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CompoBus/D compatible EX140-SDN1 Q 0.1A F, H, J1, J2 Q, R1, R2, V Current consumption (within unit) OMRON Corporation: CompoBus/S (16 points) compatible EX140-SCS1 R1 OMRON Corporation: CompoBus/S (8 points) compatible EX140-SCS2 R2 Mistubishi Electric Corporation: CC-Link compatible EX140-SMJ1 V Type SR1/SR2 OMRON Corporation CompoBus/S compatible Type SV Mitsubishi Electric Corporation

In the case the load voltage is 100 or 200V AC. Be sure to use the contact protection box in any case mentioned above. Otherwise, the contact life may be shortened. (Due to permanent energizing conditions.)

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

.: SZ DIN rail holding screw DIN rail holding screw SY SYJ SX 300 (Lead wire length) (Rail mounting hole pitch 12.5) (Rail mounting hole pitch 12.5) L1 (mm) L1 Manual override Stations n L1 L2 L3 L4 2 stations 135.5 125 100 17.5 3 4 5 6 7 8 9 10 stations (Press and turn for the locking type.)

I I I 3.886 4.661 5.436 6.2t1 Table 6.19 Theoretical Air Consumption ot double acting cylinders from 20 to 100 mm dia, in liters per 100 mm stroke Example 1.

I I I 3.886 4.661 5.436 6.2t1 Table 6.19 Theoretical Air Consumption ot double acting cylinders from 20 to 100 mm dia, in liters per 100 mm stroke Example 1.

-XC12 to XC17, XC20/XC21 3 Change of Angle Adjustable Range (0 to 100, 90 to 190) CRB2 Symbol: C12 Symbol: C13 CRQ2B CDRQ2B X C12 Refer to How to Order on page 256. The rotation angle can be adjusted between 0 and 100. The rotation angle can be adjusted between 0 and 100.

FPG 1 (P) 5 (R1) 3 (R2) Coil rated (A) 4 (B) 2 100 VAC 200 VAC 24 VDC 12 VDC 1 2 3 4 9 FIG 1 (P) 5 (R1) 3 (R2) Other voltages Option For other voltages, please contact SMC separately.

(A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ Note 2) 8 2 1 (P) 3 (R2) 1 (P) 3 (R2) 5 (R1) 5 (R1) 5 (R1) 1 (P) 3 (R2) VQ4 Metal seal Rubber seal 3 position closed center 3 port for mixture mounting (N.O.) (A) 4 (B) 2 (A) 4 (B) 2 Note) For inch size one-touch fittings and optional thread type, refer to page 933.

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range For vacuum pressure ZSE30A 0 101 kPa 105 kPa 10 kPa For compound pressure 100 kPa 100 kPa ZSE30AF 105 kPa 105 kPa For positive pressure 100 kPa 1 MPa ISE30A 105 kPa (0.105 MPa) 1.05 MPa Rated pressure range of switch Set pressure range of switch Back page 2 These safety instructions are intended to prevent hazardous situations and/or equipment

L Accumulated volume per pulse (Pulse width = 50 ms) Select from 100 L/pulse or 1000 L/pulse.

ZSE20 ISE20 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range ZSE30 ISE30 ZSE30 ISE30 Switch ZSE40 ISE40 For vacuum pressure 101 kPa 0 ZSE30A 10 kPa 105 kPa ZSE10 ISE10 For compound pressure 100 kPa 100 kPa ISE70 ZSE30AF 105 kPa 105 kPa ZSE80 ISE80 For positive pressure 100 kPa 1 MPa ISE30A 105 kPa (0.105 MPa) 1.05 MPa PS Rated pressure range of switch Set pressure range of switch ISA3 ISA2

switch setting Turn ON No. 2 and No. 5, and (a) 24 VDC +/10% R2 = 1.5 k turn OFF the others.

Name of terminal block (LED) Note POWER RUN SD RD ERR RUN ERR TRD 10 1 24V 0V S1 S2 SG R1 R2 FG SDA SDB SG RDA RDB FG 24V 0V VV5Q14 LED name POWER Details Lighting when power is turned ON Lighting when data transmission with the master station is normal Lighting during data reception Lighting during data transmission Lighting when reception data error occurs.