High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

mlu

D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB NA K 2 x 4-NC counter bore Prepared hole diameter NE H S + Stroke ZZ + Stroke BY BB BS

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DJ x 1.6 III Detecting assembly gasket NBR I Note) A detecting rod assembly(BS-2) is required to operate the switch. When a switch is fitted, a detecting rod assembly is attached. When a switch is unnecessary, a blanking plug (BS-1) should be fitted. 65-2 Detecting rod assembly Part No.

60

VHS2510 VHS3510 VHS4510 VHS5510 Double action 1/8 1/4 3/8 1/2 3/4 Body 1 Features 2 Conforming to OSHA Standard Pressure Relief 3 Port Valve with Locking Holes (Single Action) SeriesVHS20/30/40/50 RoHS How to Order 04 A BS VHS 40 Single action Pressure relief 3 port valve Made to Order Symbol Description Body size X1 Body: Red Note) Symbol Note) Refer to Photo of X1 in Feature 2 Thread type

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

MLU

+ Stroke BA 2-BT (mm) Stroke range Model A BY D GW GY H H1 B1 C B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37

Electric Actuator / Slider Type 《 AC Servo Motor 》

5.75 6.00 6.25 6.50 6.75 7.00 7.25 Motor type S6 3.06 3.31 3.56 3.81 4.06 4.31 4.56 4.81 5.06 5.31 5.56 5.81 6.06 6.31 6.56 6.81 7.06 7.31 T6 3.04 3.29 3.54 3.79 4.04 4.29 4.54 4.79 5.04 5.29 5.54 5.79 6.04 6.29 6.54 6.79 7.04 7.29 Additional weight for lock(kg) S2:0.2/S6:0.3/T6:0.3 Model LEFB32 Stroke [mm] 300 400 500 600 700 800 900 1000 (1100) 1200 (1300) (1400) 1500 (1600) (1700) (1800

AC Servo Motor Driver (Pulse input type/Positioning type ）

. _ x _ _ Notch depth selection 0h 0: -40 dB 1: -14 dB 2: -8 dB 3: -4 dB x _ _ _ For manufacturer setting 0h Table 5.5 Shaft resonance suppression filter setting frequency selection Setting value Frequency [Hz] Setting value Frequency [Hz] _ _ 0 0 Disabled _ _ 1 0 562 _ _ 0 1 Disabled _ _ 1 1 529 _ _ 0 2 4500 _ _ 1 2 500 _ _ 0 3 3000 _ _ 1 3 473 _ _ 0 4 2250 _ _ 1 4 450 _ _ 0 5 1800 _ _ 1

Mechanically Jointed Rodless Cylinders

Piston Speed Standard Stroke Bore size (mm) 16 25 40 63 20 32 50 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) 80 to 500 mm/s Without stroke adjustment unit (MY3A) 80 to 1000 mm/s Without stroke adjustment unit (MY3B) 16, 20, 25 32, 40, 50 63 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400, 1600, 1800, 2000 3000 80 to 1000 mm/s (16, 20 L unit: 80 to 800 mm

Cylinder with Lock

XC68 Standard MWB-UT Lock unit Made of stainless steel (For lock unit, With hard chrome plating) Specifications and dimensions: Same as the standard type Stainless Steel Rod Length Model Min. length Max. length Note 32 250 mm 1800 mm 40 250 mm Can be manufactured in increments of 1 mm up to the maximum length. 2500 mm 50 300 mm 63 300 mm 80 300 mm 100 300 mm 48 CP96N/C96N Series Specific

HRX-OM-S004

Cooling capacity correction coefficient: Coefficient to calculate the cooling capacity at each altitude For the product operation at an altitude of 1800 meters, the cooling capacity at an altitude of 1800 meters = the cooling capacity at an altitude of 1000 meter x 0.8. 2. Cooling Altitude [m] 1. Max. ambient capacity temp.

HRX-OM-Q026

Cooling capacity correction coefficient: Coefficient to calculate the cooling capacity at each altitude For the product operation at an altitude of 1800 meters, the cooling capacity at an altitude of 1800 meters = Cooling capacity 8.4 x 0.8. Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

HRX-OM-W060

Cooling capacity correction coefficient: Coefficient to calculate the cooling capacity at each altitude For the product operation at an altitude of 1800 meters, the cooling capacity at an altitude of 1800 meters = 8.4 Cooling Capacity x 0.8. Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

HRX-OM-Z002

For product operation at an altitude of 1800 meters, "the cooling capacity at an altitude of 1800 meters" = "Cooling capacity at an altitude of 1000 meters" x 0.8. Altitude [m] (1) Max. ambient temp.

HRX-OM-W032

Cooling capacity correction coefficient: Coefficient to calculate the cooling capacity at each altitude For the product operation at an altitude of 1800 meters, the cooling capacity at an altitude of 1800 meters = 8.4 Cooling capacity x 0.8. Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

EXxx-OMK0006

The parameters that can be saved in internal EEPROM of the SI unit are as follows:Index Sub-Index Name 1005 COB ID, SYNC 1006 Communication cycle period 100C guard time 100D life time factor 1016 1 to 9 Consumer heartbeat time 1017 Producer heartbeat time 1029 1 Communication error 1400 1to 2 1st receive PDO parameter 1600 0 to 8 1st receive PDO mapping 1800 1 to 3,5 COB-ID used by PDO 1A00

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

10

Made of stainless steel (with hard chrome plated piston rod)*3 MB MB 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800

ML2B

W (N) 600 (1800) l 500 ML2B40 ML2B40 Caution (1500) If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Lubrication Equipment

-1 AL4000-l06-1 AL5000-l06 to 10-1 AL6000-l10-1 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 ( ): With float switch 1.17-7 Large Flow Lubricator Series AL800/900 Standard Specifications Individual lubrication Large flow style Model AL800 AL900 AC 4 1 1 Port size 2 1 1 2 AV Fluid Proof pressure Max. operating pressure Air 1.5MPa 1.0MPa AU AF 1 : 460 4 1 (1) Min. operating flow (l/min (ANR)) 2 1 1800