Plug Part Number Bore size [mm] Part number Port thread type Quantity 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 * 1 set includes 8 pieces.
17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 19 63 28 8 80 80 60 22.4 55 30 11 12 102 60 122 17 17 13 M10 x 1.5 22 20 25 M18 x 1.5 30 26 3/8 21 80 32 8 100 100 75 28 65 32 13 12 130 75 155 22 20 15 M12 x 1.75 26 26 29 M22 x 1.5 35 30 1/2 26 100 38 6.5 118 118 90 35.5 80 35 13 16 145 90 172 27 19 16 M12 x 1.75 27 26 34 M27 x 2 35 32 1/2 34 125 38 6.5 140 140 112 35.5 80 35 15 18 170 112 200
Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .
Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .
x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt
x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt
() 200 ms() 1.5 s() 0.5F.S. 1 digit 3+1/2 7 2 (/)5 /1s OUT1ON ()OUT2ON () IP40 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) 0.5%F.S.(25 ) 5P 4P PBTPBT 30 g() CEUL/CSA 12 5 2 -32No.IZ*-OMU0031 (ZS-28-A) 2 0.2 mm 0.58 mm 1.12 mm 4.1 -33No.IZ*-OMU0031 0.56 mm R R2 2 (n ) <> <> 31Xn +3.5X(n -1) 31Xn +3.5X(n -1) -34No.IZ*-OMU0031 Revision history A 4-14-1, Sotokanda
Voltage (kclory installed only) b f-, I r2'.r^ ln case ol double (V solenoid. (vJ3000-13-1) Type of actuation 1 | 2 position, smgle solenod 2 I 2 posfton doube solenod 3 | 3 posibon closed cenbr 4 | 3 positon ex haLrst cenler 5 | 3 positon pressure ceiter ' Bectified. 24VAC available t e dolble $lsoid !
Fluid: air and inert gas, Operating pressure: 0.1MPa to 1.0MPa, Effective area (Cv): 2.2 to 5.7, Coil rated voltage: 100, 200 VAC 50/60Hz; 24VDC, Response time: 60 or less ms, Ambient/fluid temp: -10 to 60 C, SUBPLATE, 1/2 PT, VALVE, VFS5000 SOL VALVE 4/5 PORT, R2, VFS5000 BASE MT 1/2, 1.47253 lb
Fluid: air and inert gas, Operating pressure: 0.1MPa to 1.0MPa, Effective area (Cv): 2.2 to 5.7, Coil rated voltage: 100, 200 VAC 50/60Hz; 24VDC, Response time: 60 or less ms, Ambient/fluid temp: -10 to 60 C, SUBPLATE, 1/2 PT, VALVE, VFS5000 SOL VALVE 4/5 PORT, R2, VFS5000 BASE MT 1/2, 1.96129 lb
Fluid: air and inert gas, Operating pressure: 0.1MPa to 1.0MPa, Effective area (Cv): 2.2 to 5.7, Coil rated voltage: 100, 200 VAC 50/60Hz; 24VDC, Response time: 60 or less ms, Ambient/fluid temp: -10 to 60 C, SUBPLATE, 1/2 PT, VALVE, VFS5000 SOL VALVE 4/5 PORT, R2, VFS5000 BASE MT 1/2, 1.6368 lb
Fluid: air and inert gas, Operating pressure: 0.1MPa to 1.0MPa, Effective area (Cv): 2.2 to 5.7, Coil rated voltage: 100, 200 VAC 50/60Hz; 24VDC, Response time: 60 or less ms, Ambient/fluid temp: -10 to +60°C, SUBPLATE, VALVE, VFS5000 SOL VALVE 4/5 PORT, R2, VFS5000 BASE MT 1/2, 1.76369 lb
Voltage (kclory installed only) b f-, I r2'.r^ ln case ol double (V solenoid. (vJ3000-13-1) Type of actuation 1 | 2 position, smgle solenod 2 I 2 posfton doube solenod 3 | 3 posibon closed cenbr 4 | 3 positon ex haLrst cenler 5 | 3 positon pressure ceiter ' Bectified. 24VAC available t e dolble $lsoid !
Voltage (kclory installed only) b f-, I r2'.r^ ln case ol double (V solenoid. (vJ3000-13-1) Type of actuation 1 | 2 position, smgle solenod 2 I 2 posfton doube solenod 3 | 3 posibon closed cenbr 4 | 3 positon ex haLrst cenler 5 | 3 positon pressure ceiter ' Bectified. 24VAC available t e dolble $lsoid !
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm
Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 200mm, Motor Option: -, Auto Switch Mounting Bracket: -, Grease Application: -, Positioning Pin Hole: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Cable Length: -
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: S (Standard Cable), Cable Length:
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: S (Standard Cable), Cable Length:
Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable, Flexible Cable)
Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 200mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Standard Cable, Cable Length: 2m, Driver Type: LECSA1