3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

Speed Controller with Indicator

rate [L/min (ANR)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 02 01, 23 300 50 03, 04 100 200 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

0.4

Flat Ribbon Cable Assembly D-sub Connector Cable Assembly Pins 10P 16P 20P Cable length (L) Pins Cable length (L) 1.5 m 1.5 m AXT100-FC10-1 AXT100-FC16-1 AXT100-FC20-1 15P 3 m AXT100-FC10-2 AXT100-FC16-2 AXT100-FC20-2 AXT100-DS15-1 5 m 3 m AXT100-FC10-3 AXT100-FC16-3 AXT100-FC20-3 AXT100-DS15-2 Connector width (W) 5 m 17.2 24.8 30 AXT100-DS15-3 For other commercial connectors, use a type

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Rubber seal 5 Port Solenoid Valve Series SYJ5000

/surge voltage suppressor) 69.6 [76.6] 45 50.1 [57.1] + 54.2 34.7 31.5 6 8.5 21.5 6 43.9 32 24 15 17 17 1/8 (P, R port) 45.5 L plug connector (L): SYJ5240-L-01 M plug connector (M): SYJ5240-M-01 DIN terminal (D): SYJ5240-D-01 M8 connector (W0): SYJ5240-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 125.2 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 49 M8 x 1 37.1 61.2

VEX1

VEX3222 None With plug 2 x 4.5 (Mounting hole) L plug connector (L) M plug connector (M) M5 x 0.8 (P2) Refer to Table (1).

60

w d d it it e e h h c c la la o o u u p p t t e e r r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

3 Port Solenoid Valve Metal Seal Series VZ200 1

M5 x 0.8 (Pilot EXH) 1 2 1 2 DIN terminal: VZ2 5-D(Z)-01 L: VZ2 5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (

KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

/

terminal U 100.5 E J D I M A C H L B F K N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

IIIIIII

Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.

0.55

W/ surge voltage suppressor is available for grommet type only. Grommet terminal 7 Conduit terminal D With connector DO Without connector L With lead wire LN Without lead wire LO Without connector M With lead wire MN Without lead wire 9 DIN terminal Option L, M plug connector is 220 VAC at the maximum.

V

V A C U U M S W I T C H S E R I E S ZSE1 ZSE1--55 ZSE1 L Switch Type 55L E L E C T R I C A L E N T R Y Grommet (24) L Grommet (120) C w/Plug Connector (24) CL w/Plug Connector (120) CN Plug Type (w/o Lead) C O N N E C T I O N 00 NZM Ejector Mounting 01 1 8 PT T1 1/8 NPTF ACCESSORIES V A C U U M S W I T C H S E R I E S ZS S W I T C H T Y P E Interface plate for ZM Ejector P31806-01 (blank

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

JXCx-OMY0008

If W-AREA1 >W-AREA2, the "Parameter ALM" alarm will be Basic parameter "Stroke (-)" W-AREA1 W-AREA1 "Stroke (+)" Basic parameter "Stroke (-)" W-AREA2 W-AREA2 activated. However if W-AREA1= W-AREA2 = 0, WAREA will be OFF and no alarm will be generated.

NCG/CG1

L D-A73 (Example) Lead wire length 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

KQ2

(inch) Mass (g) Applicable tubing D1 L M Model KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 5 32 1 4 5 16 3 8 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 20.5 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Mass (g) D L A Model Note) KQ2P-01 KQ2P-03 KQ2P-05 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KQP-01 KQP-03 KQP-05 KQP-07 KQP-09 KQP-11 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 1 1 1 2 3.5 5

JXCx-OMT0062

(unit mm): When the current position is within W-AREA1 and W-AREA2, the WAREA output turns ON. When W-Area 1 < W-Area2, the Parameter ALM of alarm occurs.