4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Values at the initial period) JIS Symbol (A) 4 (B) 2 1 (P) 3 (R) 2-8-4 5 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Valve model Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv L M L M L M L M Body ported VQD1121-M5 0.05 0.31 0.19 0.05 0.16 0.22 U W VQD1121 -M5 0.07 0.28 0.28 0.07 0.24 0.27

5-Port Solenoid Valve

B L B One-touch fitting D side U side [PE: Pilot EXH port] [X: External pilot port] Applicable tubing O.D.: 6, 1/4" 138.1 (For 5 stations) (10.9) (69.5) (Fitting for the type with P/E ports on the U and/or D sides) PE PE FREE LOCK B A B A B A B A B A 3/5E 3/5E A 14 14 A 14 A 14 A 14 A 49.4 128.8 (175.6) 1P 1P (77.1) 34.6 X X 45.4 B 12 B 12 B 12 B 12 12 B 15.6 3.9 37.6 16.6 (Fitting for the

0.4

4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 94.9 76.2 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Dimensions Formula: L1 = 17.5n + 52, L2 = 17.5n + 106 n: Stations (Maximum 16 stations) 16 332 386 412.5 423 15 314.5 368.5 400 410.5 14 297 351 375 385.5 13 279.5 333.5 362.5 373 12 262 316 337.5 348 11 244.5 298.5 325 335.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

flange style: CBQ2G/CDBQ2G With head end lock With rod end lock Standard stroke Bore size (mm) A B L L1 A B L L1 10, 15, 20, 25 73.5 61 4.5 18.5 67 54.5 4.5 18.5 FV 20 50, 75, 100 88.5 66 14.5 28.5 88.5 66 14.5 28.5 10, 15, 20, 25 77 64 5 22.5 70.5 57.5 5 22.5 25 50, 75, 100 92 69 15 32.5 92 69 15 32.5 2-FD A + Stroke B + Stroke L FX FZ FT Standard stroke Bore size (mm) FD FT FV FX FZ 20

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

B B B B 103.2[107.6] P R R P 21 7 35 17.5 A A A A A 20.9 (DIN: 22.1) 3.5 1/8 (P, R port) 5.5 (DIN: 6.7) (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) MAX.13.5 47.5 (Light/surge voltage suppressor) 52.6[59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN Terminal (D) M8 connector (WO) 85.4 77.9 52.6

5 Port Solenoid Valve Series SV1000/2000/3000/4000

) Min. bending radius 20 mm 2 B 2 B 2 B 2 B 71 1 P V 5 84.3 P 1 86.5 V 1 P 3 E 63.5 52.5 Individual SUP spacer Interface regulator SV2000--M1 Interface regulator SV2000--00 Individual EXH spacer 12 Max.21 (7.5) (81) (For DIN rail mounting) (When circular connector is mounted) 11.8 B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 160.5 150 132.2 14 80 3 173 162.5 148.2

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

5

+ l l f K A AL CX F N N CT MQ CB C H L RR S + Stroke RHC ZZ1 + l + Stroke ZZ + Stroke Z + Stroke RZQ Double clevis: CS2YD With rod boot Port G G V W Width across flats KA 4 x J 2 x P (Rc, NPT, G) CD hole H10 Axis d9 MM Cushion valve B D E e U Z1 + l + Stroke h + l l f K A AL CX N N CT F CZ L H S + Stroke C ZZ1 + l + Stroke RR ZZ + Stroke Z + Stroke CB (mm) Bore size (mm) A AL lB lC lCB CDH10

MY1

B A 10 16 20 Mounting position A 31 24 39 B 129 86 161 Operating range l Note) 4 3 5 MY1M (Slide bearing type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1C (Cam follower guide type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1H (High precision guide type) B A Mounting position 10 16 20 A 31 24 39 B 129 86 161

Battery-less

Absolute (Step Motor 24 VDC) LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 Model Lead Pushing speed [mm/s] Pushing force (Setting input value) LEYG16M L mE A/B/C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80

SQ1000/2000

B RATE PWR L RUN PWR PWR COM ERR ON ON L ERR.

Step Motor Controller

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 I/O cable LEC CN5 1 Controller side PLC side (Terminal no.) (8.9) B1 A1 A1 Cable length (L) [m] 1 3 5 A13 B1 (22.4) 1.5 3 5 (14.4) L B13 B13 A13 Dot color Dot mark Insulation color Connector pin No.

Electric Actuator/Slider Type

C L A B C L 25 32 63 25 32 63 Rod ange: LEY F Head ange: LEY G Head ange is not available for the LEY32/LEY63.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Air Slide Table

A B C D1 E F G M (Fine pitch) P2 MXQ6(L, A) MXQA-AS8-X2202 41.5 2.5 3 M3 x 12 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ8(L, A, C, CL) MXQ6B(L) MXQ12(L, A, C, CL) MXQ8B(L) MXQA-AS12-X2202 46.5 2.5 4 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-AS16-X2202 51.5 3 5 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-AS20-X2202 58.5 4 6 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A)

42

: VQ430 -l 3-position exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

Air Cylinder Series CM2

-H -R -W N L Stroke Axial foot style: CBM2L Bore size LH B 4 x LD 2 x LC LT X Y Y X LS + Stroke Z ZZ + Stroke LZ LX -H -R -W N L Stroke N L Stroke Head side flange style: Rod side flange style: CBM2F Bore size -H -R -W CBM2G Bore size 4 x FD Mounting hole C2 2 x FD Mounting hole FY B FX FZ Z + Stroke FT FT Z 20 to 32 40 -H -R -W N L Stroke Single clevis style: CBM2C Bore size CD U L RR CX

Mechanically Jointed Rodless Cylinder Series MY1

(Except 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 Side port Side port Front port Front port L L L L L L R R R R R R R L L R R R L L Bottom port Bottom port L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port cannot be used.

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A B A B A B A B A A LERR.