3 Position Cylinder Series RZQ

GR-L-010 (10 g) D-X Individual -X 1225 Series RZQ Dimensions Basic style (Double end tapped): RZQA 3 x P (Port size: Rc, NPT, G) FA Q FB H effective thread depth C G I D E M K Z a a A + Full stroke L B + Full stroke M K J E W T RA 4 x O1 effective thread depth RB 4 x O1 Section a-a Basic style (Through-hole): RZQB 32, 40 Washer 2 x RR 2 x RH Flat washer: 2 positions (Included) b 2 x N 2 x

CKZ2N

Right arm) PD0.05 PB0.02 LA0.1 LB L PA0.02 PC0.05 N 2 x 2-PH7 Depth D 2 x 2 x NPT 1/4 G 2 x 2 x MM Depth J E B RD (mm) Bore (mm) B C D E GA GB GC J L LA LB MM N P 50 63 80 12 15 12 95 112 154 48 54 76 13.7 16.6 19.6 134.3 141.2 185.8 138.5 147.5 199 93 90.5 137.5 12 12 18 376.7 395.6 530.9 149.5 158.5 214 78.4 78 113.7 19 22 30 8 10 12 M8 x 1.25 M10 x 1.5 M12 x 1.75 Bore (mm) PA PB PC PD R RA

24

Dimensions [mm] Bore size [mm] Standard stroke [mm] A B C DA DB E FA FB G GA GB GC H HA J K L 25, 50 st Over 50 st 25, 50 st Over 50 st 50 25, 50, 75, 100 125, 150, 175, 200 86 110 86 44 20 30 0 24 29.5 12.5 72 14 11 12 160 M10 35 37 50 80 118 151 118 65 25 45 0 33 35 18 95 19 24 14.5 242 M12 47 48 66 Bore size [mm] MM ML NN NL OA OB OC OL P PA PB PW Q QA QB RA RB RR Nil N TF 50 M12 x 1.75

AC Servo Motor Driver (Pulse input type)

CN1 CN1 24VDC Emergency stop (Note 6) EMG DOCOM (Note 4) Servo-on SON DICOM (Note 4) ALM Trouble RA DOCOM 9 - 3.2 I/O signal connection for each mode The example of connecting driver's I/O signal is shown. 3.2.1 Position control mode (Sink I/O interfaces) (1) Connection example A connection example of the position control mode is shown below. Connect wires if necessary.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Smooth Cylinder Series CQSY

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

Turntable Cylinder Series MGT

XL XB XAH7 a b c d e XAH7 XC XL (mm) X X0.02 a b c d e Bore size (mm) XX section detail drawing 63 80 100 11 17.8 10 7 18.5 13.3 20.3 12 8 22.5 2-R3 15.3 23.3 13.5 10 30 8 6+0.05 0 6 WB Z WA XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA

3 Position Cylinder Series RZQ

W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 14 32 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

NAAMS Standards Compliant

Bore size Arm opening angle 050 50 equivalent 063 63 equivalent J 15 H 30 G 45 F 60 E 75 D 90 C 105 B 120 A 135 * The stopper bolt kit includes a stopper bolt and mounting brackets. 3 NAAMS Standards Compliant Power Clamp Cylinder CKZ3N -X2742A -X2568 Dimensions: Base Type Rubber cover type XC XB R RR RA (Dual arm) RB (Right arm) RC (Left arm) Release point Pivot point with square flats

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a' Basic style (Through-hole): RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b' Section b-b' (mm) Bore size (mm) A B C D FB G H I J K L M N O1 O P Q RA RB

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

OA B C DA FA Standard stroke (mm) 63 80 100 77 96.5 116 20 25 30 10 12 15 39 45.5 55.5 103 121.5 145 M10 M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic Flexible Cable

Series: LEFB (Belt Drive), Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: A (10m)

Series: LEFB (Belt Drive), Size: 32, Motor Mounting Position: Top Mounting Type, AC Servo Motor: T7 (200W Output, Absolute Encoder), Lead: S, Stroke: 600mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: R (Robotic Flexible Cable), Cable Length: A (10m)

Series: Belt Drive, Size: 32, Motor Mounting Position: Top Mounting Type, AC Servo Motor: 200W Output, Absolute Encoder, Lead: S, Stroke: 600mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: Robotic Flexible Cable, Cable Length: 10m, Driver: -, I/O Connector: -

Series: Belt Drive, Size: 32, Motor: Step Motor (Servo 24 VDC), Lead: T, Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: With, Positioning Pin Hole: Housing B (Bottom), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 10m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator Cable