Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: M, Plumbing Thread Nominal: M5, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.5, Insulation Class: B, Pipe opening type (details): Body Ported Type, Voltage: 12 V DC, Option: Bracket, Power Consumption(W): Inrush: 2.5 / Holding: 1,

Table of Contents

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Note Description SY940 M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm SY5000-27-1*-Q Rc 1/4: SY7000-27-1*-Q Rc 3/8: SY7000-27-2*-Q SY3000-27-1*-Q Rc 3/8: SY9000-27-1*-Q Rc 1/2: SY9000-27-2*-Q 6 Die-cast aluminum Sub-plate *Thread Pilot valve assembly Refer to "How to Order Pilot Valve Assemblies" on page 1.2-32.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.

ZP

M6 x 1 A8 M8 x 1 G J J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

Table of Contents

M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46

One-touch Fittings

[mm] 4 1/8 KQ2D04-01P 12 8.2 15.8 22.6 21.5 13.3 5.7 6 3.2 8.2 6 6 3.6 9.1 1/4 KQ2D04-02P 17 8.2 15.8 26 22.5 13.3 5.7 6 3.2 8.2 6 6 3.6 19 O N L1 M 6 1/8 KQ2D06-01P 12 10.4 16.8 23.6 23.6 13.3 6.7 6 3.2 10.4 13.9 11 5.4 9.7 1/4 KQ2D06-02P 17 10.4 16.8 27 24.6 13.3 6.7 6 3.2 10.4 13.9 11 5.4 19.3 3/8 KQ2D06-03P 21 10.4 16.8 26.5 24.1 13.3 6.7 6 3.2 10.4 13.9 11 5.4 27.6 Q 8 1/8 KQ2D08-01P

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SYJ7000-22-1(-Q) SYJ7000-22-2(-Q) V111(T)No. 1 2 3 4 5 6 Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate Note) 7 8 Pilot valve Note) Add suffix -Q for the CE-compliant product.

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Table of Contents

6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-20A(-Q) 10-SY5000 SY5000-38-1A(-Q) 10-SY7000 SY7000-38-1A(-Q) SUP port 10-SY3000 SY3000-39-20A(-Q) 10-SY5000 SY5000-39-1A(-Q) 10-SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 10-SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 10-SY9000 SY9000-38-1A(-Q) 1 4 Note) The SUP port of 10-SY3000/5000/7000 may be either on the lead wire side or on the end plate

A

5/16-24 2 1/2 0.3 1.26 1.06 1 3/8 2.09 2.40 6 9/16 1 3/8 2 11/16 1 3 5/8 6 6 1 3/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 1/8 1 5/8 1 1/8 5/16-24 3 1 3/8 6 11/16 250 (2.5) 3.1 1.5 0 1.3 1.06 2.13 2.48 1 3 1/8 3 3/4 3/8 1 6 1/8 6 1/8 2 1/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 5/8 115/16 1 1/2 1 1/4 3/8-24 3 3/4 1 5/8 7 7/8 325 (3.25) 3.9 2 0 1.57 1.18 2.59 2.72 1 3/8 3 13/16 4 1/4 1/2 1 1/4 7 3/8

NCQ2/CQ2

1, !2, !3, !6, 1@, @8 50 grease pack. 63 Warranty and Operating Instructions 80 100 CBQ2B100-PS Seal kit includes !0, !1, !2, !3, !6, 1@, @8.Order the seal kit based on each bore size. The seal kit does not include a grease pack, order it separately.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Table of Contents

6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No. Description Material Bushing B !

Modular F.R.L. Units

Applicable Model Applicable Model Model AF20-A AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Model AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AF A X425 2 03 B 30 AF A 2 03 B X430 q w t y e r For high pressure q w y e r t Semi-standard: Select one each for a to c.

Compact Cylinder

Weight (g) (g) Additional Weight Weight 12 16 20 25 32 40 50 63 80 100 1 1.5 1 0.7 0 49 54 52 29 Cylinder stroke (mm) Bore size (mm) Both ends tapped Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 43 64 94 134 182 269 45 175 116 96 56 1 3 2 1.3 0 62 67 63 35 3 6 4 2 2 147 131 124 78 3 12 8 3 3 169 153 144 114 6 26 17 5 3 12 142 180 165 151 6 27 17 7 7 12 154 214 198 196 6 53 32 13

Table of Contents

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

Table of Contents

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

2/3 Port Valve

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.