 4 41 108 114 13 81 62 39 9 4.5 44 11.5 136 15 CDRA1F63 CDRA1L63 105 59 130 76 5 11 101 45 5 55 48 127 M8 x 1.25 depth 16 CDRA1F80 CDRA1L80 130 76 92 13 160 5 119 55 6 67 58 154

•

l 15 :1-7 "140 177 144 42 19 20 236 118 275 18 M16x 1.5 \ 15 34 15 0160 Up to 1200 I 56 180 38 178.5 20 17 53 Bdre size MM N pis \VithOO1 (l}d bool\ With rod boot (Single side) (mm) (BotilSjjes,1 ZZ ZZ 341 364 341 364 367 388 1m,") H ZZ e f h 0125 M3D x 1 5 30.5 1!

Slide Unit Series CX2/CXWM/CXWL

Note 3) For 16, 20 and 25, strokes up to 275, and for 32, strokes up to 225 are available as made-to-order. (-XB11) End lock R End lock Nil None Applicable Auto Switch/Refer to pages 1719 to 1827 for further information on auto switches.

Manifold Specifications

Nm Applicable base VV5Z5-21P 3-3-62 5 Port Solenoid Valve Body Ported Series VZ5000 Type 20 Manifold VV5Z5-20Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) 4-4.5 (Mounting hole) VK VZ VF VFR 6-Rc 1/8 (1(P), 3/5(R) port) PE port (Pilot EXH) VP4 VZS Manual override (Non-locking) G: 300 mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN (mm) Stations L1 L2 15 306 294 14 287 275

S Couplers Series KK/KKH/KK13

Symbol 1 Specifications without fluorine coating at the liquid-contact part -X70 Ex.)KKA3S-01M-X70 K Without fluorine coating at the liquid contact part M H KK D MS LQ MQR T Refer to pages 182 to 183 for Specific Product Precautions. 275

IDG

.: 10 IDG10V/10HV IDG20V/20HV 275 305 158 188 212 135 Hexagon width across flats 17 (NPT thread: 3/8 inch) 14-19-44 41 Series IDG Membrane Air Dryer Unit Type IDG30V/50V IDG30HV/50HV IDG30LV/50LV Port size 1/4, 3/8 85 322 77 168 50 Purge air for dew point indicator 18 22 IN OUT Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Foot style: CDVRA1L Foot bracket Mounting hole (mm) LA LB LC LD LE LF LH LT Model 212 (245) 247 (285.5) 287 (331) 347 (413) 236 (269) 275 (313.5) 329 (373) 389 (455) ( ) are the dimensions for rotation of 180 and 190.

Table of Contents

Features. 247 247 248 248 249 250 251 251 252 252 253 258 259 260 265 266 267 271 271 272 273 275 280 283 284 287 288 288 289 290 290 290 291 292 292 292 293 295 297 298 299 300 303 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 305 305 306 308 309 315 315 316 318

Free Mount Cylinder

mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260) 250 (287) 275

CL

boot 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 30 35 35 40 40 50 50 56 59 44 52 64 78 92 115 128 144 27 32 32 37 37 47 47 53 69 16 20 20 25 30 36 36 40 32 40 40 52 52 59 59 59 60 70 86 102 116 145 161 182 43 43 43 22 27 27 32 41 9.0 9.0 11.5 13.5 13.5 19 19 19 71 81 101 119 133 145 160 180 12 12 15 18 18 14 20 20 80 90 105 130 150 190 212 236 42 50 59 76 92 100 112 118 100 110 130 160 180 230 255 275

JXCx-OMU0004

1800 140 1800 13 250 2000 130 2000 300 2000 160 2000 14 275 2500 140 2500 325 2500 180 2500 15 300 3000 150 3000 350 3000 200 3000 60 No.JXC-OMU0004-A 10.7 LEL LEL LEL [mm/s] 80 2] 1000 [mm/s [mm/s] 100 2] 1000 [mm/s [mm] 10 LEL LEL25M LEL25L 2] 2] [mm/s] [mm/s [mm/s] [mm/s 0 50 200 50 200 1 60 300 60 300 2 70 400 70 400 3 80 500 80 500 4 100 600 100 600 5 120 700 150 700 6 140 800

IDX-OM-W016

IDFA6E 455 Rc3/4 270 80 230 32 15 31 42 275 15 240 80 IDFA8E 485 568 355 300 IDFA11E IDFA Series 6-3 Dimension 6 2 IDX-OM-W016 Air dryer6 References IDFA15E1 600mm or more Measuremm 600mm or more 600mm or more 600mm or more MAINTENANCE SPACE THE VENTILATION AND 603 300 (494) 16 600mm WITH LAMP SWITCH 542 41 or more COMPRESSED AIR OUTLET Rc1 COMPRESSED THERMOMETER EVAPORATION AUTO DRAIN

AC Servo Motor Driver (Pulse input type/Positioning type ）

Maximum Maximum rating limit Static Varistor voltage rating voltage capacity Power supply (range) (reference Varistor Surge V1 mA Permissible circuit Energy Rated pulse value) voltage current voltage immunity power [A] [V] immunity AC [Vrms] DC [V] 8/20 s [A] 2 ms [J] [W] [pF] [V] TND20V-431K 275 350 10/1 times 195 710 1300 430 (387 to 473) 200 V 1.0 100 class TND20V-471K 300 385 7000/2 times

HRX-OM-I051

) Required flow of facility water*9 (50Hz/60Hz) L/min 5/5 6/6 15/22 18/23 (1.3/1.3[gal/min]) (1.6/1.6[gal/min]) (4.0/5.8[gal/min]) (4.8/6.0[gal/min]) Facility water port Rc 1/2 Power supply 3-phase 50/60Hz AC200/200 to 208V10% Main breaker size A 30 60 W415D1080 Dimensions*7 mm W380D870H950 H1075 (W14.96xD34.25xH37.40[inch]) (W16.34xD42.52x H42.32 [inch]) Weight*8 kg 165 (364 [lbs]) 175 275

Programless controller Step motor (servo 24 VDC)

1800 140 1800 13 250 2000 130 2000 300 2000 160 2000 14 275 2500 140 2500 325 2500 180 2500 15 300 3000 150 3000 350 3000 200 3000 65 No.

Cylinder with Lock

, Single Rod Double Acting, Double Rod Lock Unit Made to Order Auto Switch L RR TY ZZ + Stroke Z + Stroke [mm] With Rubber Bumper [mm] Bore size CDH10 CDd9 CX L RR U TT TX TY Z ZZ 32 10 +0.058 0 10 0.040 0.076 14 0.1 0.3 23 10.5 13 17 48 49 213 223.5 40 10 +0.058 0 10 0.040 0.076 14 0.1 0.3 23 11 13 22 55 58 231 242 50 14 +0.070 0 14 0.050 0.093 20 0.1 0.3 30 15 17 22 68 71 260 275

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 262 262 263 263 264 265 271 273 274 274 275 276 283 287 288 290 292 293 294 295 297 298 299 300 301 301 302 305 305 306 307 307 307 308 309 310 2-color Indication Type . D-A79W Rail Mounting Style . Solid State Switch. General Purpose Type.

AC

42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Manifold stations Dimensions by Number of Stations 10 Model Symbol 9 8 7 6 5 4 3 2 454 412 370 328 286 244 202 160 118 L1 ARM2500 442 400 358 316 274 232 190 148 106 L2 420 378 336 294 252 210 168 126 84 L3 592 537 482 427 372 317 262 207 152 L1 ARM3000 578 523 468 413 358 303 248 193 138 L2 550 495 440 385 330 275

MGP

st 200 75st or less Over 75st to 175st Over175st to 275 st Over 275st Over 275st 75st or less 45 11 7.5 Rc 1/8 32 15 34 30 96 44 110 78 98 63 48 300 83 121 171 32 46 11 7.5 Rc 1/8 38 18 38 30 104 44 118 86 106 72 48 124 200 300 84 122 172 40 48 14 9 Rc 1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 50 14 9 Rc 1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88