Table of Contents Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n
0 IS1000 No. q w e r t y u i o !
Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o n
, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil KF (NW) Right flange surface Left flange surface D K (DN) E H V I G L H
Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n
R G E V O LTA G E S U P P R E S S O R With E W/O Light / With Surge Voltage Suppressor H O W T O O R D E R S U B P L A T E S E R I E S V Q 4 0 0 0 VQ4000 P Plug In Conduit Terminal E L E C T R I C A L E N T R Y E N C L O S U R E Dust Proof W Dust Tight Jet Proof P I P I N G Side Piping B Bottom Piping P O R T S I Z E 02 1/4 03 3/8 T H R E A D T Y P E Rc N NPT T NPTF F G Courtesy of Steven
location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.
Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1
2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !
IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Component Parts Material No.
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
-8 KNS-10-100-4 2 H2 H1 L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection size L1 A Width across flats H1 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 14 14 14 14 14 14 14 KNS-R01-075-4 KNS-R01-100-4 KNS-R01-090-8 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-
0 H RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(
1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?
Contents No. q w e r t y u i o !0 !1 !2 !3 !
LN LO R With surge voltage suppressor (non-polar) E A/B port size M Indicate in the station table below.
0, Metal joint q, w, Terminal i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VVFS5000-1A-1!0 Manifold block assembly 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !
Please be sure to fill in the blank referring to back page 10. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P)
1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?