AC Servo Motor Driver

PE terminals PE terminals (c) If an earth leakage circuit breaker is used, always earth the protective earth (PE) terminal of the driver to prevent an electric shock. (6) Wiring (a) The cables to be connected to the terminal block of the driver (drive unit) must have crimping terminals provided with insulating tubes to prevent contact with adjacent terminals.

Vacuum

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

0.

M5 M5 x 0.8 (PE: Pilot EXH port) (11) Approx. 300 44.9 (Lead wire length) 14 PE (66) 46.5 13.4 16.3 41.2 8 1/8 [1(P), 3(R) port] 15 45.2 Formula: L5 = 10.5n + 9.5 L3 = 10.5n + 22.5 n: Stations (Max. 20 stations) Dimensions L n 2 3 85.5 75 54 16 41 4 98 87.5 64.5 17 51.5 5 110.5 100 75 18 62 6 123 112.5 85.5 19 72.5 7 135.5 125 96 20 83 8 148 137.5 106.5 21 93.5 9 148 137.5 117 15.5 104 10

IDX-OM-Z004

: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm M3 6.5mm 1.25mm 2 2 1.3 IDF100150F-W 1 5 IDX-OM-Z004 1 3.6 5.2 5.2 (IDF150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm M3 6.5mm 1.25mm 2 2 1.3 IDF100150F-W 1 6 IDX-OM-Z004 2 2 2.1 45 45 45 IDF100150F-W 2.1 2 1 IDX-OM-Z004 2 2.2 2.2.1 (1) (85%) () C 245050 () 2000m

1.1

Connector type (on this product side) M3 terminal block EIA RS-485 compliant Standards Protocol Special protocol: For details, refer to the Communications Specifications document.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) M3 Static load m M1 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

Secondary Batteries

Applicable bore size Description Size Quantity Part M3 x 0.5 x 6L 1 20, 25 Auto switch mounting screw M3 x 0.5 x 8L 1 BBA2 M3 x 0.5 x 10L 1 32 to 50 1 20, 25 Auto switch mounting nut (square) M3 x 0.5 M3 x 0.5 1 32 to 50 Auto switch mounting nut (convex) Note 3) A spacer (black resin) for BQ-2 is not included.

IDX-OM-W038

(17) (17) IDH4,IDHA4 Rc3/8 1.25 6.5 N.C N.O M3 (N.C:) (N.O:) 2 Rc3/8 6.5 :1.25m m :M3 24 2 (N.O) (N O 244 80 2 184 35 320 56 2 1 15 275 1 80 207 284 455 70 389 498 ( ?10) ( 10) 15 240 2 1 297 270 62 IDH Series 6.2.

2 Phase Stepper Motor/Without Motor Brake Series LXP

head screw (included) M3 x 6l Binding band (included) 34 Holding plate (included) 4-M6 x 1 C section 30 D When using a PE terminal, use accessories included as shown above.

IDX-OM-P026E

: 1.25mm 2 or more PE Terminal block for Transformer Terminal block for signal 1 1 2.

A

0.14 5/32 3/8 0.04 0.12 NCRB1_W10-_S 0.55 0.20 0.35 0.02 0.20 25 0.95 1.14 0.59 0.31 0 -0.00015 (0.2) (0.26) M3 NCRB1_W10-_SE 0.33 0.37 -0.0012 -0.00045 5-40UNC 5-40UNC 0.14 10-32UNF M3 3/16 15/32 0.06 0.16 NCRB1_W15-_S 0.71 0.24 0.39 0.02 1.14 0.20 25 1.34 0.79 0.35 0 -0.00015 (0.2) (0.39) (0.24) M3 NCRB1_W15-_SE 0.43 0.39 -0.0016 -0.00045 8-32UNC 8-32UNC 0.18 10-32UNF 15/64 9/16 0.06 0.18

ChemicalThermo-con

Terminal block Morimatsu Co., Ltd.: M111A-7A, for holding screw M3 Connection cable: 22AWG or more, max. 32.8 feet (10 m) 3 1 2 Pin No. Signal contents Pin No.

EX500

indicator LED M3 Ground terminal Position indicator LED LINK OUT GATEWAY UNIT EX500 SERIES IN EX500 SERIES GATEWAY UNIT (M12, 5 pins, socket) LAN PE PE PWR PWR LINK LINK SOL 100 L RUN OUT Power source connector Note 1) MS L ERR.

IDX-OM-U021

: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 5 IDX-OM-U021 1 3.6 5.2 5.2 (IDF150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 6 IDX-OM-U021 2 2 2-1 45 45 45 2-1 IDF100150F 2 1 IDX-OM-U021 2 2-2 2-2-1 (1) (85%) () B C 245050 () 2000m )

IDX-OM-V020

Rubber grommet Signal cable entry Strain relief Power supply cable entry L N PE (to be connected to the user's equipment) Refer to 3-5 for details for electric wiring. IDFA60/70/80/90 Series 2.1Name and Function of Parts 2-1 IDX-OM-V020 Chapter 2 Name and Function of Parts Left ventilation grille (air intake opening) (Dustproof filter) Air intake for cooling.

•

Rat type Rat with 'rII 08'eptypa Bellows tyPe IB Model M3 Ms ~ M5 ~ M5 ~ M3 M5 ~ ZPT02 26 28 ..1 I 26 28 ZPT08 ZPT'IO ~ ZPT13 29 29 ~ i .' '. j Flat type , Aat with rib mm Model 'A .8 C D E F G Flat .1'2,141 \P2 ,I~ Y Flat with rib 29 ZPT10g 10 12 12 21 32.5 55.5 68.5 3 1.7 ZPn6 ZPT20 ~ 2.. ~ 1 3 15 12 21 32.5 55.5 68.5 3 1.8 2.. ~ ZPT16g 16 18 12.5 21.5 33 56 89 3.5 ZPT25 f, 31.5 ~\ ~ 1.2

VP300/500/700

9 : With light/surge voltage suppressor 3(R) 1(P) 3.5 DIN terminal (D, Y) M5 x 0.8 108.5 (PE port) Applicable cable O.D.

HRX-OM-R026

Stainless (Include heat exchanger brazing), SiC, Carbon, PTFE, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.)

SJ3A6

Fitting Assembly Replacement Caution M5, M3 port block assembly By replacing a valves fitting assembly, it is possible to change the port size of the 4(A), 2(B), 1(P), and 3/5(E) ports. When replacing it, pull out the fitting assembly after removing the clip with a flat head screwdriver, etc. To mount a new fitting assembly, insert it into place and then fully reinsert the clip.