3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Note) Note) For the special voltages, please consult with SMC. 4-14-11 Body Ported 12 Series VQZ100/200/300 How to Order Manifold: VQZ200/300 VV3QZ 2 2 08 C D Series Option 2 3 VQZ200 VQZ300 Nil None DIN rail mounting style (With DIN rail in standard length) DIN rail mounting style (Without DIN rail ) D DO Note) Note) Order DIN rail separately.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

override 34 41 3.5 (Lead wire) 38.5 300 Cover diameter 1.6 Cross section 0.34mm2 SMC 35.5 A port PE 16 12 14.5 7 7.5 7.5 7.5 3-Rc(PT)1/8 P/A/R port M5 X 0.8 PE port L plug connector (L): VQZ115(R)-lLl-01 M plug connector (M): VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5

VZ5000

C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01 M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Standard lead wire length: 300 mm.

VZS

(External pilot port) Not machined K plug connector: VZS2150-KZ-01 L plug connector: VZS2150-L(Z)-01 (Lead wire length) With light/ surge voltage suppressor 300 (Lead wire length) 300 Other dimensions are the same as the grommet type.

Metal Seal/Rubber Seal Series VQ Body Ported

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Membrane Air Dryer

300 500 500 110 Drain discharge method Symbol Note H L S Manual valve Nil 75 170 240 100 300 150 C D N.C. auto-drain N.O. auto-drain Auto-drains listed on 50 page 17 are attached.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Cover diameter 1.4 Cross sectional area 0.2mm2 SMC 35.5 A port PE 16 12 7.5 7.5 14.5 7 7.5 1/8 NPTF P,A,R port M5 x 0.8 PE port L type plug connector (L): VQZ115(R)L -01T M type plug connector (M): VQZ115(R)M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 55.5 Indicator light Cover diameter 1.5 Cross sectional

Table of Contents

300 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) 400 400 250 250 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.4 MP 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MP 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3

5-Port Solenoid Valve

0.45 MPa 300 300 0.3 MPa 0.3 MPa 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor rotations Number of restrictor rotations SY3A3R-C6 SY5A3R-C6 500 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 0.6 MPa 0.6 MPa 400 400 0.45 MPa 0.45 MPa 0.3 MPa 0.3 MPa 300 300 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor

LJ1H

Lateral empty weight deflection 2 2 1 1 Horizontal empty weight deflection 0.5 0.5 Lateral empty weight deflection 0.2 0.2 0.1 0.1 200 300 500 1000 100 200 300 500 1000 100 Load point distance (mm) Load point distance (mm) 45 AC Servo Motor Driver (Pulse Input Type) Incremental Type Series LECSA Absolute Type Series LECSB Series LECSA Series LECSB Incremental Type/LECSA Page 98 Compatible

MLGP

300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 25 26 50 51 6 10 100 200 200 300 300 25 26 50 51 Stroke (mm) Stroke (mm) Features 13 Low Profile Guide Cylinder with Lock Series MLGP Operating Range when Used as Stopper Warning 2.

MLGP

300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 25 26 50 51 6 10 100 200 200 300 300 25 26 50 51 Stroke (mm) Stroke (mm) Features 13 Low Profile Guide Cylinder with Lock Series MLGP Operating Range when Used as Stopper Warning 2.

4/5 Port Air Operated Valve Series SYJA3000

59.6 [66.6] Approx. 300 (Lead wire length) 33 48.5 [55.5] Refer to page 1-5-79 for dimensions with connector cable.

AC Servo Motor Driver (Network card type ）

PB53] Gain characteristics 1 Hz 300 Hz Resonance of more than 300 Hz is not the target of control. Vibration suppression control 1 Vibration frequency Vibration suppression control 1 (anti-resonance frequency) Resonance frequency [Pr. PB19] [Pr.

3 Port Solenoid Valve Metal Seal Series VZ200 1

suppressor Max.10 93 87.5 With light/surge voltage suppressor 300 (Lead wire length) 79.9 300 (Lead wire length) 300 (Lead wire length) 2-M5 x 0.8 (Pilot EXH) 2-M5 x 0.8 (Pilot EXH) P = 20 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5 x 0.8 Manual override (Non-locking) 11.5 11.5 With light/surge voltage suppressor V100 30.3 22.3 P E PE SY 4-Rc 1/4 4-Rc 1/4 2-5.3 mounting hole 4-Rc1/4 4-Rc 1/4

V

) YO Terminal without Connector (VQZ200/300) YZ DIN Connector (VQZ200/300) YOS DIN Terminal without Connector (VQZ200/300) Note 1) Applicable to DC Specification Note 2) Optional Specification Note 3) When specifying more than one option, combine symbols in alphabetical order.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

100

B2 Supply valve (N.O.) 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (300 mm) M: With lead wire (300 mm) MN: Without lead wire U With light/surge voltage suppressor (Non-polar type) r Rated voltage DC CE-compliant 5 24 VDC V 6 12 VDC V V 6 VDC V S 5 VDC V R 3 VDC V * For type U, only DC voltage is available