CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Additionally, do not mount the foot bracket with the pressure applied to the port. y 0 A port B port a 1 w y y a e k w of y e e k g n of ra n e io at g ot R n R +4 0 ra ot n io 0 at at ot 8 R io 1 R +4 0 n y ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e of k 189

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

ELECTRO-PNEUMATIC POSITIONER

Use the RA face to turn it counter-clockwise (reverse actuation).

CLQ

RB 2 x 4-0 threads RA RB Standard type (through hole): CLQB63/80/100 Extension locking LOCK Approx.

Electro-Pneumatic Positioner

Main shaft Double action actuator OUT2 Main shaft Single action actuator X OUT1 OUT2 OUT1 X SUP The cam of the positioner should be set on the RA surface. SUP SUP The cam of the positioner should be set on the RA surface. The cam of the positioner should be set on the RA surface. IN + IN + IN + OUT1 is plugged.

Compact Cylinder with Lock Series CLQ

Double clevis pins and retaining rings are included. 829 33.5 Series CLQ Dimensions: 63, 80, 100 Both ends tapped style: CLQA63/80/100 RA RB 2 x 4 x O threads RA RB Basic style (Through-hole): CLQB63/80/100 P (Rc, NPT, G) Extension locking LOCK Rod side cylinder port F Q H effective thread depth C P (Rc, NPT, G) V Head side cylinder port I D M E Z T N Dust cover (Manual unlocking unit) 4

Compact Cylinder with Lock Series CLQ

RB 2 x 4-0 threads RA RB Standard type (through hole): CLQB63/80/100 Extension locking LOCK Approx.

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole type)/RQB, RDQB Double end tapped type: RQA, RDQA Double end tapped RA RA mm OA threads Bore size (mm) RA OA 32 40 50 M6 x 1.0 10 M6 x 1.0 10 M8 x 1.25 14 H effective thread depth C 2-P (port size) 4-N through Approx.

Electro-Pneumatic Positioner Series IP8000/8100

Main shaft Double action actuator OUT2 Main shaft Single action actuator OUT1 OUT2 OUT1 SUP The cam of the positioner should be set on the RA surface. SUP SUP The cam of the positioner should be set on the RA surface. The cam of the positioner should be set on the RA surface. IN + IN + IN + OUT1 is plugged.

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

CLQ

With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

AP3100

Material Body material 316L SS secondary remelt Ni-Cr-Mo alloy 2) Seat material Code Surface finish S H Code Material PCTFE (Standard) Polyimide 3) Surface finish Ra max Code No code VS 2) Special export controls apply to Ni-Cr-Mo alloy body with 1/2 inch or greater size connection. 15 in. (0.4 m) Standard 10 in. (0.25 m) No code M 3) Not available with H material.

AP3500

Face to face dimension 1) Surface finish Dimension 2.12 inch (53.8 mm) Standard 1.75 inch (44.5 mm) Code Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) No code 1.75 No code M V X 1) Only applies to S material with TW4 connections.

AP64

Check Valve Series AP64 Simple design with free of springs and poppets Reseals with minimal back pressure Low cracking pressure How to Order (Inlet) (Outlet) AP64 MV4 MV4 S Material Seat material Body material 316L SS secondary remelt Code Code Material FKM (Standard) CR S No code NP Surface finish Connections (Inlet, Outlet) Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25

SL5200

psig (0.007 to 0.7 MPa) SL5202 0.5 to 30 psig (0.0034 to 0.2 MPa) SL5201 0.5 to 10 psig (0.0034 to 0.07 MPa) 100 mm Hg absolute to 10 psig (-88kPa to 0.07 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

Smooth Cylinder Series CQSY

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across