0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

P R S P R R port 1/8 R port 1/8 A, B port size Nil Rc A B B A A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 M5 F G M5 x 0.8 A, B port M5 x 0.8, C4 N C4 NPT 4 One-touch fitting T NPTF N3 5/32" One-touch fitting Type 41 (5 port/Base mounted) How to Order 10 SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid pilot valve is on same side as the A, B port.

CA2

34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50 7 63 9 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/Y69/Y7P/Y7V/Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W/F5BAL/F5NTL D-F59F D-G5/K59/G5W/K59W/G5BAL/G5NTL/G59F D-G39/K39/G39C

Modular/F.R.L. Units Series AC

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Applicable solenoid valve Refer to the p.1.2-41.

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

5

41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56 58.5 56 56.5 55.5 57.5 55.5 66 56 66 58.5 68 102.5 112.5 61.5 57.5 61 57.5 104 121 112 121 Operating Range (mm) Auto switch model Bore size 40 50 63 80 100 Auto switch model Bore size 40 50

A

50 6.6 11 depth 8 M8X1.25 1/8 24.5 14 56 41 28 80 22 Courtesy of Steven Engineering, Inc. !

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

AC

Q R Model Port size A B C D M P N B B E F G H J K L 1/8, 1/4 1/4, 3/8 124.5 153 153 188 3.3 4.3 0.8 0.8 80 80 80 105 140 181 181 238 38 38 38 41 40 48 53 70 147.5 56.8 60.8 60.8 65.5 30 41 41 50 50 64 64 84 24 35 35 40 5.5 7 7 9 8.5 11 11 13 5 7 7 7 22 34.2 34.2 42.2 50 70.5 70.5 88 23 26 26 33 AC2001 AC2501 AC3001 AC4001 194 194 229 1/4, 3/8 1/4, 3/8, 1/2 Option marks in the dimension diagram

SYJ3000/5000/7000

For SYJ5000, refer to page 1-5-41, and for SYJ7000, refer to page 1-5-64.

42

port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note) When there are polarities, the positive common specifications are used. 41 10-SY3000/5000/7000/9000 Directional Control Valves Air Grippers Modular F. R.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

SMC Pneumatic Clean Series

32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5 32-0.039 0 21 82 36 10 8 M32 x 2 21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

25

IZS 41 IZS 42 IZF Sensor not connected Offset voltage (V) 30 Total number of ionizers that may be connected IZS41: Max. 8 units. IZS42: Max. 5 units.

5 Port Solenoid Valve

194.8 (200.3) 91.7 121.8 213.5 2 105.8 4(A) port 17.5 105.8 59.5 13.5 2(B) port 13.5 (B port) (A port) 17.5 SMC 2 4 2 4 SMC A B A B 66 53 40 53 66 40 A B A B 1 3 5 14 12 14 5 1 3 12 35 53 2 x 6.5 Mounting hole 2 x 6.5 Mounting hole 53 35 Manual override Manual override 98 50 41 37 31.5 18 G1/2 Electrical entry PE X 31.5 37 41 50 162 G1/2 R1 R2 P 18.4 Electrical entry 1/8" PE. port 41 41 27.5