Model: 4 (VDW40), Voltage: 6 (12VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: E (Power-saving Circuit), Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: K (With 2 Quick Fastener Clips)

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: E (Power-saving Circuit), Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: K (With 2 Quick Fastener Clips)

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 4 (4.5 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: A (PPS Body, FKM Seal, Class B Coil), Option: N (Bottom Mounting Insert Type)

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: K (With 2 Quick Fastener Clips)

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: K (With 2 Quick Fastener Clips)

Model: 4 (VDW40), Voltage: 6 (12VDC), Power-saving Circuit: E (Power-saving Circuit), Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: B (PPS Body, EPDM Seal, Class B Coil), Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 4 (4.5 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: None

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 6 (6.0 mm), Port Connection Type: P10 (P10 Quick Fastener), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: None

Regulator for 2 MPa ARX 20

N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

VH Series, 4 Way Hand Valve

Description VH300 24414 (24414-1) 24416 240359 JIS B2401 P10 JIS B2401 G55 2407102A VH400 24423 (24423-1) 24425 240359 JIS B2401 P10 JIS B2401 P71 2407102A VH600 Resin 3 Slide ring 240417 24047 JIS B2401 P15 JIS B2401 G120 4 5 6 7 8 Slide ring spring Check ball spring O-ring O-ring Handle rod assembly Piano wire Piano wire NBR NBR ( ): Exhaust center 4 Body Mount/Dimensions Series VH (mm

DIQ-69200-OM002

Flow of the setting Power ON Refer to P9 Unlock keys Refer to P10-12 Refer to P9 Refer to P12 Refer to P13-15 Lock keys Reset Setting of Preset pressure Detail Setting Mode Setting of min. pressure Gain Setting of max. pressure Setting of switch output Zero clear Initialize (Note1) Please refer to each section for the operation method.

Parallel Seal Type Slit Valve

Spare Parts List P10 6. Maintenance P10 7. Troubleshooting P11 Attachment: Maintenance Procedure P1216 1 - Slit Valve Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

PSxx-OMG0001CN

"-M" ( ) "-M" 13 SI kPaMPa 14 15 () 16 () / ( () ) -29No.PS-OMG0001CN-H OUT1 80mA OUT2 7F.S. 3 ( 4dights ) 1 -30No.PS-OMG0001CN-H PSE3 -100100 kPa 0-101 kPa 0100 kPa 01 MPa 0500 kPa 02 kPa 1 -101101 kPa 10-101 kPa -10100 kPa -0.11 MPa -50500 kPa -0.22 kPa 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa DC1224 V10P-P10 50 mA() PSE30DC15 V(1 M) PSE31DC420mA100 ) 1 26.4V

Valve Controller

Description of operation P10-11 6. Cascade connection P12-13 7. Temporary stop operation P14-17 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Valve Controller

Description of operation P10-11 6. Cascade connection P12-13 7. Temporary stop operation P14-17 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

LV20-OMY0005

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

R R R REGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS LVR LVR LVR LVR Series Series Series Series

Flow-rate Characteristics P9 6 Specifications P10 7. Dimensions P11 8. Troubleshooting P12 2 Safety Instructions Safety Instructions Safety Instructions Safety Instructions Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These safety instructions are intended to prevent hazardous situations and/or equipment damage.

XL-OMY0003

A6063SUS316LSUS304 FKM 245250Hz 30m/s /H4 H5 , 510% 4 XL-OMY0003 O 0.1mm0.2mm O 5 P9 O 6 P10 P13 5 XL-OMY0003 2.2 16 25 40 50 (5150) XLH16-30-1 XLH25-30-1 XLH40-30-1 XLH50-30-1 1FKM:No.1349-80 XLH16-30-1-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15

FGE-C

O 1 (O P71) V (V P71) 6/12 FGX-OM-L009-B FGESL Series IN/OUT -0.1MPa (P10) (M12) IN OUT O O V 40 () () () 7/12 FGX-OM-L009-B 1 G1/8 () (R1 R2) IN (Rp1/4) (R3/4) DRAIN OUT (Rp1/4) (R1 R2) (R3/4) 1 1 SUS304 O FGE-OP007 8 NBR FKM O (NBR) (FKM) M10X1.5 1 SUS304 M10 SUS304 SUS304 SUS316WPA FGE-OP005 SUS316 SUS304 SUS304 FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002