A

Collision Speed (mm/s) 200 200 1500 200 1500 Max.

Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

IDX-OM-M051

Checks and Inspection Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less

IDX-OM-Z004

50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L) (mg/L) 1.0 0.1 1.0 (mg/L) 0.3 0.3 0.3 (mg/L) 4.0 4.0 4.0 6.07.0 1 2 JIS K 0101 2 a b c 4.2 IDF100150F-W 4 2 IDX-OM-Z004 4 (3) 1 Y Y , Y Y (4) 3 2 (5) 1( 2 3 4 a) 1. 1.5 2. 4.2 IDF100150F-W

Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC

Compact 5-Port Solenoid Valve

CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 140 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 1000 mm 160 180 200 0 100 200 300 400 500 600 700 800 900 1000 Average speed [mm/s] ZK2 Combination Manifold Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions * Values at extension of a directly coupled cylinder when meter-out speed

CM2

With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

, 250, 320, 400, 500 1000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1900 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 125 2000 Made to Order (For

10

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 (Connection: 1/4) 500 700 10 (Connection: 3/8, 1/2) Flow rate Q [L/min (ANR

Rotary Table/

= m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

5 2r2 = m 4 r2 CRQ2 = m 12 a2 + b2 MSQ MRQ 10.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) L: DIN Rail Overall Length n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 148 148 160.5 173 185.5 198 210.5 210.5 223 235.5 248 260.5 273 273 285.5 298 310.5 323 135.5 137.5 137.5 150 162.5 175 187.5 200 200 212.5 225 237.5 250 262.5 262.5 275 287.5 300 312.5 125 112.7 123.2

Electric Rotary Table

/400 W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) AC servo motor (100/200/400 W) Features 12 Series Variations Electric Rotary Table Series LER Max. speed [/s] Positioning repeatability [] Controller /Driver series Rotating torque [Nm] Reference page Type Basic High torque Basic High torque Basic High torque LER10 0.2 0.3 Series LECP6 280 420 0.05 (End: 0.01) Series LECP1

VQ7-6

FPG 1 (P) 5 (R1) 3 (R2) Coil rated (A) 4 (B) 2 100 VAC 200 VAC 24 VDC 12 VDC 1 2 3 4 9 FIG 1 (P) 5 (R1) 3 (R2) Other voltages Option For other voltages, please contact SMC separately.

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

(A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ Note 2) 8 2 1 (P) 3 (R2) 1 (P) 3 (R2) 5 (R1) 5 (R1) 5 (R1) 1 (P) 3 (R2) VQ4 Metal seal Rubber seal 3 position closed center 3 port for mixture mounting (N.O.) (A) 4 (B) 2 (A) 4 (B) 2 Note) For inch size one-touch fittings and optional thread type, refer to page 933.

Sine Cylinder Series REC

Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.

Sine Cylinder Series REC

Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.

Sine Cylinder Series REC

Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.