XL Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.
Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.
Rc 1/4 200 200 ARP 400 (mm) 674 A 481 520 444 477 526 B 394 429.8 394 429.8 429.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 1/2 D Note) 469 493 Booster regulator model VBA20A VBA40A VBA22A VBA42A VBA43A IR-A IR IRV Note) When option G (pressure gauge) is selected VEX VBAT38S1 Connected to VBA20A, 40A, 43A Material: Stainless steel 304 SRH Connected to VBA22A, 42A SRP Tank IN port Rc 1/2 Booster
T High-pressure pump mounted *3 T1 Inverter pump mounted Cooling method *4 U Compliant with UL standards A Air-cooled refrigeration Y With feet / Without rack mounting brackets Pipe thread type *5 Z Without either a flow sensor, Nil Rc Water leakage sensor, Particle filter, F GWith Rc-G conversion fitting set Bypas valve or retaining clip N NPTWith Rc-NPT conversion fitting set *5 Z1 Without
Port size Base model Applicable stations VFR Piping direction Series 1(P), 35(R) 4(A), 2(B) VQ7 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Side VV5QZ15VQZ150 VQZ151 VQZ1000 2 to 20 stations Rc 1/8 C4 (for 4) C6 (for 6) C8 (for 8) Rc 1/8 Side VV5QZ25VQZ250 VQZ251 VQZ2000 2 to 20 stations Rc 1/4 1(P) port Rc 3/8 35(R) port Rc 1/4 C6 (for 6) C8 (for 8) C10 (for 10) Rc 1/4 Side VV5QZ35VQZ350
E 300 L 03 D L-shaped piping adapter q w e q Body size [Applicable AC size] 200 [AC20] 300 [AC30] 400 [AC40] 500 [AC40-06] 600 Symbol Description [AC50, AC60] w Pipe thread type Nil Rc V V V V V N NPT V V V V V F G V V V V V + 01 1/8 V V 02 1/4 V V V 03 3/8 V V 04 1/2 V V V e Port size Port size 06 3/4 V V 10 1 V Standard Specifications Fluid Air Ambient and fluid temperatures 5
Rc 3/8 (Port) W CH LH RR SS NE RR SS H PP QQ NH NC Cushion needle 2-Rc 3/8 (Hexagon socket head taper plug) 2-Rc 3/8 (Hexagon socket head taper plug) GA TT UU UU TT GC Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) G NW A GB N Z + Stroke Rc 3/8 (Hexagon socket head taper plug) WW WW Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) Rc 3/8 (Port) XX XX Centralized piping Centralized
Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 (5) (6) (7) 6 10 15 Selection graph (8) (9) (10) (11) (12) (13) (14) (15) 20 25 32 The maximum speeds for 6 to 32 are: 6, 10: Up to 800 mm/s; 15, 20: Up to 700 mm/s; 25, 32: Up to 600 mm/s Caution
Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 Up to 400 more than 400 (5) (6) (7) 6 10 15 Selection graph (8) (9) (10) (11) (12) (13) (14) (15) 20 25 32 The maximum speeds for 6 to 32 are: 6, 10: Up to 800 mm/s; 15, 20: Up to 700 mm/s; 25, 32: Up to 600 mm/s Caution
1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A
1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A B O
1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.
[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160
PE port 18 18 Rc 1/4, 3/8 1(P) port (For Rc 1/4) (For Rc 1/4) 2-Rc 1/4, 3/8 3(R2), 5(R1) port 21 21 M5 x 0.8 external pilot port (Only external pilot type (R)) (For Rc 3/8) (For Rc 3/8) 33 L plug connector (L): VQZ3150 1(R)-L-02 03 DIN terminal (Y): VQZ3150 1(R)-Y-02 03 Indicator light 300 108.5 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 111.5 Max. 10 Applicable
Nil Rc 1/4 (Right side) Rc 1/2 (Right side) Rc 1/4 (Left side) Rc 1/2 (Left side) Rc 1/4 (Bottom side) Rc 1/2 (Bottom side) Mixed 1(P), 3(R2), 5(R1) port connection 03R 04R 03L 04L 03Y 04Y Nil SB None With NPTF T G F VZS Note) The mounting position of the silencer box corresponds to 3 (R2) and 5 (R1) port connections.
Nil Rc 1/4 (Right side) Rc 1/2 (Right side) Rc 1/4 (Left side) Rc 1/2 (Left side) Rc 1/4 (Bottom side) Rc 1/2 (Bottom side) Mixed 1(P), 3(R2), 5(R1) port connection 03R 04R 03L 04L 03Y 04Y Nil SB None With NPTF T G F VZS Note) The mounting position of the silencer box corresponds to 3 (R2) and 5 (R1) port connections.
MY2C16 MY2H16 Horizontal impact: P = 0.5 MPa Horizontal impact: P = 0.5 MPa 2000 2000 1500 1500 H unit Impact speed mm/s Impact speed mm/s 1000 1000 L unit 500 400 500 L unit 400 300 300 Air cushion Air cushion 200 200 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.
12 00F 12 stations 00N NPTF 00T 1(P) port Rc 1/4 3/5(R) port Rc 1/4 For How to order applicable connector assemblies, refer to page 3-3-7.
mounting (For manifold) IN side port size OUT side port size D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F With bracket N Name plate Note) When two or more symbols are specified, indicate them alphabetically