smcmaintenancepartslist

P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder

Basic type / Direct mount type Series CY3B/CY3R

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB T 4 x counter bore dia.

Rotary Actuator/Vane Type

L2 + (3 x P) L2 + (3 x P) K axis (T axis) J axis Q1 = M L1 = L1 + (3 x P) L2 = The maximum dimension L1 is, as a rule, twice the thread size. (Example) For M3: L1 = 6 mm The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm However, for M5 with T shaft, the maximum dimension L2 is 1.5 times the thread size.

0.55

(A) 2 (A) 2 12 12 Standard 1 (P) 3 (R) 1 (P) 3 (R) (A) 2 For vacuum 12 1 (P) 3 (R) 1(P) 3(R) For vacuum u y t r e w q 2(A) 12 1(P) 3(R) Component Parts Bracket Assembly Part No. No. Description Material Note Description Part no.

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Mechanically Jointed Rodless Cylinder Series MY1

5.5 16 24.5 54 9.5 M6 x 1 5.6 110 55 42 9 M5 x 0.8 30 20 MY1B25 2 M5 x 0.8 9 40.5 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 52 12 M6 x 1 37 25 MY1B32 2 M5 x 0.8 10 50 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 61.5 75 2 13 M6 x 1 (mm) P PA PB Q PP QW QQ RR SS TT UU WW Model PC PD PG T XX YH YW Z ZZ VV Rc 1/8 60 30 206 12 42 16 16 6 14.5 15

24

V M9NWV M9NW P P P p p IC circuit 3-wire (PNP) M9PWV M9PW P P P p p 2-wire 12 V M9BWV M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC MGT Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 p p P p p IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 p p P p p 2-wire 12 V M9BAV*1 M9BA*1 p p P p p Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P3DWA P P P

Air Fittings & Tubing

<M5, M6> D P M Part No.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

0.4

C4 2-position 3-position exhaust center Option None With bracket Nil IN side port size OUT side port size 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) F M5 C3 C4 C6 N3 N7 M5 C3 C4 C6 N3 N7 M5 thread 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting M5 thread 3.2 One-touch fitting 4 One-touch fitting

•

AdaprOf PHiS I J t ~ (r I Re I .m."~ =~~P~a'~-t -, .~.@. Deteriorated Pad 36 Vacuum Pad/Components VacuumPad/Components Part/ Pad(With Lock Ring) Flat type pad Flat type pad with rib ZPlOCO-5OCO ZP02UO 08UO .0 oC (mm, ' , 19.5 3,e I C 'A . t El' K; 11'0 E ' Part No.

42

filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations

Valve Single Unit

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

SY

DIN rail] 21 P = 24 (Pitch) Manual override 13.5 DIN rail holding screw + Tightening torque: (0.55 to 0.65)Nm + 13.8 69.5 83.8 PE X EB P EA PE X EB P EA 4 A B 2 4 A B 2 4 A B 2 4 A B 2 4 A B 2 56.3 5.5 53 53 38.1 35 5 EA 3 EB 1 P 25.5 25.5 184.1 16.3 33.6 167.6 25 96.6 8 130.4 38.1 48.3 n 2 6-Rc 3/8 (P, EA, EB port) + + + + + Triangle mark 2-M5 x 0.8 (pilot, EXH

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

Hydraulic

T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.