Table of Contents

Stations 01 1 station 16 16 stations VVQ1000-FPG-066 types of manifold VQ1000-FPG-C4M5-D, 3 sets VQ1000-FPG-C6M5-D, 3 sets Double Check block 2-4-25 Body Ported 26 Series VQ1000 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2.

ZP

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

VEX1

terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B B Bracket (Except VEX332) Option 0 Air operated Operation F Foot (Only VEX312, VEX332) 1 External pilot solenoid N Silencer for pilot exhaust (P2) port (Only solenoids) 2 Internal pilot solenoid None Indicator light and surge voltage suppressor Body size Port size Thread S With

SFOD-OMT0005CN

<> (01-144) D RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

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25 25 25 ZPY100 10 12 15 25 41 52 75 86 6 ZPV16 j6, ~16D 16 e26 42 7 '1a 53 70 +87 Applicable tube ,mm ZP20 I Applicable tube 0.0' ~ Q I>R' ZPY25 30 30 28 30 30 28 30 30 28 30 30 28 N4 (Nylon tube .4/2.5) 14.5 5 1.8 ZPY?2 , ~Y40 36 34 36 33 37 35 , 36 34 I ',ills (fIyjon tuIMIIl!

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model ASF 1/8" ASD230FM-U10/32-01 12 8.4 12.9 29.4 17.5 5/32" ASD230FM-U10/32-03 13 9.3 10-32 UNF 8 33.8 30.1 29.6 10 11.7 7.8 34.6 25.1 28.8 9.6 3/16" ASD230FM-U10/32-05 35.2 23.3 16.5 14 11.4 1/4" ASD330FM-U10/32-07 32.6 20.7 13.5 15 12 34.6 14 39.6 3/16" ASD330FM-N01-05S 39.5 23.9 16.5 30 11.4 12.7 36.1 32 11.8 10.6 1/4" 27 ASD330FM-N01-07S 42.2 31.1

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(7.5) DIN rail clamp screw n-C4, C6, C8, 01 (3.5) 21.5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side C8: One-touch fitting for 8 n 01: Rc(PT)1/8 A 2 A 2 Manual override 5 SY SMC 4 (L4) (L3) SYJ L2 L1 P=16 P=16 15.5 3 2 VK 1 18 VZ Station 5 D side VT 22.5 300 50.5 3 70 VT (Lead wire) Cover dia 1.6 Cross section 0.34mm2 VP VG 59 PE port R 3 1 P (30) VP 25.5 11 M5 X 0.8 External

4/5 Port Air Operated Valve Series SYJA3000

override (30) 24.5 (37) 23 11.5 20 3 3.5 4 11 2-2.6 (For mounting) (18) 1.8 (Bleed port) With fiflter (80 mesh) (Piping port) 1/8 46.5 19.5 (25) 33.5 21.5 (2.3) (46.5) 8.5 M5 x 0.8 (Piping port) 6 6 15 17 17 R1 P 45.5 24 32 1.8 (Bleed port) With fiflter (80 mesh) R2 21 2 position double: SYJA5220-M5 2 position double: SYJA5240-01 2-4.3 44 2-M5 x 0.8 (Pilot port) 2-M5 x 0.8 (Pilot port) (

VDW Series

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Series AS-FM/AS-M/ASD-FM

Weight g d T H D1 D2 D3 L1 L2 L3 Model 1/8" ASD230FM-U10/32-01 12 8.4 12.9 29.4 17.5 5/32" ASD230FM-U10/32-03 13 9.3 10-32 UNF 8 10 11.7 33.8 30.1 29.6 7.8 34.6 25.1 28.8 9.6 3/16" 35.2 23.3 16.5 ASD230FM-U10/32-05 14 11.4 1/4" 32.6 20.7 13.5 ASD330FM-U10/32-07 15 12 14 34.6 39.6 3/16" 39.5 23.9 16.5 ASD330FM-N01-05S 30 11.4 12.7 11.8 36.1 32 10.6 1/4" 27 42.2 25.6 31.1 NPT1/8 17 14.2 ASD330FM-N01

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Materials Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N Brass 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size M5 1/8 (6A) 1/4 (8A) Symbol 02 : 10 2 stations : 10 stations 30 10 M5 01 02 Note) IN port sizes are as follows. 10: 1/8 (6A) 20: 1/4 (8A) 30: 3/8 (10A) How to Order Valves (for Manifold) VDW 2 3 5

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly *1 AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure gauge 0.02

Table of Contents

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Shock Absorbers and Rate Controls

t.30 13.10 ADA725 L ( o r I m d ( .98 l0 2.500 6.4 15.10 ADA73(| T . ( o r T u n d ( .98 l2 2,500 2,500 2,800,000 7.1 29.35 t7.10 ADA735 l . ( o r T o n d ( .98 ?,500 2.500 3.200.000 7.9 33.3t 19.10 ADA74() T . ( o r T q n d ( .98 t 0 ?,500 2,500 3,500,000 8.6 y.30 ?1. t0 aoa745 l . t 0 r l 0 n 0 t .98 l 8 2.500 2,000 3.900;000 9.3 4t.30 23.t0 ADA/50 T.