Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

AC Servo Motor Driver (Pulse input type/Positioning type ）

NC 1 2 3 4 5 6 7 8 LG P5D RDP SDN SDP RDN LG NC 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 RDP (Note 8) (Note 2) 150 RDN (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

A

3 5/8 6 6 1 3/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 1/8 1 5/8 1 1/8 5/16-24 3 1 3/8 6 11/16 250 (2.5) 3.1 1.5 0 1.3 1.06 2.13 2.48 1 3 1/8 3 3/4 3/8 1 6 1/8 6 1/8 2 1/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 5/8 115/16 1 1/2 1 1/4 3/8-24 3 3/4 1 5/8 7 7/8 325 (3.25) 3.9 2 0 1.57 1.18 2.59 2.72 1 3/8 3 13/16 4 1/4 1/2 1 1/4 7 3/8 7 3/8 2 3/4 5/8 11/64 1-14 3/4 5/8 1/2 1 3/8 1 5/8 2 1/4 1 1/2 1 1/

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Smooth Cylinder/Low Speed Cylinder

=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 35 + 35(n-2) 20 + 35 D-M9V 35 20 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 25 + 35(n-2) 15 + 35 D-A9V 25 15 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 D-M9WV D-M9AV 35 + 35(n-2) 20 + 35 35 20 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 50 + 45(n-2) D-C7 D-C80 15 + 45 50 15 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) D-H7 D-H7W D-H7NF (n-2) 2 60 +

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

However, they can be configured by one. 3 6 3.

LEC-OM071xx

13 7 8 9 10 11 ON OFF H P-OT 0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS

LEC-OM07605CN

(6) (7) SSCNET () CN1A CN1B CN1A (1) CN1B 8 (7) CN1A LE-CSS(6) SSCNET (9) () CN1B 3 6 3. 1.

1

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions. 6-17-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6-17-2 3 Made to Order Simple Specials: Simple Specials P. 6-17-3 CJ1 Page z -XA0 to A30 Change of rod end shape 6-17-4 x -XA1

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

LEC-OM069xx

13 7 8 9 10 11 ON OFF H P-OT 0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS

Made to Order

6 18 19 25 30 35.5 39.5 47 58 10 10 12 12 16 16 20 20 8 10 10.5 13.5 15 18 21.5 28 3 3 3 4 4 4 5 5 6 6 6 6 6 6 8 8 8 8 9.5 9.5 11 11 14 14 4.5 4.5 5.5 5.5 7.5 7.5 9 9 M5 x 0.8 13 15 12.5 12.5 7 13 9 14 14 16 18 26 30 30 40 50 RB0806 M12 x 1.5 3 3 3 3 3 3 4 4 M5 x 0.8 5 5 17 17 21 22 24 24 M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 RB0806 M12 x 1.5 M5 x 0.8 RB1007 M14 x 1.5 M6 x 1.0 NPT1