Bore Size: 16mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Side Adjusters/Metal Stoppers, Function: Standard, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 16mm, Stroke: 20mm, Adjuster: Metal Stopper, Magnet: Magnet and Rail, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 6mm, Port Thread Type: M Thread (ø6-ø16); Rc (ø20-ø25), Adjuster Position Set: Right Side, Stroke: 20mm, Adjuster: Both Side Adjusters/Metal Stoppers, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

How Grip: Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 26, Closed Dimension L2(mm): 16, Type: [Main Body] Body, Operation Method: Single Acting Type (Normally Closed), Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): -, Gripping Force (Open Side at 0.5 Mpa)(N): 44, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

Type: L-Shaped Table Type, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 20, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 51.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 27, Table Size Height H(mm): 20, Table Parallelism(µm): 30, Table Surface Treatment

2

(No freezing of the fluid) Note 2) ANR indicates the flow rate converted to the value at 20C, under the atmospheric pressure and the state of relative humidity 65%.

Refrigerated Thermo-chiller

) 2.0 (at 20C) 4.0 (at 20C) 8.0 (at 20C) 2.0 (at 20C) 8.0 (at 20C) 4.0 (at 10C) 8.0 (at 10C) 2.8 (at 10C) 3.2 (at 10C) 2.3 (at 20C) 2.6 (at 20C) 2.8 (at 20C) 3.0 (at 20C) 2.3 (at 20C) 3.3 (at 20C) 3.6 (at 10C) 5.9 (at 10C) Cooling capacity Note 3) (kW) Heating capacity Note 3) (kW) Temp. stability Note 4) (C) 0.1 Pump capacity Note 5) (50/60 Hz) (MPa) 0.45/0.65 (at 20 l/min) 0.45/0.65 (at

Table of Contents

The minimum bending radius indicates the value, at which the tubing gets bended at the temperature of 20C.

Table of Contents

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

T

The minimum bending radius indicates the value, at which the tubing gets bended at the temperature of 20C.

HRX-OM-I051

E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +20C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.

1.1

V After 15 min, cool 32C down to 20C.

Series IDG

Port size Thread type Symbol Bore Size Nil N F Rc NPT G 1 5 10 20 30 3 50 60 75 100 01 1/8 02 1/4 04 1/2 03 3/8 Standard Specifications/Single Style (Standard Dew Point 20C [4F]) Standard dew point 20C (4F) Model IDG1 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 IDG3 IDG1 Fluid Compressed air Range of operating conditions Standard performance conditions Standard performance Inlet air

IDG

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

Thermo-chiller/Rack Mount Type

of 20%, V 1120 [W] x 1.2 = 1344 [W] After 15 minutes, cool 32C down to 20C. * This is the calculated value by changing the fluid temperature only.

Table of Contents - Tubing

Note 3) The value at a temperature of 20C.

Table of Contents

Metric sizes 6 8 10 12 ASS Flow rate l/min (ANR) Controlled 100 180 230 260 390 460 660 790 920 1580 1710 ASR (free) flow Effective area mm2 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are at a pressure of 0.5MPa, and temperature of 20C.

Thermo-con

Note 2) Conditions: Set temperature 77F (25C), Facility water temperature 68F (20C), Facility water flow rate 2.1 gpm (8 L/min), Ambient temperature 77F (25C). Note 3) Conditions: Set temperature 77F (25C), Facility water temperature 68F (20C), Facility water flow rate 2.6 gpm (10 L/min), Ambient temperature 77F (25C).

Water-cooledThermo-chiller

Cooled substance total volume V Cooling time h Cooling temperature difference T Facility water temperature Circulating fluid : 60 L : 15 min : 20C (20 K) (70C 50C 20C) : 20C (293.15 K) : Fluorinated fluid Density : 1.74 x 103 kg/m3 Example of conventional measurement units (Reference) 0.06 m3 0.25 h 20C 20C Fluorinated fluid Density : 1.74 x 103 kg/m3 Specific heat C: 1.05 x 103 J/(kgK)

HRX-OM-M005

E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +22C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.