Basic type / Direct mount type Series CY3B/CY3R

XGT 10-10 0 5 10 CYV Time [min] e e a a l l k k w w a a 1 2 o o g g O-ring seals separate vacuum and atmosphere Employs a magnetically coupled rodless cylinder with no air leakage from moving parts L L e e Static O-ring seals are used for all the seals between vacuum and atmosphere.

LJ1H

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Electric Slide Tables

Workpiece fixed/ Front mounting Max. tightening torque (Nm) 6 5.5 L (mm) Model Bolt LES8R/L LESH8R/L LES8D LES16R/L LES16D LESH16 LES25R/L LESH25R/L LES25D M3 x 0.5 0.63 L M4 x 0.7 1.5 8 M5 x 0.8 3 Model L (mm) 5 to 10 20 to 30 50 to 60 5 to 10 20 to 30 60 to 75 85 to 100 5 to 15 25 to 35 60 to 75 70 to 100 155 to 170 160 to 180 12 10 14 M6 x 1 5.2 LES8D-30 LES8D-50 LES8D-75 LES16D-30 LES16D

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

: LOW type P Head end cylinder port (Port on the unclamp side) 32 71 64 L K C G E d H D L K C G E d H D Hole diameter of workpiece Hole diameter of workpiece SR W Z SR W Z LOW type HIGH type LOW type HIGH type HIGH type LOW type HIGH type LOW type 10 9 8 8 7 9 8 8 7 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 Without shims 600.05 With shims 60 Without shims 600.05 With shims

0.4

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

SQ1000/2000

Refer to the dimensions drawing of each kit for dimension L. L 1.25 P = 12.5 5.25 7.5 35 25 5.5 Dimension L L = 12.5 x n + 10.5 No. Dimension L 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. Dimension L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No.

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 12 LXP M6 x 1 7.4 10 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

24

10 50 100 200 50 100 200 10 10 MGP MGP Eccentric distance L [mm] Eccentric distance L [mm] MGPW (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s MGQ 300 300 MGG 200 200 MGC MGF 80 80 MGZ 100 100 MGT Load mass m [kg] Load mass m [kg] 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 10 50 100 200 DEccentric distance L [mm] Eccentric distance L [mm] -X .

AS

AS2001FM-04-X214 VCHC ASS Needle Valve/Flow Characteristics ASR ASQ KE AS1001FM AS2001FM AS2051FM 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa TMH 10 20 50 0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 40 0.6 0.1 0.2 30 0.4 5 10 20 0.1 0.05 0.2 10 0 5 0 0 0 0 0

Air Cylinder Series MB

Bore size (mm) Part no. l Applicable cotter pin m Dd9 L d H B C 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03Note 1) 10 14 22 25 44 36 4 4.5 5 5 3 4 4 4 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 6 8 11 13 16 16 17 22 27 32 41 41 19.6 25.4 31.2

MGP

(kg) 25 25 20 20 16 16 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 63 1 2 25mm stroke V = 400mm/s 1 3 Over 25mm stroke V = 400mm/s 50 50 63 63 50 50 Load weight m (kg) Load weight m (kg) 10 10 40 40 5 5 32 32 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL80, 100 1 4 V = 400mm/s Note: 1kg = 2.2046 lb

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

Parallel Style Air Gripper Series MHZ

(N) 8 0.5 MPa 6 0.4 MPa 0.35 MPa 4 L 2 MHZ 0 10 20 30 40 50 60 MHF Gripping point L (mm) MHZJ2-16S MHL Pressure 0.7 MPa 40 MHR 0.6 MPa 30 MHK 0.5 MPa MHS 20 0.4 MPa 0.3 MPa MHC 10 0.25 MPa MHT 0 10 20 30 40 50 60 MHY Gripping point L (mm) MHZJ2-20S MHW 50 Pressure 0.7 MPa -X 40 0.6 MPa MRHQ 30 0.5 MPa MA 20 0.4 MPa D0.3 MPa 10 0.25 MPa 0 20 40 60 80 100 Gripping point L (mm) 383 Series MHZ

SX

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Dual Rod Cylinder Series CXSJ/CXS

) Graph (2) V=300(mm/s) 0.5 0.4 CXSL6 0.05 CXSM6 Mass m (kg) Mass m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) 10 to 32 Graph (3) V=200(mm/s) Graph (4) V=400(mm/s) 4 20 3 10 32 5 25 1 Mass m (kg) Mass m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (

Base Mounted Metal Seal/Rubber Seal Series VQ

For L dimension, refer to the dimensions of each kit. (Pitch) L = 12.5 x n + 10.5 L Dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension No.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-I 10 side I A, B port External Pilot Port \0 NPTF (2 ports) 1 "NPTF 2 ports Pilot operator EXH port ) inch (mm) n: stations 6 7 8 9 10 EQuation 8.46 9.57 10.67 11.77 12.87 Ll=1.10xn+l.85 L station 1 2 3 4 5 L, 2.95 4.06 5.16 6.26 7.36 (75) (103) (131) (159) (187) (215) (243) (271) (299) (327) (L 1=28 x n+47) 8.82 9.92 11.02 12.13 13.23 L2=1.10xn+2.20 (224) (252) (280) (308) (336) (L2=28xn

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

MXQ

Retraction End (mm) Stroke adjustment range (mm) B C F G H J K 1) E D A Applicable size Model MXQ-AT6(L) 5 16.5 MXQ6(L) 17.5 19 10.5 6 8 7 2.5 M5 x 0.8 M2.5 x 6 MXQ-AT6(L)-X11 15 26.5 MXQ-AT8(L) 5 19.5 MXQ8(L) 21 22 12.5 8 10 8 3 M6 x 1 M3 x 8 MXQ-AT8(L)-X11 15 29.5 D H E MXQ-AT8(L)-X12 25 39.5 F MXQ-AT12(L) 5 23.5 MXQ12(L) M8 x 1 M4 x 10 28 29 16 16 10 12 4 MXQ-AT12(L)-X11 15 33.5 G MXQ-AT12

Air Cylinder

40 55 M8 x 1.25 24 1/8 62 20 8 21 131 25 22 19.5 47 17 32 10 13 8 45 6 8 33.5 5.5 8 4 6.8 28 102 3.2 40 55 M10 x 1.25 30 1/8 62 20 8 25 135 32 22 19.5 47 17 32 12 13 8 45 6 8 37.5 5.5 10 4 6.8 28 104 3.2 40 55 M10 x 1.25 34.5 1/8 64 20 8 25 137 40 24 21 54 22 41 14 16 11 50 8 10 46.5 7 12 4 7 30 134 3.2 55 75 M14 x 1.5 42.5 1/4 88 23 10 27 171 With Rod Boot (mm) B3 e h l Z Symbol Stroke