SMC Corporation of America
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P PNP Max.80 mA 1 V -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

V 12 V Relay, PLC Grommet 24 V Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equiv.)

ALARM is expressed as negative-logic circuit. (2) Positioning Operation (4) Stop by the STOP Signal 24 V 0 V 24 V 0 V Power supply Power supply ON OFF ON OFF IN0-3 IN0-3 Input Input ON OFF OUT0-3 STOP Output ON OFF BUSY OUT0-3 Release Hold BUSY External lock Output ALARM Speed Positioning operation 0 mm/s Release Hold External lock OUT0-3 output signals are ON in the same state as the input

FUNC DC(-) -19No.PS-OML0002CN-G DC(+) OUT1 -C OUT2 NPN 1 Max.28 V80 mA 1 V 1 k FUNC DC(-) DC(+) -D OUT1 NPN 1 Max.28 V80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) DC(+) OUT1 -E OUT2 PNP 1 Max.80 mA 1 V 1 k FUNC DC(-) DC(+) -F OUT1 PNP 1 Max.80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) -20No.PS-OML0002CN-G 1 1 1 1 ONOFF ON OFF ON P_1 H_

/-R () NPN 2 Max.28 V80 mA 1 V -21No.PS-OMU0005CN-C -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -Y () -V/-T () PNP 2 Max.28 V80 mA 1 V -22No.PS-OMU0005CN-C [] 3 0.2 [] / OUT2 OUT2 OUT1 OUT1 [F10]30 () 13 35 1 (62 ) () () (27 ) (29 ) (3 ) (25 ) 3 () 3 -23No.PS-OMU0005CN-C ON OFF ON ON OFF ISE20B [P_1] OUT1 0.500

How to Order CJ1 MGG M V G5BAL Stroke Mounting style Bore size XC58 CJP Slide bearing Water resistant cylinder Water resistant type/Built-in hard plastic magnet V FKM seals (Fluoro rubber) CJ2 Water resistant 2-color indication Solid state switch CM2 Specifications MGGM 32, 40, 50 CG1 Series Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

12 V 12 V Relay, PLC Yes Yes Grommet 24 V IC circuit 5 V,12 V Diagnostic indication (2-color indication) 12 V IC circuit A96V A96 5 V 12 V Grommet A93V A90V A93 A90 100 V Relay, PLC 2-wire 24 V IC circuit 100 V or less No Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

12 V CY1H 12 V Solid state auto switch Reed auto switch Yes IC circuit CY1F CY1F 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Grommet 24 V 12 V CYP IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 12 V Yes 24 V Grommet Relay, PLC A93V2 A93 A90 100 V 2-wire A90V IC circuit No

12 V IC circuit 12 V 5 V, 12 V 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches

(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance R The pressure range in which the Pressure switch satisfies the specifications.

Example) Step data of the controller setting kit [Normal mode] Speed Position Accel Decel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn No.

() 1 V (80 mA ) 1 1.5ms (20,100,500,1000,2000,5000 ms ) 2 0 2, 2,bar,psi,InHg,mmHg MPa,kPa,kgf/cm 3 MPa,kPa,kgf/cm bar,psi LCD 3 (X2) 1)/ 2) 1)4 (7 ) 2)4 (1 11 7 ) ON OUT1 4 0,10,50,100,500,1000,5000 ms -62No.PS-OMS0006CN-G ZSE20() ZSE20F() ISE20() IP40 AC1000 V 1 50 M(DC500 V ) -550 -1060 () 3585RH() CE/UKCA UL/CSA(E216656) 2 m 1(0 ms) 2 3MPa/kPa 490 M5 01 N01 C4H C6H

V V V V V V Single shaft with four chamfers X V V V V V V V V V Double shaft with key Y V V V V V V V V V Shaft type Standard Double shaft with four chamfers Z V V V V V V V V V Single round shaft T V V V V V V V V V Double shaft (round shaft, with four chamfers) J V V V V V V V V V Double round shaft K V V V V V V V V V Cushion None V V V V V V V V V Air cushion V V V V V With auto switch

12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V IC circuit Reed auto switch Solid state auto switch IC circuit Diagnostic indication (2-color indication) 24 V Relay, PLC Yes Grommet Water resistant (2-color indication) IC circuit M9PAV M9PA M9BAV M9BA 3-wire (NPN equivalent) A96V A96 IC circuit 5 V Yes Grommet A93V A90V A93 A90 100 V 12 V Relay, PLC 2-wire 24 V IC circuit 100 V or less 5 V,

IC circuit 5 V Yes (NPN equivalent) A93 A90 A54 A64 A59W A33 A34 A44 IC circuit 100 V 12 V 5 V, 12 V Grommet No Relay, PLC 100 V or less Yes 100 V, 200 V No 200 V or less 2-wire 24 V PLC Terminal conduit 12 V Relay, PLC Yes 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

12 V 12 V Relay, PLC IC circuit 24 V Grommet Diagnostic indication (2-color indication) 5 V, 12 V 2-wire 12 V Water resistant (2-color indication) IC circuit 3-wire (NPN equivalent) Z76 5 V Grommet 24 V 12 V 100 V Z73 Z73 Z80 Relay, PLC 2-wire None IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

24 V 100 V, 200 V Relay PLC DIN terminal Diagnostic indication (2-color indication) A59W Grommet Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW G39 K39 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V