0.4

Standard: EX120-SUW1 F1 NKE Corp.: Uni-wire System Dust-protected: EX120-SUW1-XP Standard: EX120-SUH1 H NKE Corp.: Uni-wire H System Dust-protected: EX120-SUH1-XP Standard: EX120-SSL1 SUNX Corp.: S-LINK (16 outputs) J1 Dust-protected: EX120-SSL1-XP Standard: EX120-SSL2 SI Unit Part No. (With option W) SUNX Corp.: S-LINK (8 outputs) J2 Symbol Protocol SI unit part no.

Digital Flow Switch (Integrated display type)

display type) MODEL / Series / Product Number PF2M7## Table of Contents Safety Instructions 3 Model Indication and How to Order 11 Summary of Product parts 15 Definition and terminology 18 Mounting and Installation 21 Installation 21 Wiring 23 Outline of Settings 27 Flow Setting 28 Simple Setting Mode 29 Function Setting 30 Default setting 31 F0 Fluid/Unit criteria/Measurement unit setting 33 F1

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 551 0 F1 H J1 J2 Q R1 R2 V ZB Without SI unit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System 3 2 1 4 Note 2) 3 2 1 4 Max.16 stations 4 3 2 1 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link CompoNet (Positive

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P. 551 0 F1 H J1 J2 Q R1 R2 V ZB Without SI unit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System 3 2 1 4 Note 2) 3 2 1 4 Max.16 stations 4 3 2 1 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link CompoNet (Positive

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-144 O A B C D E F1 G H J1 J2 K Q R1 R2 V Without SI unit With general type, Series EX300 SI unit for MELSECNET/MINI-S3 Data Link System (Mitsubishi Electric) SI unit for SYSBUS Wire System (OMRON) SI unit for Satellite I/O Link System (Sharp) SI unit for MEWNET-F System (Matsushita Electric Works Ltd.)

3 Port Solenoid Valve

L n L: Dimensions n: Stations 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 53.7 63.9 74.1 84.3 94.5 104.7 114.9 125.1 135.3 145.5 155.7 165.9 20.4 30.6 40.8 51 61.2 71.4 81.6 91.8 102 112.2 122.4 132.6 7 Series VV100 Dimensions VV100-10F D1A B F1 F2 U Stations 1 2 Bracket option: F2 (For bottom ported) 4 x M3 for mounting (Bracket) 20 39 33 3.5 Bracket option: F1 (For side ported) 1 (Pitch) P = 10.2

REA/REB

F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (COS + SIN) Inclined F3 = (W + WB) x 9.8 x ( + 1) Vertical Refer to the allowable driving force table for (Fn) of data A. (For maximum load weight when loaded directly on the body, refer to page 10-2-68.)

Sine Rodless Cylinder Series REA/REB

-P First tentative bore size determination F3 D 1.6 x ---P WB Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable Driving Force (Fn) (n = 1, 2, 3) Determination of allowable load mass & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos + sin) Inclined (For vertical operation, refer to page 942.)

Clean Air Module

drop 1 V or less Max. 80 mA Internal voltage drop 1.5 V or less SFD NPN open collector 1 output + Analog output PNP open collector 1 output + Analog output LLB LLB LLBF (F1) P2 P6 P1 P5 LLB-F (F1) AD Brown Brown DC (+) 1 1 Black OUT1 Load GD Main circuit Main circuit Black OUT1 4 4 12 to 24 VDC White Analog output White Analog output Load 12 to 24 VDC 2 2 Blue DC () Load Load Blue 3 3 P1

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Please also note that bracket F1 cannot be mounted. DIN terminal connectors cannot be used with single manifolds, and do not have a body ported external pilot option. Effective for prevention of short circuit failure due to the entry of foreign matter into the connector.

REA/REB

Allowable driving force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable load weight & pressure High Precision Guide Type REAH F1 = x (W + WB) x 9.8 Horizontal Inclined Vertical F2 = (W + WB) x 9.8 x (cos + sin) (See page 63 for vertical operation.)

REA/REB

F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (COS + SIN) Inclined F3 = (W + WB) x 9.8 x ( + 1) Vertical Refer to the allowable driving force table for (Fn) of data A. (For maximum load weight when loaded directly on the body, refer to page 10-2-68.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

size determination F2 D 1.6 x P WB 20Data Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable Driving Force (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos + sin) Inclined (Refer to page 8-15-12 for vertical operation.)

Valve Single Unit

Series SX3000/5000/7000 Body Ported Valve Single Unit How to Order 5 L N SX 5 1 20 01 Series Bracket 3 SX3000 5 SX5000 Nil: Without bracket F1: With foot bracket 7 SX7000 Type of actuation 2 position single 1 2 position double F2: With side bracket 2 Manual override Nil: Non-locking push type 3 position closed center 3 Thread type Nil Rc 3 position exhaust center G F D: Push-turn locking

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Note) External pilot External pilot Individual SUP spacer or block disc External pilot External pilot Individual SUP spacer or block disc External pilot External pilot Note)When using DIN terminal. 1.2-9 SY3000/5000/7000/9000 Body Ported Type Single Valve How to Order Thread Rc (PT) G (PF) NPTF N NPT Q 5 L SY 5 1 20 01 T F Series Bracket A/B port size 3 SY3000 5 SY5000 Nil:Without bracket F1

5 Port Solenoid Valve SY Series

How to Order 5 L SY 5 1 20 01 Series Bracket 3 SY3000 5 SY5000 Nil: Without bracket F1: With foot bracket A, B port size Thread piping 7 9 SY7000 SY9000 2 position single only Symbol Port size M5 x 0.8 SY3000 Applicable series M5 01 1 8 SY5000 SY7000 02 02 03 1 4 Coil specifications Type of actuation 1 4 Standard Nil SY9000 2 position single 3 8 T With power saving circuit (24, 12 VDC only

Voltage Monitor for PFMV5

Set value of [F1] and [F2] is initialized when changing the setting of external input.

CG5-S

WH (E1) D B2 BZ MM AL A K Plug bolt (4 pcs. included) KA 8-J (F1) C 0.1 S + Stroke ZZ + Stroke H NA (mm) Stroke range A Bore size (mm) NA AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM P S 20 29 to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 M5 x 0.8 83 25 29 to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5

CY1

bore size determination F3 D1.6 x ___ P WB Inclined operation W+WBWV PPV W+WB>WV P>PV Allowable driving force table (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 F2 = (W + WB) x 9.8 x (cos + sin) F3 = (W + WB) x 9.8 x ( + 1) Horizontal Inclined Vertical (Refer to p. 14 for vertical operation.)

Table of Contents

F1 F1 12-5-20 21 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Construction !