F FX FD FT H 20 25 32 40 Up to 125 6 5.5 28 2 12 40 35 Up to 200 7 5.5 32 2 14 44 40 Up to 200 7 6.6 38 2 18 53 40 Up to 200 8 6.6 46 2 25 61 50 End boss is machined on the flange for E.
Applicable solenoid valve: Type 10-SYJ314M Type 10-SYJ324M Plug (SYJ3000-33-1) Plug (SYJ3000-33-1) Seal the unused "R" port on the end cover side of the manifold. Seal the unused "R" port on the end cover side of the manifold. e 10-SS5YJ3-41/-S41 The 3 port valve can be used by simply sealing off the unused "R" port with rubber plug (SYJ3000-33-1).
(Page 74) 8010 0x1F4A 0 R PD conversion equation : b F32 N 8020 0x1F54 0 R Instantaneous flow peak value S16 N -200 to 4000 The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Instantaneous flow bottom value S16 N -200 to 4000 Accumulated flow value measured value (temporary value) S16 N 0 to 9 1 R
2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !
Circulating fluid at the rated flow, r Circulating fluid: Tap water, t Power supply: 200 VAC, y Piping length: Shortest For models with an inverter pump mounted (Option T1), the cooling capacity will decrease by 300 W. 4 q Ambient temperature: 25C, w Circulating fluid temperature: 20C, e Circulating fluid at the rated flow, r Circulating fluid: Tap water, t Power supply: 200 VAC, y Piping
(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.
900 800 700 600 C 500 400 300 200 100 0 1000 900 800 700 600 D 500 400 300 200 100 0 1000 900 800 700 600 E 500 400 300 200 100 0 1000 900 800 700 600 F 500 400 300 200 100 0 When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.
-0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa r e r e Sample Order Number Port w q w q AP2702S e r FV4 FV4 FV4 FV4 FV4 FV4 FV4 FV4 2PW 3PWQ 4PW 5PWQ MP 4PW 5PWQ 40 40 V3 V3 MPA MPA qIN wOUT eGauge port (Inlet) rGauge port (Outlet) MP=Monitoring gauge port 1) Refer to gauge guide (P.94) for gauge specifications.
1 q r e w t i y u o !0 !
Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.
Dew point indicator kit IDG-DP01-X001 (Option: PS) IDG-DP01-X001 (Option: P) 10 With O-ring (1 pc.) 10 Series IDGe air discharge (Option: P) r w i Purge air for dehumidification Purge air for dehumidification y IDG60<, 75<, 100< IDG60e With fitting for
IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Component Parts Material No.
in height fr om ioniz er to workpiec e [ mm] Installation distance in height fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (150) (100) (50) 0 50 100 150 200 250 300 350 400 450 500 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm
Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.
r t y No. q w e r t y u i o !
r Power supply: 200 VAC Note 5) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200 VAC, u Piping length: Shortest Note 6) With the pressure control mode by inverter.
Note 3) This option is available with the digital pressure switch. 510 Compact Manifold Regulator Series ARM11A/B Regulator Block ARM11B 1 A R 06 Z A q w e r u t y N Individual Supply Type 1.
E R * Mounting brackets are the same as standard type.