Basic type / Direct mount type Series CY3B/CY3R

Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t N m 4.4 1.37 2.65 13.2 Tightening torque Square nut l t Service Life and Replacement Period of Shock Absorber Caution 1.

F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

CLA

DIHerMI 15 90 ,00 11 0 With 2 surface D-85 sWitches Same 75 90 '00 surface 110 D-B6 DiHerem jS+5~ go+l ~ D-GS l DO+'~r" 110... 10~ D-KS With n surface .1'1::1 .2,3,4 ... nz4.8.12. n= ...,e.l :t: n=o4,a .I 2..18. swifches Same 75..SO(~) 90+50/11-2) HlOo..so;.21 110+50 (n-2) I surface n",2,3,4, .. ~, "' .S.8 1"O:2.4,6.L n--2,4 ,6.8 ...

Direct Operated

F 33 25 2 x E Mounting hole Port indication 2 x Rc1/4 Y 44 T Q G1/2 3 1 A A C D B B L L2 L 12 L1 U M D side Stations n U side 1 2 3 4 5 300 280 X V R S 2 x E Mounting hole H L K J L (mm) n (stations) Model Dimension 3 168 156 218 200 4 204 192 264 246 5 240 228 310 292 6 276 264 356 338 7 8 348 336 448 430 9 384 372 494 476 10 2 L1 L2 L1 L2 96 84 126 108 132 120 172 154 312 300 402 384

0.

2(A) port] 12 7.5 41 2 x 3.4 (For mounting) 3.5 34 3.5 Manual override 2 A 2 A 24 + R 3 P 1 38.4 (Lead wire length) 53.8 Approx. 300 40.9 35.5 30.5 PE 16 7.5 7.5 1/8 [1(P), 3(R) port] 14.5 7 M5 x 0.8 (PE port) L-type plug connector (L): VQZ115l-lLl1-01 M-type plug connector (M): VQZ115l-lMl1-01 (Lead wire length) Approx. 300 50.7 [52.9] 53.8 [60.8] 65.1 [72.1] (Lead wire length) Approx. 300

Intrinsically Safe Valve

(LL) 53-SY5 20-LL-01 (-F2) 3 4 5 L (Lead wire length) 156 Insulator: Red (+) Insulator: Black () 5.9 4.1 0.3 mm2 14.7 12 84.3 Terminal type (TT) 53-SY5 20-TT-01 (-F2) 3 4 5 Max. 10 L (Lead wire length) 189.6 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 101.1 7 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY7000 2-position single L-type plug connector (L) 53-SY7120-L-02 (-F2) With

Compact Manifold Regulator Series ARM5

L2 L2-10.5 L1=(28 x n)+56 18 20 28 52.5 81 28 5.3 5.5 SMC SMC SMC SMC 28 56 SMC SMC K K P P C C U U O O S S L L H H 8 3 5 11.5 L2 dimension DIN rail part no.

Series SV

DIN rail holding screw ( ) Silencer (air discharge port) (with built-in silencer specification) 4(A) port side: Orange 2(B) port side: Green L2 5 (Rail mounting hole pitch: 12.5) L1 (Station n) (Station 1) Light/Surge voltage suppressor 7.5 (DIN rail dimension) 68.2 63 48 19.7 Block separation lever L dimensions n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5 150 127.5

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

Magnetically Coupled Rodless Cylinder

Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t N m 4.4 1.37 2.65 13.2 Tightening torque Square nut l t Service Life and Replacement Period of Shock Absorber Caution 1.

A

E I R L E N G T H A N D W E I G H T S H O U L D B E W I T H I N T H E F O L L O W I N G R A N G E.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

0.4

L7 L6 L5 VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Table of Contents

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

60

n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

Modular Type Filter Regulator Series AW

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.

3 Port Solenoid Valve Metal Seal Series VZ200 1

M5 x 0.8 (Pilot EXH) 1 2 1 2 DIN terminal: VZ2 5-D(Z)-01 L: VZ2 5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1/8 (Lead wire length) (Pilot EXH) M5 x 0.8 M5 x 0.8 (

VS 8-2/VS 8-4

D side n Station number 4 5 2 1 Indicator light L2 L1 45 45 (n-1) x 19 45 88 15 19 2 2 Manual override 152 (Double dual 3-port) 133 118 (Single) 165(3-position) 6.5 112 99 4 x M5 mounting holes Formula: L1 = 19n + 71, L2 = 19n + 123 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 6 5 4 3 2 9 242 294 90 142 1 128 180 223 275 8 204 256 10 261 313 11 280 332 12 299 351 13 318 370 14

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

0.4

Note)( ): VVQ2000-N-n-X4A/X4B Blanking plug (For One-touch fittings) Dimensions KQ2PA L D Model Applicable fitting size A L D Model Applicable fitting size It is inserted into an unused cylinder port and SUP/EXH ports.