Classification of Waterproof: 2 (Drip Proof), Pressure Range: 2 (0.05~0.7MPa), Fluid Contact Area Material: 1 (SUS316), Thread: N (NPT), Differential Scale Plate: 1 (Differential Scale)

Classification of Waterproof: Drip Proof, Pressure Range: 0.05~0.7MPa, Fluid Contact Area Material: SUS316, Thread: R(PT), Differential Scale Plate: Differential Scale, Electric Wire Gland: A Type 20a (Standard), Contacts: 2ab

Classification of Waterproof: Drip Proof, Pressure Range: 0.05~0.7MPa, Fluid Contact Area Material: SUS316, Thread: NPT, Differential Scale Plate: None, Electric Wire Gland: -, Contacts: -

Classification of Waterproof: Drip Proof, Pressure Range: 0.05~0.7MPa, Fluid Contact Area Material: SUS316, Thread: R(PT), Differential Scale Plate: Differential Scale, Electric Wire Gland: -, Contacts: -

Classification of Waterproof: Drip Proof, Pressure Range: 0.05~0.7MPa, Fluid Contact Area Material: SUS316, Thread: NPT, Differential Scale Plate: Differential Scale, Electric Wire Gland: -, Contacts: -

Fieldbus system IO-Link Setting tool

EX9-AC020EN -PSRJ Metal part Metal part Cable length (L) 010 1m 020 2m 030 3m 050 5m M12 RJ45 100 10m Communication connector Fig.

EXxx-OML0010CN

. & / a) (52) b) 28 c) /(16) d) e) (51) f) g) h) OFF ON i) j) (51) k) (SIDXDYDM) ON/OFF ON SI 030 (DXDYDM) 1 -17No.EX-OML0010CN-C a) (52 ) b) (28 c) /(16 ) d) e) (51 ) f) g) h) Offset binarySign & Magnitude2S Complement mA() V() Scaled mA() V() i) j) (51 ) -18No.EX-OML0010CN-C 3.

HRX-OM-X084

Description Qty Applicable model Anti-quake bracket A Anti-quake bracket B 2 2 4 4 HRR010-A/W-10/20-Y HRR012/018-A/W-10/20-Y HRR-TK001 Nut (M8) HRR024/030-A/W-20-Y Bolt (M8) HRR050-A/W-20-Y Mounting of anti-quake bracket 1. Remove the cap from M8 stud bolt. (4pcs) 2. Mount the anti-quake bracket A. (Recommended torque : 12.5Nm) 3. Mount the anti-quake bracket B.

High Vacuum L Type Valve

Valve size Valve size Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description

XL-OMY0001

30-1H-2 XLA50-30-1H-2 XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 63 80 XLA63-30-1-2 XLA80-30-1-2 XLA63A-30-1-2 XLA80A-30-1-2 XLA63-30-1H-2 XLA80-30-1H-2 XLA63A-30-1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9// XLA16-30-1-2M9// 3 XLA16A-30-1-2M9NA-XN1 412 / 1 / 2 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025** AS568-030

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

XL-OMV0005

Description Valve size Valve size Material Part indication No. 16 25 40 50 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

XLA Series

Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V Exterior seal (3) Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal (2) Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Description Valve size Construction No.

XLA- ∗ -F7NJ ∗ - ∗ Series

Material Valve size 16 25 40 50 Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard AS568-025V AS568-030V AS568-035V AS568-039V Exterior seal (3) Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Description Construction No.

XL-OMV0002

2.2 Assy Assy 16 25 40 50 XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 63 80 100 160 XLC63-30-1-1 XLC80-30-1-1 XLC100-30-1-1 XLC160-30-1-1 XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Material Valve size 25 40 External seal 3 Standard AS568-030V AS568-035V Specific AS568-030** AS568-035** Valve seal 2 Standard B2401-V24V B2401-P42V Specific B2401-V24** B2401-P42** Note1) List the optional sealant material symbol after the model number, except for the standard sealant material (FKM: compound no. 1349-80).

XLDV Series

Material 25 40 50 Standard AS568-030V AS568-035V AS568-039V External seal 3 Specific AS568-030** AS568-035** AS568-039** Standard B2401-V24V B2401-P42V AS568-227V Valve seal 2 Specific B2401-V24** B2401-P42** AS568-227** Standard AS568-009V XLD40-2-9-1A XLD50-2-9-1A S valve seal assembly 4 Specific AS568-009** XLD40-2-9-1A** XLD50-2-9-1A** Valve size Description Constructions no.

High Vacuum L Type Valve

Material Valve size Description 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V Exterior seal (3) Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal (2) Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Note1) List the optional seal material symbol after the model number, except for the standard

XL-OMY0003

A6063SUS316LSUS304 FKM 245250Hz 30m/s /H4 H5 , 510% 4 XL-OMY0003 O 0.1mm0.2mm O 5 P9 O 6 P10 P13 5 XL-OMY0003 2.2 16 25 40 50 (5150) XLH16-30-1 XLH25-30-1 XLH40-30-1 XLH50-30-1 1FKM:No.1349-80 XLH16-30-1-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15