2 2 8 / 3 S 3 0 7 0 Y 2 Q K 7 1 5 . 9 2 5 . 9 2 5 3 8 / 1 S 1 0 9 0 Y 2 Q K 2 1 2 . 5 1 2 1 5 . 3 2 5 . 4 2 8 2 5 . 8 1 6 6 1 6 1 / 5 4 / 1 S 2 0 9 0 Y 2 Q K 4 1 5 . 8 2 0 3 4 2 8 / 3 S 3 0 9 0 Y 2 Q K 7 1 5 . 0 3 5 . 1 3 6 3 4 / 1 S 2 0 1 1 Y 2 Q K 7 1 9 . 7 1 7 1 5 . 5 2 5 . 9 2 5 . 2 3 1 2 7 9 2 8 / 3 8 / 3 S 3 0 1 1 Y 2 Q K 5 . 1 3 4 3 8 3 2 / 1 S 4 0 1 1 Y 2 Q K 2 2 5 . 5 3 5 . 6 3
With bushing K Non-rotating Width across flats 10 M8 x 0.75 (Buffer body) 22 2 2 C B M5 x 0.8 Effective thread depth 4 Model A B C Vacuum inlet direction q Pad dia.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F-1 -02F-1 -03F-1 KKA4S-02F-1 -03F-1 -04F-1 KKA6S-03F-1 -04F-1 -06F-1 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 1/8 1/8 1/4 1/4 1/2 1/2 15-2-90 19 19 S Couplers Stainless Steel Type Series KKA Specifications K Fluid Water
EA) EC ED ND EF 2 x K Hexagon socket head set screw NA 0.5 GC GD NB NC DNote) This component does not exist for 180 type.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
x P G Cushion valve Port E D D E e B C d H1 H1 MB Effective thread 2 x 4 x J N F Effective thread 10.2 f h 10.2 16 l H + Stroke A K A K F N C CJ1 With rod boot ZZ + 2 strokes S + Stroke H B CJP MM 2 x P G G MM In the case of w/o air cushion, it comes with rubber bumper.
Applicable shaft type: K (mm) CRB2 L3 max X W1 L1 max (mm) Shaft type CRBU2 Y W2 L2 max L4 max Size J K T J K T J K T J K T W1 = L3 = L1 = Size 50 50 11.5 to 39.5 1 to 6 1 to 6 Y-3 L2-2 11.5 to 39.5 L1-2 X-3 L4 = CRB1 L2 = Y = 63 63 12.5 to 45 1 to 7.5 1 to 7.5 Y-3 L2-2 12.5 to 45 L1-2 X-3 80 80 13.5 to 53.5 1 to 8.5 1 to 8.5 Y-3 L2-2 13.5 to 53.5 L1-2 X-3 X = MSU 100 100 18.5 to 65 1 to
58.3 70 47.8 34.3 46.6 44.1 3/8 50.8 50.8 49.6 20 JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum G: Grommet GS: Grommet with PCB F K 300 D D 300 K F C C J J E IN IN E A 2 x Port size 1(IN), 2(OUT) port B1 B B1 B 2 x Port size 1(IN), 2(OUT) port A G G 2 x M thread depth N 2 x M thread depth N CS: Conduit D F K 500 NPT1/2 C J IN E B1 B A 2 x Port
-K 2 About this product ISA3-B-R ISA3-B-R Regulator Regulator ISA3---B-LN ISA3---B-RN -23No.PS-OMR0002-K 2 About this product ISA-17 (Bracket when control unit fitted) Y200T-A (Spacer with bracket) ISA-20 (Bracket for centralized lead wire) -24No.PS-OMR0002-K 2 About this product ZS-31-B (Lead wire with connector (Straight)) ZS-31-C (Lead wire with connector (Right angle)) ISA-19(Centralized
Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side
3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4 2 1/8 3/4 2 3/4 2 1/4 3/4 2 1/2 2 3/8
/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4 2 1/8 3/4 2 3/4 2 1/4 3/4 2 1/2 2 3/8 BORE
/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8
Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8 O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 SS BR AL 1/8 NPT 7 4 2 1/8 NPT 8 5 2 1/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16
Applicable shaft type: K X = Long shaft side W1 = L1 = L3 = DShort shaft side X = W2 = Size 20, 30, 40 L2 = L4 = Y = (mm) (mm) X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 W2 L2 max Y Y Y Y Y L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 Size 10 15
19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 Mbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 125 k/250 k/ 500 kbps Communication speed 4-branch input Specified file Note 2) EDS file GSD file 64/64 Possible to change depending on the switch setting 96/96 (3 stations, remote device station) Possible to change depending on the switch setting Occupied area (Number of inputs/outputs) 4-branch
Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)
J R I 1/2 24.4 I R Q 1/2 Exhaust port z280 K 24.4 Exhaust port K S (32) U F L G1/2 L G1/2 H E H E U F G 2 x P G 2 x P Port size Port size Faston terminal A D J Q I R 24.4 1/2 Exhaust port K S 11 L H E U F G 2 x P Port size Dimensions (mm) Model Port size P A D E F G H I J K L S VXF25A< VXF26A< 2 1/2 3 182 206 92 102 212 247 47 63 117.5 119 141 176 18.6 18.6 78.4 78.4 59.8 59.8 24 24 30 30
Piercecon connection M8 M8 K #1 K #5 M12 M12 M12 K #2 K #4 EX500-DXPB EX500-IE3, 4 M8 QUICKON-ONE connection EX500-DXPA EX500-IE1, 2 EX500-IE5, 6 Manifold solenoid valve with input/ output unit EX600 series K #4 K #3 Auto switch Y connector p. 239 The input block reads 2 sensor signals with one port.