0.4

5 Port Solenoid Valve VQ1000/2000 Series Metal Seal Rubber Seal SV [Option] Power saving Power saving SYJ Standard: 0.4 W Standard: 0.4 W SZ (Reduced by 60% compared to current model) (Reduced by 60% compared to current model) VF VP4 High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 365 5 Port Solenoid

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

MGP

300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Applicable auto switches Lead wire length (m) Auto switch model no.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

7 It is used only in the case of w/ cushion type.

ITV

VEX Compact/lightweight (Integrated communicatioin parts) Compact/lightweight (Integrated communicatioin parts) SRH Weight: 350 g Note 1) (ITV1000) Weight: 350 g Note 1) (ITV1000) Power consumption: 4 W SRP Power consumption: 4 W SRF Note 1) or less Note 1) or less VCHR 50 Note 1) Value for communications type.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

7ND9071en

7 Actuator Total Travel 250 [>=0] 4 Max.

Compact Manifold Regulator Series ARM5

t y ARJ w r AR425 to 935 t AMR e ARM u y u q i ARP r IR o Replacement Parts Component Parts IRV Description Material Part no.

7.5

0 y t r w e u w !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2C60 [N.C., N.O. valve x 1 (each)] SJ2C60K with back pressure check valve SJ2C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

Electric Actuator with Integrated Guide

w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

IZx-OMT0049

250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 0.5s 100 0.5s 100 1s 1s 150 150 2s 2s 200 200 5s 5s 250 250 300 300 For IZT40

EX120/121/122

w w e r e r w No.

Table of Contents

Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Refrigerated Air Dryers Series IDF/IDU

Refrigerated air dryer Auto drain Exhaust mechanism replacement kit Replacement Parts IDF100F-W IDF125F-W ADH-E400 IDF150F-W Air dryer model Heavy duty auto drain replacement part no. Note 9) Facility water piping strainer IDF-S0406 IDF-S0418 Note 9) Part number of only the exhaust mechanism replacement kit excluding the housing Housing (Use existing equipment.)

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

energy saving effect

No anchor bolt is included. 168 B Thermo-chiller Water-cooled 400 V Type Inverter Type HRSH Series HRS How to Order HRS 090 HRSH 250 W 40 HRS 100/150 Cooling capacity Option Cooling method HRSH 090 100 11.5 kW 150 15.7 kW 200 20.6 kW 250 24 kW Nil Note 1) None A With caster adjuster-foot K Note 2) With fluid fill port W Water-cooled refrigeration Pipe thread type HRSH HRSH Nil Rc F G (with

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

Electric Actuators

2 e w i !1 t !