Serial Network

: (952) 943-1299 Fax: (952) 943-1614 Austin Phone: (512)926-2646 Fax: (512) 836-1397 Romania Phone: 01-2552625 Fax: 01-2552630 Japan Phone: 03-3502-2740 Fax: 03-3508-2480 Malaysia Phone: 03-56350590 Fax: 03-56350602 Denmark Phone: 70252900 Fax: 70252901 Vancouver Phone: (604) 517-1646 Fax: (604) 517-1647 Nashville Phone: (615) 331-0020 Fax: (615) 331-9950 Boston Phone: (978) 326-3600 Fax:

0.4

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.

7.5

A B C Series Model Effective area (8) For SJ2000 SJ3000 AN203-KM8 SJ3000-155-1A 14 mm2 16 26 51 Label for SUP/EXH block disk M Plug These are inserted in unused cylinder ports and P, E ports. d Label for SUP block disk D A L Label for EXH block disk Dimensions Applicable fitting size d A L D Model KJP-02 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 2 4 6 8 1/8" 5/32" 1/4" 5/16"

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

HRX-OM-M005

Alarm Display screen (Alarm message) Figure 6-1 Error Occurrence HRZD Series 6.1 Error Message 6-1 HRX-OM-M005 Chapter 6 Error Message and Troubleshooting 6.2 Troubleshooting The procedure for error recovery varies with alarm types.

SZ3000

Note Description C6 C8 SZ3000-50-1ASZ3000-53-1A SX3000-113-1 SZ3000-114-3A SZ3000-114-1A VZ1000-11-1SZ3000-40Supply/exhaust block assembly C6: with 6 One-touch fitting, C8: with 8 One-touch fitting 1 End block assembly 2 Housing holder 3 Bushing assembly 4 Bushing assembly 5 Refer to page 6. DIN rail 6 Refer to the connector block assembly part no. table below.

Speed Controller with One-touch Fittings Series AS In-line Type 1

(g) 6 20.7 23.5 4.5 38 8.4 1/8" AS1001F-01 AS1001F-23 6 20.7 23.5 4.5 38.0 8.4 3.2 12.7 10 12.7 10 7 21.4 24.2 5.2 39.2 9.3 5/32" AS1001F-03 AS1001F-04 7 21.4 24.2 5.2 39.2 9.3 4 12 48.7 11.4 16.5 3/16" AS1001F-05 AS1001F-06 8 22.4 25.2 6.2 40.7 11.6 6 13.5 10 6.2 25.2 22.4 9 40.7 12 13.7 1/4" AS1001F-07 AS2001F-04 12 27.6 32.6 5.2 40.7 9.3 4 12.7 11.8 12 27.6 32.6 5.2 40.7 9.3 12.7 5/32"

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Dual Speed Controller with One-touch Fitting Series ASD 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

Body Ported Type Vacuum Ejector ZH Series

One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch One-touch One-touch 10 03 12 One-touch Screw-in One-touch 03 03 03 Screw-in Screw-in Screw-in ZH18DA11 13 13 One-touch One-touch One-touch

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

ZFB 6

V

ZPT04U 4 4.8 1.6 3 6 5 8 0.8 D E E P T Y P E ZPT06U 6 7 2.5 3 6 5 8 0.8 Model A B C D E F G Y ZPT08U 8 9 2.5 3 6 5 8 1 ZPT10D 10 12 15 24 35.5 58.5 71.5 6 ZPT16D 16 18 16 25 36.5 59.5 72.5 7 Courtesy of Steven Engineering, Inc. !

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

Part No. 07 1/4" 09 5/16" Part no.

AS

Flow Rate and Sonic conductance AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 0.28 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 8 1/4" 5/16" 460 1.3 6 6 2 10, 12 8 6 10 Flow Direction Symbol on Body Tube O.D.

฀AS

AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

ASP

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.