Smooth Cylinder/Low Speed Cylinder

NPN) A96 5 V IC circuit Yes A93 A90 A54 A64 A33C A34C A44C A59W IC circuit 100 V 100 V or less 100 V, 200 V 200 V or less B54 B64 A33 A34 A44 B59W Grommet No Yes No Relay, PLC 12 V 24 V 2-wire Terminal conduit DIN terminal Grommet PLC Relay, PLC Yes 100 V, 200 V Diagnostic indication (2-color) Water resistant type auto switches can be mounted on the above models, but in such case SMC

Table of Contents

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

Rotary Table/

O-ring Steel balls Size: 70 to 200 only Shock absorber Replacement parts Description Kit no.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Air Slide Table

Load mass m [kg] Load mass m [kg] 7 7 6 6 5 5 4 4 V = 200 V = 200 3 3 2 2 V = 300 1 1 V = 300 0 0 20 40 60 80 100 120 140 160 180 200 0 0 50 100 150 200 250 300 L3: Overhang Allowable range: 200 mm L3: Overhang Allowable range: 300 mm Allowable overhang L [mm] Allowable overhang L [mm] 170 MXQ Series Determine the overhang.

CXS

Nil (Example) A93 3m . L A93L 5m .

Cylinder with Turntable Series MGT

200 P = 0.5 MPa m MGTL63 P = 0.5 MPa 100 MGTM63 100 Load mass m (kg) Load mass m (kg) Larger than 100st Larger than 50st 50 40 50st or smaller 75, 100st 30 20 50 25, 50st 40 10 l 30 5 4 3 m 20 2 10 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) 300 300 200 MGTL80 P = 0.5 MPa 200 MGTM80 P = 0.5 MPa 100 Load mass m

MY1

200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

Dual Rod Cylinder Series CXSJ/CXS

5 40 11 38 9 40 11 35.5 6.5 44 15 34 5 44 15 36 7 49 11.5 47 9.5 49 11.5 44.5 7 53 15.5 43 5.5 53 15.5 45 7.5 Note 1) 6: D-A90, A96, A93, F9BAL 10: D-A90, A96, A93 Only outward electrical entry (D dimension) is available.

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Air Cylinder Series CA2

A96 5 V IC circuit Yes A93 A90 A54 A64 A33C A34C A44C A59W IC circuit B54 B64 A33 A34 A44 B59W 100 V Grommet 100 V or less No Yes No Relay, PLC 100 V, 200 V 12 V 200 V or less 2-wire 24 V Terminal conduit PLC 100 V, 200 V Yes DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) Lead wire length symbols: 0.5m Nil (Example)M9NW 1m M (Example)M9NWM 3m L (Example

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

CQS

75, 100, 125, 150 175, 200, 250, 300 25 Reed switch D-A90, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod Anti-lateral Load 12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15