Table of Contents

(at 20C) Data 10-12-9 9 Series CEP1 Proper Auto Switch Mounting Position Weight (Without mounting bracket/connector) (kg) Regarding dimensions for the proper auto switch mounting position (at stroke end), refer to page 1012-16.

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

High Purity Fluoropolymer

is the value at 20C.

0.4

Property Item () 23 (+) SOL.a Conductor resistance /km, 20C (+) () 11 65 or less 11 stations SOL.b (+) () 24 SOL.a Withstand voltage VAC, 1 min. (+) () 12 1000 12 stations SOL.b () 25 (+) Insulation resistance M/km, 20C COM. 5 or more (+) 13 () Orange Red Positive common Negative common Note) The minimum bending inner radius of D-sub connector cable is 20 mm. specifications specifications

Digital Flow Switches

Flow rate conversion NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3kPa Standard state: 20C, 101.3kPa, 65%RH (ANR) Switchable between these states.

PF2A/PF2W

Flow rate conversion PF2 NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3 kPa Standard state: 20C, 101.3 kPa, 65%RH (ANR) Switchable between these states.

V

M km, 20C 5m VVZS3000-21A-3 x 24AWG * For other commercial connectors, use a 25-pole female connector made in conformity with MIL-C-24308.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Coil temperature: 20C, at rated voltage) SY3000 SY7000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor 12 or less Type of actuation Without light/surge voltage suppressor 31 or less Type R, U Type S, Z 12 or less

80

Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.

0.4

Item Property Conductor resistance /km, 20C 65 or less Voltage limit V, 1 minute, AC 1000 Circular connector cable assembly Note) When using the negative COM specification, use valves for negative COM. Insulation resistance M/km, 20C 5 or more Assembly part no.

VDW

(Variation: 10%) Note 2) The value at ambient temperature of 68F (20C) and when the rated voltage is applied. The value depends on the ambient environment. This is for reference. Note 1) Power consumption, Apparent power: The value at ambient temperature of 68F (20C) and when the rated voltage is applied.

Moisture Control Tube

Basic conditions Supply dew point: 20C (Atmospheric pressure dew point) Supply pressure: 0.5 MPa Ambient environment: 25C, 40% Fig.1 Verification Chart of Condensation (a) Find the correction factors.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Connector structure ZSE/ISE40, 80 Series Available Mounting Options Series IP40 IP65 20 20A 20B(-L) 20C With waterproof cover (20B, 20C) Lead wire Mounting Available Mounting Options Series Bracket A Bracket B Bracket C Panel mount 20 20A 20B(-L) 20C The bracket configuration allows for mounting in four orientations.

Lightweight and Compact

capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 8.4 [kW] HED V After 15 minutes, cool 32C down to 20C.

HRX-OM-X037

[Example of setting] Circulating fluid SP: 20C (1) High Temp. CH1 circulating fluid temperature rise (AL10): 22C (2) Low Temp.

MHZ

0.7 MPa Pressure 0.7 MPa 50 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 400 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa 40 300 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 20 0.3 MPa 0.3 MPa 0.25 MPa 0.25 MPa 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20C

MHZ

0.7 MPa Pressure 0.7 MPa 50 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 400 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa 40 300 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 20 0.3 MPa 0.3 MPa 0.25 MPa 0.25 MPa 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20C

IDU/IDF

Note) l/min (ANR) is for reference conditions of 20C, 1 ATM and 65% relative humidity. Features 3 Model Selection Data A Correction factor for temperature/Series IDU Inlet air temp.

Parallel Style Air Gripper Series MHZ

/MHZL2-20C 100 Pressure 0.7 MPa 80 0.6 MPa Gripping force (N) 0.5 MPa 60 0.4 MPa 40 0.3 MPa 0.25 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 380 Parallel Style Air Gripper Series MHZ Effective Gripping Force: Series MHZ2/Double Acting/External Gripping Force Step 1 External Gripping Force External Gripping Force Indication of effective gripping force The effective gripping force shown

KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air/Nitrogen gas/Water (pure water) Note 2) Fluid 1MPa Note 3) Maximum operating pressure (20C) 100kPa Operating vacuum pressure Caution 3MPa Proof pressure (20C) 20C to 80C Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blowing and washing lines.