High Purity Chemical Valve

LQ 2 U 03 Tubing size Tubing O.D. 1/8", 3 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Body class Applicable fitting Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Type of fitting Symbol Nil 1 Applicable fitting LQ2 LQ1 2 Body class Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Applicable fitting 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type of

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

Compact Cylinder with Lock Series CLQ

CNG YA-03 YA-05 YA-08 YA-10 18 6.8 16 6 42 6.5 10 YA 03 20 9 20 8 50 6.5 12 MNB Applicable air cylinder bore 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 CNA 03 05 08 10 32, 40 50, 63 80 100 Bore size (mm) 32, 40 50, 63 80 100 Mounting bracket U V W Mass (g) Part no.

SV

Refer to Precautions 2 on page 1-2-9. 1-2-57 54 Series SV Manifold Electrical Wiring 10C/16C Circular Connector Type (26 pins) @6 @5 Common Common @4 @3 SOL.B Station 12 SOL.A q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i Light/Surge voltage suppressor !6 !7 w e r !8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

KB

KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Branch Elbow Module: KBZ Rc Applicable tubing KBV3-10 10 Applicable tubing O.D. 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04 KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection thread Applicable tubing O.D. 4 Model Model

Compact Cylinder with Air Cushion Series RQ

YA-03 32, 40 Applicable air cylinder bore 18 6.8 16 6 42 6.5 10 YA-05 50, 63 20 9 20 8 50 6.5 12 YA-08 80 26 11 25 10 62 8.5 16 03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 31 14 30 12 76 10.5 18 Type A mounting bracket YA YB YU Bore size (mm) Type B mounting bracket Joint W V U Mass (g) Part no. 32, 40 YA-03 56 55 18 6 50, 63 YA-05 67 100 22 8 CUJ 80 YA-08 83 195

IIIIIII

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

Mechanical Valves Series NVM, NVFM, NVZNI

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

10, 12, 16 8 to 40 6, 10 12 to 20 25 32 to 100 25 to 63 10 to 20 25 to 40 50, 63 16, 20 25 to 63 16, 25, 40 16 to 63 6 to 20 25 to 63 6 to 40 10 to 32 10, 15, 25 15, 32 6 to 20 6 to 16 6 to 25 6 to 25 8 to 20 8 to 25 4, 6, 8 6 to 16 32 to 63 32 to 63 25 to 32 10 to 20 Bore size D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C

ZP

79.5 134.5 ZPY 50-6-A14 98.5 178.5 99.5 179.5 75 13-11-55 Series ZPY Connection Barb fitting Pad Form Bellows Lateral Male thread Vacuum Entry Port Mounting Bellows 6, 8 Bellows 10, 13, 16 Hexagon width across flats 6 Hexagon width across flats 6 Hexagon width across flats 14 Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 7 Hexagon width across flats

CLQ

1 Aluminum alloy Nickel plated Piston Chromium molybdenum steel Chromated @5 9-10-12 12 Series CLQ Compact Cylinder with Lock Double Acting, Single Rod Construction: 40 to 100 !5 @1 q @9 @7 @4 e #2 #0 i @2!9wy!6@3 !2!1 u @5r @6 @6 !5 A B CL A CL1 MLGC B Extension locking Without magnet !

VQC

6 4 Shield ground SHIELD 9 Optical fiber (reserve) RTS 12 Pin no. 3, 5, 7, 8, 10 and 11 marked with "" are open.

5 Port Solenoid Valve, Series VQC

6 4 Shield ground SHIELD 9 Optical fiber (reserve) RTS 12 Pin no. 3, 5, 7, 8, 10 and 11 marked with "" are open.

Compact Cylinder with Air Cushion

12 12 12 12 11 10 13 16 11.5 15 9 13 13 13 14 14 9.5 9.5 9.5 17 11.5 D-A79W D-A9, A9V D-F7, F7V D-J79, J79C, J79W D-F7W, F7WV D-F79F, F7BAL D-F7BAVL 5.5 5 6 6 6 6.5 6.5 7 7 7 8 7 8 8.5 8 9 D-F7LF D-F9, F9V D-F9W, F9WV D-F9BAL 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

Dual Speed Controller with One-touch Fitting Series ASD

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

RQ

12 13 12 12 12 11 10 D-A79W D-A9, A9V 16 11.5 15 9 17 11.5 13 13 13 14 14 9.5 9.5 9.5 D-F7, F7V D-J79, J79C, J79W D-F7W, F7WV D-F79F, F7BAL D-F7BAVL 5.5 5 6 6 6 6.5 6.5 7 D-M9, M9V D-M9W, M9WV D-F9BAL 4 4 4 4 4.5 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

CLQ

Bore size (mm) T1 M F E D B T2 Part no. 42 50 62 76 6 8 10 12 16 20 25 30 6.8 9 11 14 18 20 26 31 6.5 6.5 8.5 10.5 10 12 16 18 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 YA 03 Applicable cylinder bore size 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket Bore size (mm) W V U Weight (g) Part no.