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Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Option S Gauge port (Inlete, Outletr) Specification Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 Pressure gauge 1) SHP Standard (Cv: 0.09) High flow (Cv: 0.15) No code HF Code psig/bar unit MPa unit Surface finish No gauge port No code Seat material Surface finish Ra 10 in. (0.25 m) Standard 25 in. (0.62 m) Code No pressure

Check Valve Series AP64 Simple design with free of springs and poppets Reseals with minimal back pressure Low cracking pressure How to Order (Inlet) (Outlet) AP64 MV4 MV4 S Material Seat material Body material 316L SS secondary remelt Code Code Material FKM (Standard) CR S No code NP Surface finish Connections (Inlet, Outlet) Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25

S SHP SH 316L SS secondary remelt 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy Seat material Ni-Cr-Mo alloy H Material PCTFE (Standard) Polyimide 3) PTFE 4) 5) Code No code VS TF Gauge port (Inlete, Outletr) Pressure gauge 1) psig/bar unit MPa unit Surface finish Code Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) 3) Not available

psig (0.007 to 0.7 MPa) SL5202 0.5 to 30 psig (0.0034 to 0.2 MPa) SL5201 0.5 to 10 psig (0.0034 to 0.07 MPa) 100 mm Hg absolute to 10 psig (-88kPa to 0.07 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra

to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 13 16 52 6.5 M8 x 1.25 26 14 7 40 5.4 46.5 39.5 5 to 100 M6 x 1 9 M5 x 0.8 M5 x 0.8 2.5 48.5 Note 2) 40.5 Note 2) 15 20 64 7.5 M10 x 1.5 32 17 8 50 6.6 10 to 100 M8 x 1.25 11 3.5 Rc, G, NPT1/8 Rc, G, NPT1/8 15 20 77 7.5 M10 x 1.5 38.5 17 8 60 9 10 to 100 54 46 M10 x 1.5 14 3.5 Rc, G, NPT1/8 Rc, G, NPT1/8 Bore size (mm) Stroke range (mm) 32 40 50 63 RA

GR-L-010 (10 g) D-X Individual -X 1225 Series RZQ Dimensions Basic style (Double end tapped): RZQA 3 x P (Port size: Rc, NPT, G) FA Q FB H effective thread depth C G I D E M K Z a a A + Full stroke L B + Full stroke M K J E W T RA 4 x O1 effective thread depth RB 4 x O1 Section a-a Basic style (Through-hole): RZQB 32, 40 Washer 2 x RR 2 x RH Flat washer: 2 positions (Included) b 2 x N 2 x

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

Right arm) PD0.05 PB0.02 LA0.1 LB L PA0.02 PC0.05 N 2 x 2-PH7 Depth D 2 x 2 x NPT 1/4 G 2 x 2 x MM Depth J E B RD (mm) Bore (mm) B C D E GA GB GC J L LA LB MM N P 50 63 80 12 15 12 95 112 154 48 54 76 13.7 16.6 19.6 134.3 141.2 185.8 138.5 147.5 199 93 90.5 137.5 12 12 18 376.7 395.6 530.9 149.5 158.5 214 78.4 78 113.7 19 22 30 8 10 12 M8 x 1.25 M10 x 1.5 M12 x 1.75 Bore (mm) PA PB PC PD R RA

Dimensions [mm] Bore size [mm] Standard stroke [mm] A B C DA DB E FA FB G GA GB GC H HA J K L 25, 50 st Over 50 st 25, 50 st Over 50 st 50 25, 50, 75, 100 125, 150, 175, 200 86 110 86 44 20 30 0 24 29.5 12.5 72 14 11 12 160 M10 35 37 50 80 118 151 118 65 25 45 0 33 35 18 95 19 24 14.5 242 M12 47 48 66 Bore size [mm] MM ML NN NL OA OB OC OL P PA PB PW Q QA QB RA RB RR Nil N TF 50 M12 x 1.75

CN1 CN1 24VDC Emergency stop (Note 6) EMG DOCOM (Note 4) Servo-on SON DICOM (Note 4) ALM Trouble RA DOCOM 9 - 3.2 I/O signal connection for each mode The example of connecting driver's I/O signal is shown. 3.2.1 Position control mode (Sink I/O interfaces) (1) Connection example A connection example of the position control mode is shown below. Connect wires if necessary.

CN1 CN1 24VDC Emergency stop (Note 6) EMG DOCOM (Note 4) Servo-on SON DICOM (Note 4) ALM Trouble RA DOCOM -12- 3.2 I/O signal connection 3.2.1 Connection example (Sink I/O interfaces) An example of a connection for the I/O signal connection is shown below. Connect wires as necessary.

CN1 CN1 24VDC Emergency stop (Note 6) EMG DOCOM (Note 4) Servo-on SON DICOM (Note 4) ALM Trouble RA DOCOM -12- 3.2 I/O signal connection 3.2.1 Connection example (Sink I/O interfaces) An example of a connection for the I/O signal connection is shown below. Connect wires as necessary.

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

XL XB XAH7 a b c d e XAH7 XC XL (mm) X X0.02 a b c d e Bore size (mm) XX section detail drawing 63 80 100 11 17.8 10 7 18.5 13.3 20.3 12 8 22.5 2-R3 15.3 23.3 13.5 10 30 8 6+0.05 0 6 WB Z WA XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA

W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 14 32 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18

Bore size (mm) B1 C1 H1 L1 MM X 12 8 9 4 14 M5 x 0.8 10.5 16 10 10 5 15.5 M6 x 1.0 12 20 13 12 5 18.5 M8 x 1.25 14 25 17 15 6 22.5 M10 x 1.25 17.5 Standard Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T A B A B 12 5 to 30 25.5 22 30.5 27 6 6 25 5 M3 x 0.5 32 5 3.5 15.5 3.5 M4 x 0.7 6.5 7.5 7 4 0.5 16 5 to 30 25.5 22 30.5 27 8 8 29 5 M4 x 0.7 38 6 3.5 20 3.5 M4 x

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

Bore size Arm opening angle 050 50 equivalent 063 63 equivalent J 15 H 30 G 45 F 60 E 75 D 90 C 105 B 120 A 135 * The stopper bolt kit includes a stopper bolt and mounting brackets. 3 NAAMS Standards Compliant Power Clamp Cylinder CKZ3N -X2742A -X2568 Dimensions: Base Type Rubber cover type XC XB R RR RA (Dual arm) RB (Right arm) RC (Left arm) Release point Pivot point with square flats

38.50.05 470.05 450.1 250.1 44.5 350.02 120.05 +0.1 40 0 99.4 96.8 250.02 3.5 8N9 ( ) 0 -0.036 265.9 350.02 2 x 2 x 6 H7 depth 8 2 x 6 H7 depth 10 NPT 1/8 G 2 x 2 x M6 x 1.0 depth 10 4 x M6 x 1.0 depth 10 NPT 1/8 G 52 52 198 B Power Clamp Cylinder Series CKZT Dimensions (Clamp Cylinder Without Arm) CKZT50, 63, 80 Release point XA CK1 CLK2 C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA RA