JXCx-OMT0023

min] 200[ms] 300[ms] 500[10STMm] 1000[r/min] 500[ms] 1000[10STMm] 1500[r/min] 100[ms] 0[10STMm] a) b) c) d) e) f) g) h) i) j) Ignored.

5 Port Solenoid Valve

R D side U side Note) Not compatible with dual 3-port valves.

LG1H

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

IZx-OMT0049

Bar + High voltage power supply module + Controller IZT 40 34 D 1 6H R F X14 IZT 42 34 D 1 6H R F X14 Transistor Input/Output IZT 42 34 D 1 6H R L F X14 IO-Link Bar IZTB 40 34 D 1 6H R F X14 Standard model number Model Model 41 42 40 42 Bar length Symbol 16 22 34 40 46 58 64 82 112 130 160 190 232 250 Length(mm) Standard 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Non-standard

IDG

Note) When the symbol C or D is designated, the same part number of an auto-drain listed on page 14-19-33 will come together.

45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

0.4

VQZ 7 6 5 4 3 2 1 n D side Stations U side SQ VFS D-sub> VFR (DIN rail clamp screw) VQ7 BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 (7.5) 20.5 One-touch fitting 13.4 56.9 [1(P), 3(R) port] Applicable tubing O.D.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

AS

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard Universal type 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 01 02 03 04 Applicable tubing O.D.

CNS

D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160

NCG/CG1

, D-C8 20 to 63 D-G5, D-K5, D-G5W, D-G5BAL D-K59W, D-G59F, D-G5NTL = ~ Hs Auto switch Auto switch = ~Hs D-M9, D-M9W, D-M9A 20 to 63 D-C73C, D-C80C 20 to 63 Auto switch = ~ Hs Auto switch = ~Hs D-B5, D-B6, D-B59W 20 to 100 Auto switch = ~ Hs Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NTL D-G5BAL D-G5NTL D-G59F D-G5BAL D-B5/B6 D-B59W D-G5

MLGP

Example Data Theoretical Output Minimum Stroke for Auto Switch Mounting OUT IN (N) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 283 314 220 251 157 188 94 126 314 63 OUT 20 10 236 212 189 165 142 118 94 71 47

MLGP

Example Data Theoretical Output Minimum Stroke for Auto Switch Mounting OUT IN (N) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 No. of auto switches mounted D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 314 283 251 220 188 157 126 94 63 314 OUT 20 10 236 212 189 165 142 118 94 71 47

Cylinder with Lock Series CNS

Auto Switch Mounting Height (mm) D-Z7/Z80 D-Y5/Y6 D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BAL Hs D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL Hs Auto switch model D-A9 D-A9V D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A3 D-G39 D-K39 D-A5 D-A6 D-A59W D-A44 DBore size (mm) -X Hs Hs Hs Hs Ht Ht Ht Ht Ht Hs 125 140 160 69 69.5 71.5 69.5 69 69.5 116 126 75.5 69.5 74.5 70 Individual -X 76 76 77.5 76 76 76

Compact Type

D-A9 (Reed switch) D-F9 D-F9W D-M9 (Solid state switch) D-F9V, D-F9V D-A9V (Reed switch) D-F9V D-F9V (Solid state switch) C3 CXSJ15 to 32 (mm) Bore size C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9, D-F9W, D-M9 D-A9V, D-F9V D-A9 (Reed switch) D-F9 D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9V (Solid

Compact Type Dual-Rod Cylinder Series CXSJ

D-A9 (Reed switch) D-F9 D-F9W D-M9 (Solid state switch) D-F9V, D-F9V D-A9V (Reed switch) D-F9V D-F9V (Solid state switch) C3 CXSJ15 to 32 (mm) Bore size C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9, D-F9W, D-M9 D-A9V, D-F9V D-A9 (Reed switch) D-F9 D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9V (Solid

XL

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D TG R E FB UF TF TG MF * Supplied with 4 mounting screws.