3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Function Symbol Specifications DC (1.0 W) AC Electrical entry Nil Standard type High pressure type (Metal seal, VQZ100 only) Light/Surge voltage suppressor (1.0 W) (1) K Electrical entry Symbol (0.5 W) Low wattage type G L LO M MO Y YO YZ YS No Y Grommet (DC specifications) L plug connector with lead wire L plug connector without connector M plug connector with lead wire M plug connector

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

7 w !8 !4 !3 !7 w !8 !4 !3 AS-F TMH ASD AS AS-FE KE r i o e y !6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

AR20-B to AR60-B

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

0.4

Flat Ribbon Cable Assembly D-sub Connector Cable Assembly Pins 10P 16P 20P Cable length (L) Pins Cable length (L) 1.5 m 1.5 m AXT100-FC10-1 AXT100-FC16-1 AXT100-FC20-1 15P 3 m AXT100-FC10-2 AXT100-FC16-2 AXT100-FC20-2 AXT100-DS15-1 5 m 3 m AXT100-FC10-3 AXT100-FC16-3 AXT100-FC20-3 AXT100-DS15-2 Connector width (W) 5 m 17.2 24.8 30 AXT100-DS15-3 For other commercial connectors, use a type

HRX-OM-W032

(IEC 60417-5032-1) How to see the serial number W Z 001 December 2018 W Z 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2018 W Repeated from A to Z in alphabetic al order 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2019 X 2 P 2020 y 3 Q Fig. 1-1 Position of the product label HRS Series 1.4 Product Label 1-3 HRX-OM-W032 Chapter 1 Safety Instructions

REC

Example) If P=0.6MPa, a max. stroke =the respective 0.6 stroke in the graph X 0.5 Figure q 49 45 39 30 0.7 Front flange: F Rear flange: G 259 237 211 168 0.3 Foot: L L 199 183 162 129 0.5 W W W F 168 154 136 109 0.7 Load factor h 119 110 97 76 0.3 m 90 83 73 56 0.5 G 74 68 60 46 0.7 1) h=0.7 or less m 2) h=0.5 or less m 3) h=0.9 or less 1) In the case where cylinder is used for static action

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

plug connector (M) 0.45 0.6 (Option) 100V AC 200V AC 110V AC 220V AC (A) 2 VQ M plug connector (M) VQZ 1 (P) 3 (R) N.O.

5 Port Solenoid Valve SY Series

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075

VQ4000

Electrical entry G Body Coil voltage Lead wire length 0.6 m 5: Plug lead sub-plate 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet H Function Nil Y(1) R(2) Standard type (1 W) Low wattage type (0.5 W) External pilot Seal 0 1 Metal seal Rubber seal Note 1) Note 2) Applicable to DC specifications.

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

ZX

Nil Y M5 x 0.8 M6 x 1 (Option) Pilot valve Vacuum switch electrical entry Nil DC: 1 W (With indicator light: 1.05 W) AC Nil L Lead wire length 0.6 m Grommet type Lead wire length 3 m C Lead wire length 0.6 m CL Lead wire length 3 m Y DC: 0.45 W (With indicator light: 0.5 W) Connector type CN Without connector (Without lead wire) 24 VDC and 12 VDC are applicable to 0.45 W.

-fl Seies

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Symbol 02 Stations Note 2 stations Double wiring Note 1) w SI unit specifications 16 02 16 stations y SUP/EXH block

VZ100/300/500

: 600 mm Bracket (Mounting hole) (Mounting hole) (Mounting screw) (P , A, R port) (PE port) L plug connector (L) VZ52-L-01 M plug connector (M) VZ52-M-01 DIN terminal (D) VZ52-D-01 Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-32 33 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Base Mounted

5

-X 175 CG1Y Series Mounting Bracket Axial foot: CG1YL B LH 15 LT ZZ + Stroke LS + Stroke Z X W 2 x LC (Knock pin position) Y X Y M W 4 x LD LZ LX (mm) Axial Foot Bore size (mm) B LC LD LH LS LT LX LZ M W X Y Z ZZ 20 34 4 6 20 53 3 32 44 3 10 15 7 47 118 25 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 123.5 32 45 4 7 25 53 3 44 58 3.5 10 16 8 53 125.5 40 54.5 4 7 30 60 3 54 71 4 10 16.5 8.5 63.5

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Size 02 Size 01 Side ported 1/8 Side ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 3-11-12 13 Series EVS1-01/1-02 Conforming to ISO Standard Solenoid Valve (with M Connector) Model Series EVS1-01 Flow characteristics

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.