Hydraulic

Bore size (mm) NN P S X Y ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S +

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 X 0.8 R port 20 stations 20 S VT M5 X 0.8 A port M3 X 0.5 A port M3 X 0.5 M5 X 0.8 P port P port VT M5 X 0.8 Note) If more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port.

42

Locking type/Tool required SUP/EXH block plate Push type/Tool required SYJ Restrictor spacer Locking type/Manual External pilot 50/60 Hz 50/60 Hz Manifold SZ Grommet Plug-in VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ P.481 P.482 P.476 P.476 P.477 P.477 P.477 P.477 P.478 P.478 P.479 P.480 (Except S kit) (Except S kit) (Except S kit) (Except S kit) SQ VFS VFR VQ7 P.527 P.522 P.522 P.523

Rotary Actuator/Vane Type

(Example) For M3: L1 = 6 mm Q1 = M L1 = Applicable shaft types: S, Y L2 + (3 x P) L2 = Q2 = M Applicable shaft types: S, Y [mm] [mm] CRB2, CRBU2 Q1 S Y 10 Not available 15 M3 20 M3, M4 30 M3, M4, M5 CRB2, CRBU2 Q2 S Y 10 Not available 15 M3 20 M3, M4 30 M3, M4, M5 Shaft type Shaft type Size Size Symbol: A33 Symbol: A34 Machine female threads into the short shaft.

High Vacuum Angle Valve

Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

REA/REB

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-P S + Stroke LW EA EB HC HP HA H HB NT HT NL HG PP W A N 8 Z + Stroke Square nut for body mounting J TW (mm) HP MM HT J LW LL L M HG HC HB HA H EB EA Model A REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x

REA/REB

REAH20 REAH25 42 19 M5 x 0.8 8 71.5 106 44 M5 x 0.8 17 33.5 33.5 45 46 97 26.5 21 50 8 23.5 M5 x 0.8 48.5 75.5 108 53 16 M5 x 0.8 41.5 22 54 42.5 26.5 102.5 58.5 28 M6 x 1.0 10 86 138 56 M6 x 1.0 25 46 46 61.5 63 125 29 24 TW S XB Z ZZ W PA PB PP P Model N NL NT REAH15 REAH20 REAH25 161 65 17.5 194 21 88.5 62 8 M5 x 0.8 50 15 16.5 70 169 92.5 205 19.5 50 65 23 Rc 1/8 18 15 8 209 75 23.5

VQC

3 18.5 9.5 7.5 4-M8 2-M12 M3 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

1

S Q C + Stroke B + Stroke M10 x 1.5 MC (RA) 17 + Stroke J A+ Stroke x 2 Bore size (mm) ML OA OB OL P PA PB X XA YY YL Z NN PW Q S R T RR RB U RA XC XL VA VB XB 12 16 20 25 18 19 25 28.5 34 38 47 55 13 15 12.5 12.5 7 13 9 14 14 16 18 48 54 70 33 33 37 RB0806 RB0806 M4 x 0.7 3 3 10 10 50 56 3 3 6 6 6 6 5 5 37 38 3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

•

:ro s s '" ?

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

CY1

A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L1 + (3 x P) (mm) (mm) Q1 Q2 Q1 = M L1 = Shaft type Shaft type S Y S Y Size Size 10 10 Not available Not available L2 + (3 x P) 15 15 M3 M3 20 20 M3, M4 M3, M4 L2 = Q2 = M 30 30 M3, M4, M5 M3, M4, M5 Symbol: A33 Machine female threads into the long shaft. Symbol: A34 Machine female threads into the short shaft.

5 Port Solenoid Valve, Series VQC

(12) 40.5 2 PWR 25 18.5 3 9.5 7.5 4-M8 2-M12 M3 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

Battery-less

Provided by the customer Provided by the customer Provided by the customer Provided by the customer IO-Link master PLC PLC PLC PLC PLC Communication plug connector for DeviceNet Communication plug connector for CC-Link p. 177 p. 177 Communication plug connector for IO-Link p. 177 JXC-CD-S Straight type LEC-CMJ-S Straight type JXC-CL-S Straight type T-branch type T-branch type JXC-CD-T LEC-CMJ-T

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8