Table of Contents

Same side Same side Different sides Different sides D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 15 10 15 + 50 ( n 2) (n = 2, 4, 6) Mounting D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 2 65 + 50 (n 2) 65 15 10 Warning 15 + 50 ( n 2) (n = 2, 4, 6) 15 75 2 10 1. Do not rotate the cover.

Table of Contents

98.1 N 147.1 N 245.2 N 392.3 N -X Place the center of gravity of the load and center of the slide unit close during operation.

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

NCQ8

S NCDQ8 With auto switch Built-in magnet Number of auto switches Mounting Through-hole Both end tapped Rear clevis Front screw clearance hole Rear screw clearance hole Through screw clearance hole B A C E M N Nil S n 2 pcs. 1 pc. n pcs.

Electric Actuator/Slider Type

Confirm that the external force is 20 [N] or less.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 CRB1 Number of auto switch MSU Size Nil S n 2 pcs. 1 pc. n pcs.

MHZ

Model Opening/ Closing stroke (Both sides) (mm) Gripping force (1) Bore size (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model External Internal MHZ2-6D MHZ2-10D (N) MHZ2-16D (N) MHZ2-20D (N) MHZ2-25D (N) MHZ2-32D MHZ2-40D MHZ2-6S MHZ2-10S (N) MHZ2-16S (N) MHZ2-20S (N) MHZ2-25S (N) MHZ2-32S MHZ2-40S MHZ2-6C MHZ2-10C (N) MHZ2-16C (N) MHZ2-20C (N) MHZ2-25C (N) MHZ2

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

e-Rodless Actuator

100 TA M9B Nominal size Number of auto switches 16 25 Nil S n 2 pcs. 1 pc. n Stroke Refer to the standard stroke table.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke [mm] 25 485 Up to 400 32 588 Up to 500 63 3343 Up to 800 Size Pushing force [N] Stroke [mm] 25 485 Up to 400 32 736 Up to 500 63 1910 Up to 800 Size Pushing force [N] Stroke [mm] 25 485 Up to 300 32 588 Size Pushing force [N] Stroke [mm] 25 485 Up to 300 32 736 659 LECYM/LECYU Series System Construction Absolute encoder compatible LECYM Series -@ type Driver Main circuit power supply

15

Force Conversion Graph (Guide) LEY25l (Motor mounting position: Top/Parallel, In-line) 500 400 Lead 3: LEY25C 300 Force [N] 200 Lead 6: LEY25B 100 Lead 12: LEY25A 0 60 30 120 90 Ratio to rated torque [%] LEY32Dl (Motor mounting position: In-line) LEY32l (Motor mounting position: Top/Parallel) 800 600 700 500 Lead 5: LEY32C 600 400 Lead 4: LEY32DC 500 Force [N] Force [N] 400 300 Lead 10: LEY32B

Integrated Controller

Lead 6: EQY25B 300 Force [N] Select a model based on the pushing force set value and force while referencing the force conversion graph. Lead 12: EQY25A 200 Selection example) Based on the graph shown on the right side, Pushing force: 100 [N] Pushing force set value: 40 [%] The EQY25DHB can be temporarily selected as a possible candidate.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

2 pcs. 1 pc. n pcs.

2–4

. n pcs.

Table of Contents

0.042 0.17 0.33 1.1 1.9 2.9 0.037 0.15 0.29 1.0 1.7 2.6 0.033 0.14 0.26 0.92 1.6 2.4 0.059 0.26 0.81 1.8 3.0 4.3 0.052 0.24 0.74 1.6 2.7 4.0 0.047 0.22 0.69 1.5 2.6 3.8 0.85 1.4 2.2 0.78 1.3 2.1 0.73 1.2 2.0 0.68 1.2 1.8 0.17 0.59 1.1 3.9 5.7 8.5 0.15 0.54 1.0 3.6 5.3 7.9 0.14 0.56 1.1 3.8 5.7 8.6 With auto switch: CDUK-D With auto switch: CDUK-S With auto switch: CDUK-T (N) (N) (N) Model

Compact Type

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (

CQS

2 pcs. 1 pc. n pcs.