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New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

-4 kgm2) Moment of inertia (X10-4 kgm2) Moment of inertia (X10-4 kgm2) 1.0 4 400 0.8 3 300 0.6 2 200 0.4 MHZ2 1 100 0.2 0 0 0 MHZJ2 0.1 0.2 0.4 0.5 0.3 0.1 0.2 0.3 0.2 0.4 0.6 0.8 1.0 1.2 Operating time (s/90) Operating time (s/90) Operating time (s/90) MHQ MHY2-16D MHW2-25D 3.0 20 MHL2 2.5 Moment of inertia (X10-4 kgm2) Moment of inertia (X10-4 kgm2) 15 2.0 MHR 10 1.5 MHK 1.0 5 MHS 0.5 0

Guide type Slider guide S X10 Non-standard motor Series Limit switch Series 10 Series 20 Series 30 10 20 30 Cable entry direction Nil None B contact specification 2 pcs.

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range is 1 to 20(x10-3degree/min), but it will changed to 1 to 20(x10-2degree/min) by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid. -60- Pr.9 Acceleration time

(X10) Set upper bits of the station. 01 to 64 STATION NO. (X1) Set lower bits of the station. The CC-Link address setting at the time of the factory shipment is set in 01".

(X10) Set upper bits of the station. 01 to 64 STATION NO.(X1) Set lower bits of the station. The CC-Link address setting at the time of the factory shipment is set in 01".

X10 STATION NO . X1 5 4 6 5 4 6 3.2.3 3 3 7 7 2 2 1 0 9 8 1 0 9 8 SW1 SW 1 3.2.5 (CNP1) 4.1 4.3 12.1 CC-Link L.

(X10)=0STATION No. (X1) =1) 2 : LECPMJ(2)CC-Link =3LECPMJ(1)CC-Link =1 2 (STATION No. (X10)=0STATION No. (X1) =3) 3 : LECPMJ(3)CC-Link =5LECPMJ(2CC-Link =3 2 (STATION No. (X10)=0STATION No. (X1) =5) 17 - 4.2 LECPMJ () () 1() 1 () 1 (1 ) 2 () (2 ) 4 (4 ) 9.

Bar + High-voltage power supply module + Controller IZT 40 52 D 1 6H R F X10 IZT 42 52 D 1 6H R F X10 Bar IZTB X10 40 52 D 1 6H R F Standard model no. e pages 17 and 18 Type Bar length 40 411 Symbol Bar length [mm] 28 280 52 520 70 700 76 760 88 880 94 940 100 1000 106 1060 118 1180 Symbol Bar length [mm] 124 1240 136 1360 142 1420 148 1480 154 1540 166 1660 172 1720 178 1780 184 1840 Symbol

ABSOLUTE POSITION DETECTION SYSTEM (Continued from preceding page) 5 5 M8000 M109 Normally OFF M110 M111 1PG control command (not used) M112 M102 M103 X7 X12 M99 Start command pulse M120 PLS Servo ready Position start switch ABS data ready X10 1PG JOG command M104 Operation command control JOG X11 1PG JOG command M105 JOG (Note) X7 X14 1PG home position return start M106 Servo ready Home

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid: 1 to 20(x10-2degree/min). -64- Pr.9 Acceleration time 0, Pr.10 Deceleration time 0 Pr.9 Acceleration

S 116 128.5 ZZ 198 216.5 Size 32 40 P317010-13 One set of the actuator requires two sets of the hexagon socket head cap screws. 352 Series MRQ Made to Order Specifications: -X10 Please consult with SMC for further information on specifications, dimensions and delivery. Symbol -X10 4 Long Stroke (101 to 200 mm) Refer to the table of number of the auto switches mounted below.

1 u u x100 x10 x1 IP address setting switches Switch to set the 4th byte of the IP address by X1, X10 and X100. !7 i !2 i MS, NS Communication status LED Displays the status of the EtherNet/IPTM communication t o ENC z Encoder connector (16 pins) Axis 1: Connect the actuator cable. !0 MOT z Motor power connector (6 pins) !8 @1 !

1 u u x100 x10 x1 IP address setting switches Switch to set the 4th byte of the IP address by X1, X10 and X100. !7 i !2 i MS, NS Communication status LED Displays the status of the EtherNet/IPTM communication t o ENC z Encoder connector (16 pins) Axis 1: Connect the actuator cable. !0 MOT z Motor power connector (6 pins) !8 @1 !

Display Description Details 1 P1, P2 EtherNet/IP communication connector Connect Ethernet cable. 2 MS, NS Communication status LED Display the status of the EtherNet/IP communication. x100 IP address setting switches Switches to set the EtherNet/IP communication IP address (0 to 255) by X1, X10 and X100. 3 x10 x1 OFF Power supply OFF 4 PWR Power supply LED (green) Green LED is ON Power supply

(1) (9) (10) (2) (3) (4) (15) (16) (7) (11) (8) (12) (5) (17) (18) (21) (19) (6) (20) (13) (14) OFF 1 PWR LED() ON 2 RUN LED() EtherNet/IP USB USB 3 USB USB LED() USB 4 ALM LED() 5 USB USB ) (+)(-) 6 C PWR (2 ) x100 7 x10 IP x1 x10 x100 IP 4Byte x1 8 MS, NS LED EtherNet/IP 9 ENC1 (16 ) 1 10 MOT1 (6 ) 11 ENC2 (16 ) 2 12 MOT2 (6 ) ) (+) 1 (+) 1 (+) 13 CI 1 2 2 (+)2 (+

and X100. 7 x10 x1 8 MS, NS Communication status LED Display the status of the EtherNet/IP communication. 9 ENC1 Encoder connector (16 pins) Axis 1: Connect the actuator cable. 10 MOT1 Motor power connector (6 pins) 11 ENC2 Encoder connector (16 pins) Axis 2: Connect the actuator cable. 12 MOT2 Motor power connector (6 pins) 13 CI 1 2 Motor control power supply Motor control power supply

One set of the actuator requires two sets of the hexagon socket head cap screws. 1.5-18 Series MRQ Made to Order Specifications -X10 Consult SMC for further information on specifications, dimensions and delivery. Symbol Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

POLYSULFONE 1/8 ID 5 10 30 .1B = Gold Contacts For other special requirements contact factory FM & PM models supplied with 1/16" barb standard Ex F-4300-X10-MM = 10" Hg adj. range, manifold mount Back to Top .

-X10 Ordering example) X10 X10 IZS 40 IZS 42 1660 1660 10 10 B B Bar length Type 41 42 520 700 760 880 940 1000 1060 1180 1240 1360 1420 1480 1540 1660 1720 1780 1840 1960 2020 2080 2140 2200 2260 2380 2440 Symbol Specifications Contents Model with drop prevention cover The main unit is shipped fitted with a drop prevention cover available as an option. -X14 424