CM2

13 5.5 19.5 8 M10 X 1.25 45 15 34.5 32 M26 X 1.5 26 22 41 8 10 14 46.5 24 16 7 21 11 M14 X 1.5 50 21.5 42.5 40 M32 X 2 32 Dimensions by stroke Boss-cut style (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ S ZZ S ZZ ZZ ZZ ZZ ZZ ZZ Bore Bore 87 141 112 166 137 191 20 20 128 153 178

Sine Rodless Cylinder Series REA/REB

Series REB introduced with a maximum speed of 600 mm/s.

Cylinder with Lock Series CLS

200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual -X 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 785

V

I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200) 02 Rc

17

, and the speed of 200 mm/s.

Electric Actuators

T4 = 0.2 [s] 200 Calculation example) T1 to T4 can be calculated as follows. T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] 160 Overhang: L1 [mm] T2 = = = 0.033 [s] L 0.5 V (T1 + T3) V 20 0.5 200 (0.067 + 0.067) 200 120 T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

AC Servo Motor Driver (CC-Link Type ）

The following graphs show overload protection characteristics. 1000 1000 Operating Operating Operating 100 100 Operation time [s] Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 350 100 200 300 400 0 50 150 250 350 100 200 300 350 0 50 150 250 Load ratio [%] (Note 1, 2, 3) ) (Note 1, 2) Load ratio [%] LECSC2-T7, LECSC2-T8, LECSC2-T9 LECSC2-T5 Note1.

240

T4 = 0.2 [s] T1 = V/a1 = 200/3000 = 0.067 [s], T3 = V/a2 = 200/3000 = 0.067 [s] T2 = = = 0.133 [s] L 0.5 V (T1 + T3) V 40 0.5 200 (0.067 + 0.067) 200 T4 = 0.2 [s] Therefore, the cycle time can be obtained as follows.

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

AC Servo Motor Driver

(The motor full load current is 115 rated current.) 1000 1000 In operation In operation 100 100 Operation time [s] Operation time [s] In servo lock In servo lock 10 10 1 1 0.1 100 200 300 400 0 0.1 100 200 300 350 0 50 150 250 350 50 150 250 (Note 1, 2, 3) Load ratio [ ] (Note 1, 2) Load ratio [ ] LECSB-S5 LECSB-S7, LECSB-S8 Note 1.

CLS

: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100 100 Without auto switch M9B CDLS Y7BW L

Smooth Cylinder/Low Speed Cylinder

mm/s 0.5 to 200 mm/s 16 20 M8 x 1.25 M14 x 1.5 M10 x 1.5 M18 x 1.5 16 M8 x 1.25 M14 x 1.5 20 M10 x 1.5 M18 x 1.5 0.03 MPa 0.025 MPa Female thread Male thread Without auto switch: 10 to 70C With auto switch: 10 to 60C Rod end thread Ambient and fluid temperature +1.0 0 mm Stroke tolerance Port size Vacuum port, Relief port Piston speed Piston rod size 1 to 200 mm/s 0.5 to 200 mm/s M5 x 0.8

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100

C95

speed: V (mm/s) Maximum speed: V (mm/s) Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 63 100 80 200 200 50 40 50 50 100 100 Load weight: m (kg) Load weight: m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed:

Series SV

MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 40 50 63 80 100 125 140 160 180 200 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 0 A 1000 900 800 700 600 500 400 300 200 100 0 B System Components It is when the cylinder

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

CA2

200 CA2K CDA2K Y7BW With auto switch Number of auto switches With auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.