A

37.5 70 65.5 50 54 54 8.5 10 .5 70 2.3 52.5 NAR5000 90 168 48 90 75.5 70 66 65.8 11 13 90 3.2 52.5 NAR6000 95 204.5 48 95 78 70 66 65.8 11 13 90 3.2 D I M E N S I O N S NAR2001 ~ NAR4001 Bracket Port Size Model Part Size A B C D E Bracket Dimensions N F G H J K L M NAR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 NAR25O1 1/4 3/8 53 102.5 25 48 32 30 34 34 44 5.4 15.4 55 2.3

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.

MTS

(55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) D-F9W, D-F9WV 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12) ( ): Denotes the values of D-A9V, D-M9V and D-F9WV.

LEC-OM02704CN

6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (8) (2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 6 6 6 (6) (6) (6) 1.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Standard Stroke Bore size (mm) Standard stroke (mm) Manufacturable Note) maximum stroke (mm) 6 300 50, 100, 150, 200 10 500 50, 100, 150, 200, 250, 300 50 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 6000 63 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

SY

750 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 SY3120 -C6 Cv = 0.23 SY5120 -01 Cv = 0.59 SY7120 -02 Cv = 0.87 SY9120 -03 Cv = 2.1 The speed of CJ2 and CM2 cylinders is controlled by a fixed orifice built into the cylinder.

CY1

, 200 6 500 50, 100, 150, 200, 250, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000 40 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 50 6000 63 Note) Contact SMC if the maximum stroke will be exceeded.

Table of Contents

150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3 1 Water Cooled Aftercooler Series HAW Model/Standard Specifications Series HAW can cool high temperature compressed air from compressors down to 40C or less and efficiently remove moisture from the air.

CG1

TT TV ZZ TW Z TX TY TZ Z 20 25 32 3.2 3.2 4.5 35.8 39.8 49.4 43.4 48 59.4 139 146 155 178 (187) 138+l 159+l CD-G02 CD-G25 CD-G03 42 42 48 118 125 131 150 (159) 16 20 22 28 28 28 147+l 168+l 153+l 177+l 198+l 170+l (179+l) 40 4.5 58.4 CD-G04 71.4 56 30 30 (207+l) 225+l 193+l (205+l) 173 (185) 205 (217) 50 6 86 72.4 CD-G05 64 36 36 (237+l) 235+l 198+l (210+l) 178 (190) 215 (227) 63 8 105.4

Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 68 56 30

Step Motor Controller

CN5 parallel I/O connector CN4 serial I/O connector 150 132 141 CN3 encoder connector CN2 motor power connector CN1 power supply connector 4.6 for body mounting b) DIN rail mounting (LECP6D-) 11.5 Refer to page 51 for L dimension and part number of DIN rail. (81.7) 35 5.25 5.25 66 1 31 81.7 167.3 (When locking DIN rail) 173.2 (When removing DIN rail) 5.5 150 132 35 (91.7) 52 Step Motor Controller

Air Cylinder Series CA2

Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder. Wiping grease from the sliding part of the air cylinder forcefully may cause malfunction. 1110

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The figure shows the pressurized situation to the air pressure port. 11-7-48 49 Series CRA1 Made to Order Specifications: -X6 to -X11 Please consult with SMC for further information on specifications, dimensions and delivery.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The figure shows the pressurized situation to the air pressure port. 11-7-48 49 Series CRA1 Made to Order Specifications: -X6 to -X11 Please consult with SMC for further information on specifications, dimensions and delivery.

VCL

or less 24 VDC, 12 VDC, 48 VAC, 100 VAC, 110 VAC, 48 VAC, 100 VAC, 200 VAC, 220 VAC, 230 VAC, 240 VAC (50/60 Hz) Rated voltage 200 VAC, 220 VAC, 230 VAC, 240 VAC (50/60 Hz) Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class H Class B VCL20: 6 W, VCL30: 8 W, VCL40: 11.5 W Power consumption DC VCL20: 22/19 VA VCL30: 36/30 VA VCL40: 45/37 VA Note 2) Inrush VCL20:

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Compact 5-Port Solenoid Valve

ZK2 Combination Manifold n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 101 110 119 128 137 146 155 164 173 182 191 200 209 218 227 L2 61.4 70.4 79.4 88.4 97.4 106.4 115.4 124.4 133.4 142.4 151.4 160.4 169.4 178.4 187.4 L3 135.5 148 160.5 160.5 173 185.5 185.5 198 210.5 223 223 235.5 248 248 260.5 L4 125 137.5 150 150 162.5 175 175 187.5 200 212.5 212.5 225 237.5 237.5

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Compact Manifold Regulator Series ARM5

200 250 0 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM5AA1-308 (One-touch fittings: IN/OUT 6) ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: