Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: NPT1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)], Operation

ARX Series

B G P BG GP 1 Specialty Regulators ARX Series Regulator for 290 psi (2 MPa) ARX20, 21 Flow Characteristics ARX20-N02 130.5 ARX20-N01 Conditions: Supply pressure 290 psig 130.5 116 116 101.5 101.5 Secondary pressure (psig) Secondary pressure (psig) 87 87 72.5 72.5 58 58 43.5 43.5 30 30 15 15 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3

25

Process Pump (Diaphragm Pump) PB Series Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids o t p m s l a i PA z P e Built-in solenoid valve only RoHS Smaller, lighter, 25% reduction in volume Smaller, lighter, 25% reduction in volume

ZL3-OM00601

Port exhaust *2 *2: Port thread type is the same as the thread type selected for 3). 3) Supply (P), vacuum (V) port / one-touch fitting port size Vacuum (V) port Supply (P) port 5) Combination of the supply valve and the release valve 06 Rc3/4 K1 Supply valve (N.C.) + Release valve (N.C.) 04 2xRc1/2 K2 Supply valve (N.C.) 8() F06 G3/4*1 B1 Supply valve (N.O.) + Release valve (N.C.)

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

Process Pump

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

NCX2 seies

I ffi f l * l l+l {_l l@tt L-I a Noler Thls diagfam is for D A7 or D,A8 type ( ) with D-F7 or D-J7lype.

Air Cylinder NCX2 Series Slide Unit

I ffi f l * l l+l {_l l@tt L-I a Noler Thls diagfam is for D A7 or D,A8 type ( ) with D-F7 or D-J7lype.

ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

S Couplers

Socket/Plug Symbol Type Plug Socket With barb fitting P S With nut fitting With one-touch fitting Semi-standard Socket (With sleeve lock mechanism) L Port size variations Male/Female thread type Barb fitting type Nut fitting type One-touch fitting type Applicable tube O.D. mm Symbol Thread size Hose nominal 6 (1/4") 8 (1/4") 9 (3/8") 12 (1/2") Applicable hose I.D.

Pressure Switch/Reed Switch Type

MPa Model AC20m AC25m, AC30m AC40m AC40m-06 AC50m, AC55m, AC60m Scale plate V V V V V V V V V V c P Note 2) Both MPa and psi pressure unit IS10M-20 IS10M-30 IS10M-40 IS10M-50 IS10M-60 Note 1) Note 2) Set pressure range of 6P(L, Z) is 0.2 to 0.6 MPa (30 to 90 psi).

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

Precision Regulator Series IR1000/2000/3000

min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 11.5 l/min (ANR) or less (At supply pressure of 1.0 MPa) SRF Rc 1/4, 3/8, 1/2 Rc 1/4 Rc 1/4, 3/8, 1/2 Port size Rc 1/4 Rc 1/8 Rc 1/8 (2 locations) Pressure gauge port ARX20 Ambient and fluid temperature 5 to 60C (No freezing) 0.71 0.35 0.64 Mass (kg) 0.30 0.14 VCHR Note 1) With the condition of no flow

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

at a flow volume of 1000 l/min (ANR), the inlet pressure will be 0.05 MPa.

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter), Operation Manual: Y (w/o Operation Manual, w/o Calibration

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: w/o Operation Manual, w/o Calibration Certificate

PAB-OM-O003

Note 2) Operation is possible with a valve with small Cv value when the operation cycle is small. 12 How to Order P B 1 3 1 3 A S Female thread / Tube extension P B 1 3 1 3 A S With nut Port size Material of diaphragm Symbol Main fluid Pilot air Symbol Material of diaphragm connection size connection size Female thread 1 PTFE 01 Rc 1/8 N01 NPT 1/8 F01 G 1/8 Actuation Tube extension Symbol

ZSE20(F)_ISE20

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Digital Flow Switch (Integrated display type)

CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min