HRX-OM-W002

. 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT .

7ND9071en

Ex ta II 2 G Ex ib, II 2 D Ex tb II 3 G Ex nA, II 3 D Ex tc II 3 G Ex ic, II 3 D Ex tc cCSAus: Non incendive ATEX / IECEx: II 2 G Ex d , II 2D Ex tb IIIC cCSAus: Explosion proof TYPE ND9203HE2 REV 2.4 CLASS I, DIV 1, GPS B, C, D; CLASS II, DIV 1, GPS E, F, G; CLASS III; T4...T6, ENCLOSURE TYPE 4X; Ex d IIC T4 T6, AEx d IIC T4...T6; Ex tb IIIC T100 C IP66, AEx tb IIIC T100 C IP66 CSA 08.1980091

E-P HYREG

size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Model Specifications AN101-01 AN110-01 AN120-M3 AN120-M5 R R M3 M5 1 8 1 8 Port size (1) Noise reduction (dB (A)) Fluid Max. operating pressure (2) 13 18 16 21 Compressed air 1.0 MPa 5 to 150C (3) Ambient and fluid temperature Effective area (mm2) Weight (g) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

F Bracket VK300-43-1A 20 stations 20 Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Common SUP, Individual EXH Type 21/for body ported type (Port A top ported) How to Order Applicable solenoid valves VKF333--M5 VKF333--01 VV3KF3-21 05 Port A: Rc(PT) 1/8, M5 x 0.8 Valve stations Applicable blanking plate assembly VK300-42-1A 01 1 station 20 20 stations Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base

42

0 Cable length 0.6 m 1 Cable length 1.5 m 2 Cable length 3 m 01 1 station 12 12 stations Electrical entry SB Direct exhaust with silencer box: Exhaust from both U and D sides Cylinder port D D side entry U U side entry 03 3/8 04 1/2 B Bottom ported 1/2 CM Mixed SD Note 1) Direct exhaust with silencer box: D side exhaust SU Note 1) Direct exhaust with silencer box: U side exhaust W IP65 enclosure

Vacuum Pad: Ball Joint Type

width across flats 3 ZP3E 3 ZP2 ZP2V 2 A B ZP Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR XT661 Dimensions: 10 mm Stroke (mm) A B C D F H I J Model ZPT20F10-01-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

I

01) and oilfree air supplied to the pilot port. 8. M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Table of Contents

, 16, 10 pins) Conforming to MIL flat ribbon cable connector Flat ribbon cable connector (20 pins) D-sub connector Conforming to MIL D-sub connector Conforming to MIL flat. ribbon cable connector PC Wiring System compatible Two kinds of terminal are available in accordance with the number of stations.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size VCHC AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 ASS 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 ASR ASQ Note 1) L7: Reference dimensions Dimensions: AS5000 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9) 2

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SS3YJ7-21 SS3YJ7-21R Manifold base Manifold base 2.2-39 Series SYJ700 Manifolds for Internal Pilot 20/21 Type How to Order Applicable solenoid valve SYJ712-l-01 SYJ712M-l-01 SYJ722-l-01 SYJ722M-l-01 Applicable blank plate ass'y SYJ700-10-2A A Port Rc (PT)1/8 SS3YJ7-20 -05 A Port Rc (PT) 1/8 Valve model Stations 20 Type 20 2 stations 02 P Port Rc (PT)1/4 P Port Rc (PT)1/8 21 Type 21 .. ..

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

-06T AS121F-U10/32-05T 11.7 16.5 3/16" 11.4 21.3 26.1 18.1 22.9 13.5 6 11.6 11.7 AS221F-01-23ST AS121F-U10/32-07T 13.5 12 18.3 23.1 1/4" 3.2 8.4 20 12.7 20 AS221F-01-04ST AS221F-N01-01ST 1/8" 8.4 20.4 27.5 4 9.3 12.7 5/32" 9.3 20.4 27.5 13.4 21 AS221F-01-06ST AS221F-N01-03ST 34.7 R1/8 12 14.2 7 1.5 31.6 13.5 6 11.6 21 13.4 34.7 AS221F-01-08ST AS221F-N01-05ST 16.5 NPT1/8 12.7 14.2 7 1.5 31.6

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,