End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.8-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Manual release N L Non-locking style Locking style Cylinder stroke (mm) (Refer to the standard stroke table on p.3.4-5.) Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

VZS

Interface regulator (P port regulation) Spacer Interface regulators can be placed on top of the manifold block to reduce the pressure of each of the valves. Part no. Rc 1 4 VVZS3000-R-02-1 VVZS3000-R-02-2 Body type Plug-in type VVZS3000-10A-1 Non plug-in type VVZS3000-10A-2 Part no. Body type Plug-in type ARBZS3000-00-P-1 Non plug-in type ARBZS3000-00-P-2 Part no.

AC Servo Motor Driver (CC-Link Type ）

0 1 2 3 4 5 6 7 0 0 0 0 0 NUL DLE Space 0 @ P ` p 0 0 0 1 1 SOH DC1 !

LG1H

Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) Model 15 20 25 30 LG1H21NC-500-F LG1H21NC-600-F LG1H21NC-700-F LG1H21NC-800-F LG1H21NC-900-F LG1H21NC-1000-F 1000 1000 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 930 740 600 500 Consult SMC if outside of the above conditions. 55 Series LG1H Construction/ With Coupling LG1H21 q r y !

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

MB1

P-83.5(YG)

Large Size Vacuum Module: Series ZR

940 to 967 P. 968 to 983 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Electric Slide Tables

J 6N LES 8 30 q w e r t y u i o !

10

Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 CS1 -XC88

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Modular F.R.L. Units

High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ1000 Series P.1.10-124 P.1.10-128 P.1.10-132 Plug-in Plug lead VQ2000 Series P.1.10-124 P.1.10-128 P.1.10-132 VQ0 Series P.1.10-170 P.1.10-174 VQ1000 Series P.1.10-170 P.1.10-174 P.742 1.10-114 Manifold Variations T L C S Port size SUP EXH port Cylinder port kit kit kit Lead wire Direct electrical entry style Serial transmission unit Terminal box (Terminal block) SY P, R A, B Enables single-wire

Series IDG

R None (standard) With fitting for purge air discharge Flow direction (rightleft) With dew point indicator 5 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 10 20 30 50 60 75 100 S Standard equipment Note) In case of two or more options, indicate them in alphabetical order.

Best Pneumatics Vol. 14

r r u u u Drain Drain Drain Component Parts Material No.

48

Direct teaching P P P Position Set in units of 0.01 mm [Pushing]: Pushing start position JOG teaching P P P P P P P P P P P P P P Set in units of 1 mm/s2 Acceleration/deceleration during movement Select from 16-level Acceleration/Deceleration Step data setting (Excerpt) Set in units of 1% Rate of force during pushing operation Select from 3-level (weak, medium, strong) Pushing force Set

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

Compressed Air Preparation Filter

Activated carbon filter Bracket B Bracket A Mounting screws Bracket mounting view Accessories Sold Separately/ International Standard Specific Product Precautions 22 AMK Series Dimensions AMK20 AMK30 AMK40 S N T J D M S N T U D J M U 2 x P 2 x P Q R Q R (Port size) (Port size) G B V C V C B IN OUT IN OUT Maintenance space A Maintenance space A E G AMK50 AMK60 D M J N T S U 2 x P R (Port size

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.