TABLE OF CONTENTS MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055
LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECP6/LECP1/ LECPMJ, refer to page 39.
150 200 250 Speed: V [mm/s] 39 Easy to Operate Model Selection EQYH Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) The following graphs show the values when the external guide is used together.
SX3000-39-2A SX5000-39-16A Series Assembly part no. SX3000-38-2A Port size Port size M5 x 0.8 SX3000 M5 x 0.8 SX3000 SX5000 1 8 Note) The EXH port may be either on the lead wire side or on the end plate side. SX5000-38-16A SX5000 1 8 Note) SUP port may be either on the lead wire side or the end plate side.
X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 19 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 30 200 to 1000 NN P RR S U Z ZZ NA Bore size Stroke range 1 8 150 to 700 20 M20 X 1.5 9 146 14 217 226 30 1 8
HRSH100/150/200-A: 2 pcs. are used per unit HRS-S0185 Dust-proof filter 1 pc.
Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable
L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.
Auto Switch Weights Unit: g Auto Switch Internal Circuits Lead wire length Model 3m 5m D-P5DWL 150 240 Indicate "Z" at the end of the model number for 5m lead wire.
Hs T (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ Hs IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 46 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 50 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 56 72 17 12 Series CLK1 Clamp Cylinder with Lock Accessory Dimensions (mm) Single Knuckle Joint Double
Mass (kg) 1000 Standard stroke (mm) Model 150 200 300 400 500 600 800 REAH10 1.2 1.3 1.6 REAH15 2.5 2.7 3.2 3.6 4.1 REAH20 3.5 4.0 4.4 4.9 5.4 REAH25 5.3 6.0 6.6 7.3 8.0 9.4 REAHT25 6.2 7.3 8.3 9.4 10.4 12.5 14.6 REAHT32 9.6 10.7 11.9 13.0 14.2 16.5 18.8 Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Bore size (mm) 0.3 31 0.4 39 0.2 0.5 46 0.6 54 0.7 10 23 15 78
78 78 157 294 108 216 421 [W] 12) 3.6 5 5 [V] DC2410% LEYG 16M _ LEYG 25M _ LEYG 32M _ [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 (kg) 0.83 0.97 1.20 1.49 1.66 1.67 1.86 2.18 2.60 2.94 3.28 3.54 2.91 3.17 3.72 4.28 4.95 5.44 5.88 LEYG 16L _ LEYG 25L _ LEYG 32L _ [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 (kg) 0.84 0.97 1.14
AC AV AU Stepless Control through Electric Signals AF A maximum effective area of 670mm2 (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX100 series).
(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) CH2 2 (Different surfaces and same surface), 1 20 110 150 140 135 130 125 D-F5/J59 D-F5W/J59W D-F5BA/F59F (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 CHA 20 + 55 110 + 55 125 + 55 130 + 55 135 + 55 140 + 55 150 +
Application Weight (g) Model Actuator Polyacetal roller 110 140 150 150 160 220 210 220 210 220 200 VM430-01-00 VM430-01-01 VM430-01-01S VM430-01-02 VM430-01-02S Basic VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Roller lever Hard steel roller Polyacetal roller Hard steel roller One way roller lever Straight plunger VM430
Pad form Flat/Flat with ribs Deep Bellows Stroke (mm) Vacuum entry port Model 04 06 08 04 06 08 04 06 08 2004, 3507, 4010 ZPR02 to 08 Thin section flat series (10 to 16) 38 6 39 38 39 10 ZPR10 to 16 39 40 39 40 40 41 10 ZPR20 25 54 55 56 55 56 57 57 58 59 ZPR32 ZPR40 ZPR50 56 61 126 132 57 58 127 128 62 138 145 63 139 146 129 133 10 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40
) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100
Standard Stroke Bore size (mm) Standard stroke 15, 30, 45, 60, 75, 100, 125, 150 10 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Intermediate stroke length is available by the 1 mm interval with no stroke adjustment by spacer.
Work load m [kg] Work load m [kg] 300 0 50 100 150 200 250 300 350 600 Mey 250 500 Horizontal Vertical 200 400 m L3 [mm] L3 [mm] L3 [mm] 150 300 L3 100 200 50 100 0 0 Yawing Pitching Yawing Rolling 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L4 200 400 L4 [mm] L4 [mm] L4 [mm] 150 300 100
Refer to page 39 for dimensions.