AS-FG/ASD-FG

A1 D1 L5 D1 A2 T T Inch size L4 L5 A1 A2 M1 Max.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Parallel l/O Connector 6.1 Parallel I/O specifications Input specifications Output specifications No. Item Specification No.

Air Slide Table Series MXJ

Body tapped l l Maximum screw-in depth l (mm) Maximum tightening torque (Nm) Model Bolt MXJ4 MXJ6 MXJ8 1.14 2.7 2.7 5 6 6 M3 x 0.5 M4 x 0.7 M4 x 0.7 2. Through-hole Mounting Maximum tightening torque (Nm) Caution l (mm) Model Bolt MXJ4 MXJ6 MXJ8 1. Do not scratch or dent on the mounting side of body, table and end plate.

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

High performance type Step Motor Controller (Servo/24 VDC)

Parallel l/O Connector 6.1 Parallel I/O specifications Input specifications Output specifications No. Item Specification No.

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Rotary Cylinder Series MRQ Size: 32, 40 1

A = 0.06 x 40.2 x {(0.5 + 0.1)/0.1}/0.5 = 28.6 l/min B = 0.06 x 4.88 x {(0.5 + 0.1)/0.1}/0.5 = 3.5 l/min C = B = 3.5 l/min D = 0.06 x 33.7 x {(0.5 + 0.1)/0.1}/0.5 = 24.3 l/min Since operation is simultaneous at C and D, total the respective amounts of air requirement.

Dual Speed Controller with One-touch Fitting Series ASD 1

L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

ASD

D1 D1 A2 T T Inch L4 L5 A1 A2 M MAX.

Step Motor Controller (Servo / 24 VDC)

Lock B-1 Red 4 Lock A-1 Black 5 Sensor B-3 Brown 1 Sensor A-3 Blue 2 Electric Actuator side Controller side 10 - (5) I/O Cable -Pin No. # of wire Color of Dot Dot Pin No. # of wire Color of Dot Dot insulation mark color insulation mark color B1 7 Yellow Red A1 1 Light brown Black Cable length (L) B2 8 Light green Black A2 Light brown Red B3 Light green Red A3 2 Yellow Black B4 9

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

L ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 L 73.0 8 4.5 1.25 7.5 135.5 173.0 210.5 248.0 5.5 35 35 285.5 323.0 852 Pressure Sensor Controller Series PSE200/300 Function Details A Auto-shift function B Auto-preset function When there are large fluctuations in the supply pressure, the switch may fail to operate correctly.

CATALOG

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Table of Contents

(mm) Gripping point L (mm) Gripping point L (mm) Gripping point L (mm) Note) Distance to the gripping point L of single acting type is shortened by spring return.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Digital Flow Switch

A2 Bracket B (Horizontal mounting) Part no. Option Note ZS-28-CA-4 Sensor connector For PF3A7H ZS-46-A1 Bracket A Tapping screw: Nominal size 3 x 8 L (2 pcs.) ZS-46-A2 Bracket B Tapping screw: Nominal size 3 x 8 L (2 pcs.)

OMR0032

Options 15.1 I/O cable 1) How to Order the I/O cable (2) Parallel I/O cable connector terminals L A T H LATH2LATH5Terminal Insulator Insulator number color Dot Dot color color A1 Red Light Red * Cable length [L] brown A2 Grey Black A3 Grey Yellow Red 1 1 m A4 Grey Black 3 3 m A5 Green Light Red green A6 Grey Black 5 5 m A7 Grey Grey Red A8 Grey Black A9 Grey White Red A10 Green Black I/O

Servo Motor Controller (24 VDC)

CN5: Parallel l/O Connector 6.1 Parallel I/O specifications * Input specifications * Output specifications No. Item Specification No.

S Couplers Series KK/KKH/KK13

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 Symbol 01 02 03 04 Symbol 50 60 65 80 85 175 Series KKH Dimensions/Socket (S) Male thread type (mm) A1 A2 When connected T Connection port size D H Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Mass g A2 Model A1 T KKH3S-01MS R 1/8 36.0 6.0 20.4 20.3 33.5 39.1 36.6 14 -02MS 20.2 R 1/4 1/8 34.0 9.0 19.4 31.5 39.5 37.0