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Note 3) The minimum unit for 1ry205 is l PSl I'relerre# i.rirfilri:: i'fiprafi: How to Order Model Pressure 0 Current WDe 4 to 2OmA Cunent type 0 to 20mA 2 Voltaoe tvpe 0 to SVDC 3 Voltaoe tvoe 0 to 1oVDC connector type S : l Straioht tvDe 3m L Right angle type 3m N Without cable connector d Preset input Monitor output Option (bracket) Thread type Port size 2 114 (2OOO,3000 type) 3 3/8 (2000

Tube deformation ratio at the minimum bending radius = L D 2d 1 x 100 Mandrel Here, : Deformation ratio (%) d : Tube O.D.

. -20No.PF-OMJ0016-J Specification Specifications Model PFM510 PFM525 PFM550 PFM511 Applicable fluid Dry air, N2, Ar, CO2 (air quality class to ISO8573-1 1.1.2 to 1.6.2) Dry air, N2, Ar 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min Rated flow range CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Accuracy 3%F.S. max. Repeatability 1%F.S. max.

L1 (Extension nozzle length) Width across flats 14 R1/4 D L L2 H1 Outside diameter 4 Series VMG Dimensios: Nozzle Cover Cover for male thread nozzle [mm] Nozzle cover part no.

Instantaneous flow: L/mincfm Accumulated flow: Lft3 Port size C8 02 8 (5/16") One-touch fitting Rc1/4 NPT1/4 G1/4 Note 4) N02 F02 Option 2 Note 4) ISO1179-1 compliant Made to Order With bracket (For without flow adjustment valve) S R Nil With bracket (For with straight type flow adjustment valve) Piping entry direction ZS-33-M ZS-33-MS With 3 selftapping screws Nil L With 2 selftapping screws

VCHC AS1201F, AS1211F AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 ASR ASQ Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS4201F, AS4211F AS3201F, AS3211F Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/

Clean Air Filter SFD Series RoHS HAA HAW AT How to Order IDF IDU 1 0 SFD 0 C08 IDF FS Clean air filter IDFA Size Max. flow rate 100 L/min (ANR) 500 L/min (ANR) IDFB Option Option None Bracket (SFD100 only) Symbol 1 2 Symbol IDH Nil B The brackets are provided with the SFD200 series as a standard product.

Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER

fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 Flow rate (l/min (ANR)) 3 6 Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F ASP630F 1500 1000 Flow rate (l/min (ANR)) 14 Inlet pressure : 0.5

Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG30LACompressed air0.3 to 1.0 5 to 50 5 to 50 409375180.72525251 L/min [ANR] {In case of Inlet air pressure

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525?

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

Note 3) The handle of the selector (2 position and 3 position) cannot be removed or replaced alone. 5-6-20 2/3 Port Mechanical Valve Series VM200 How to Order S 01 02 3 0 VM2 Suffix for actuator Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 NPT N02 G F02 1 4 Roller lever 01 Black 1 4 One way roller lever 02 Green SA 1 4 Straight plunger

NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A M12 (5 m) ZS-31-B S M12 (5 m) ZS-31-C L -8No.PS-OMH0002CN-D LCD () SET UP DOWN 4 24 ()OUT1ON LCD 4 UPON/OFF DOWNON/OFF SET -27-67 (-27-67 OUT2()) -9No.PS-OMH0002CN-D 7 7 "8"7 "-"()7 D Digit () 1 digit=0.01 MPa 0.01 MPa 0.01,0.02,,0.99,1.00

This is a legacy product, and replaced byVFM250-N02-01S, VALVE, MECH L (STEEL), VALVE, VM BODY PT 1/4, .68200 lb

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)

Decrease the setting value by turning to (L) side. 2. Use a flat head screwdriver to set the pressure. Then, lock it in place with the lock nut. Otherwise the set pressure will change. 3. The hysteresis (the ON-OFF range) is fixed. 4. Set pressure scale is the value when pressure increases.

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: E (Panel Mount Adapter)

Pressure Range: ISE70 (0 to 1 MPa), Piping: N02 (NPT 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: None, Operation Manual/Calibration Certificate

Pressure Range: ISE70 (0 to 1 MPa), Piping: N02 (NPT 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)