Vacuum Pad

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

Vacuum Pad

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

Vacuum Pad

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

Vacuum Pad

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

ZP

ZPA-T1-B01 ZPA-T1-N01 ZPA-T1-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T2-B01 ZPA-T2-N01 ZPA-T2-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T3-B01 ZPA-T3-N01 ZPA-T3-T01 ZPA-T1-B8 ZPA-T1-B10 ZPA-T1-B8 ZPA-T1-B10 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T2-B8 ZPA-T2-B10 ZPA-T2-B12 ZPA-T2-B16 ZPA-T3-B12 ZPA-T3-B16 ZPA-T3-B12 ZPA-T3-B16 ZP40 ZP40 With three M3 bolts With three M3 bolts ZP50

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

L Calculation example) T1 to T4 can be calculated as follows. Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], Time [s] T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1 T2 T3 T4 T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Electric Actuator

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 +T2 +T3 +T4 [s] L 0.5 V (T1 + T3) V "T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Electric Actuator

L Speed: V [mm/s] a1 a2 T = T1 + T2 + T3 + T4 [s] P T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] P T2: Constant speed time can be found from the following equation.

ZP

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Electric Slide Tables

Lead 5: LES16K 3 Work load [kg] T1 = V/a1 = 220/5000 = 0.04 [s], Lead 10: LES16J 2 T3 = V/a2 = 220/5000 = 0.04 [s] T = T1 + T2 + T3 + T4 [s] T2 = L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. 1 0 = 50 0.5 220 (0.04 + 0.04) 220 0 100 200 300 400 500 T1 = V/a1 [s] T3 = V/a2 [s] Speed [mm/s] = 0.19 [s]

Vacuum Pad

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.

Electric Actuators

Speed:V [mm/s] a1 a2 Reaches the target position T = T1 + T2 + T3 + T4 [s] P T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

VQ5000

Note 2) Splash proof specification is not available for F and T1.

240

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

42

(For F, L, S, T & T1 kits) D-Side End Plate Assembly 2. U-side end plate assembly part no.

Integrated Controller

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/10 = 0.03 [s], T3 = V/a2 = 300/10 = 0.03 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.