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Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

Electric Actuator

(E) Retun to origin IN2 D D D ) ) ) ) D D D D ) ) ) ) IN1 D ) ) D D ) ) D D ) ) D D ) ) IN0 ) D ) D ) D ) D ) D ) D ) D ) Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin OUT2 D D D ) ) ) ) D D D D ) ) ) ) OUT1 D ) ) D D ) ) D D ) ) D D ) ) OUT0 ) D ) D ) D ) D ) D ) D ) D ) IN3 D D D D D D D ) ) ) ) ) ) ) ) OUT3 D D D D D D D ) ) ) ) ) ) ) ) 54 Programless

Electric Actuators

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

With light/ surge voltage suppressor (L)(M) (D)(F) 100 VAC 50/60 Hz VZ5000 200 VAC 50/60 Hz 24 VDC 2.4 4/2 5/3 M plug connector (M) (Option) Page 3-3-53 24 VAC 50/60 Hz Locking B type (Slotted) (A/B EA/EB) 48 VAC 50/60 Hz 110 VAC 50/60 Hz 3 position closed center 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC VZ3000 Base Mounted DIN terminal (D) 0.83 4/2 5/3 Page 3-3-29 3 position exhaust center

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9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up

Hydraulic

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

ZP

Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VFR 3 position exhaust center Coil rated voltage Electrical entry 4 1 2 3 4 5 6 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 7 240 VAC, 50/60 Hz Other VQ7 G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 3 position pressure center 5 3 position double check 9 6 Option How to Order Pilot Valve Assembly SF4 DZ 1 20 Manual

Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ6-10Z 22 18 25 9 23 16 38 10 30 64.5 4 2 50 60 MXQ6-20Z 25 15 15 9 26 26 38 10 30 74.5 4 2 50 60 MXQ6-30Z 21 34 12 20 48 13 40 95.5 6 3 63 73 MXQ6-40Z 26 10 38 24 28 28 48 15 50 107.5 6 3 75 85 MXQ6-50Z 27 20 48 34 28 28 48 15 60 117.5 6 3 85 95 87 Air Slide Table/Height Interchangeable Type MXQ Series Dimensions: MXQ [Adjuster

Made to Order

/J79W/F7WV D-F7BA/F7BAV D-F7NT D-M9WV D-M9AV D-F7WV D-F7BAV D-A79W 10 15 10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)

15

tension adjustment bolt (M4: Width across flats 7) 48 46.8 60 FF (60) 57.5 55 31.5 30 5H9 ( ) depth 5 n x 5.5 +0.030 0 70 6 60 200 D x 200 (= E) B 5 15 Note) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

4/5 Port Solenoid Valve

It is already built-in to the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 Electrical entry 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D With connector DIN terminal DO Without connector DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

Air Cylinder Series CM2

Different surfaces Same surface Different surfaces Same surface D-A9 D-M9 D-M9W (n-2) 2 15 + 45 10 15 Note) Note) 45 45 + 45 (n-2) (n = 2, 4, 6) (n-2) 2 D-C7 D-C80 15 + 45 50 + 45 (n-2) 10 15 50 (n = 2, 4, 6) D-H7 D-H7W D-H7NF (n-2) 2 15 + 45 60 + 45 (n-2) 10 15 60 (n = 2, 4, 6) D-C73C D-C80C D-H7C (n-2) 2 15 + 50 65 + 50 (n-2) 10 15 65 (n = 2, 4, 6) (n-2) 2 D-B5/B64 D-G5NTL 15 + 50 75 +

VFS

Option: External pilot is possible only to the one with sub-plate. 3 position exhaust center Electrical entry Coil rated voltage 4 G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 position pressure center 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 3 position double check 9 Other 6 Option

Battery-less

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

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(A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O. (A contact) 1 2 1 pc. 2 pcs. N.C. (B contact) N.C. (B contact) None Nil Auto/Proximity switch type N.C. (B contact) 6 6 pcs. Refer to the table on the right for auto/proximity switch part numbers.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

: Right side parallel LEFS32RV LEC SS-T 6 60 Encoder cable (7) Encoder cable (7) LEC Y LEC Y 132.5 132.5 Motorless 60 60 62 62 LAT Motor cable (7) Motor cable (7) LZ Dimensions [mm] Model L A B n D E LEFS32lll-50l 245 56 180 4 LEFS32lll-100l 295 106 230 4 LEFS32lll-150l 345 156 280 4 LEFS32lll-200l 395 206 330 6 2 300 LEFS32lll-250l 445 256 380 6 2 300 LEFS32lll-300l 495 306 430 6 2

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

6 12 VDC C 7 240 VAC, 50/60 Hz 9 Other Conduit terminal T TZ Option VFR34 Option D DZ DIN terminal VFR30, VFR31: Pilot valve assembly is all plug-in (F).

CJ2

Reed switch Applicable auto switch Band mounting Rail mounting D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-A79W D-F7/J7, D-F7V, D-J79C D-F7W/J79W, D-F7WV, D-F7BAL, D-F7F, D-F7NTL D-C7/C8, D-C73C/C80C D-H7, D-H7C D-H7W, D-H7BAL, D-H7F Solid state switch 1.3-1 Standard: Double Acting Single Rod Series CJ2 6, 10, 16 How to Order Bore size 6 10 16 6mm 10mm 16mm Standard stroke (mm) 6 10 16 15, 30, 45

Electric Actuator

1 @6 @7 o @4 !5 !0 !6 @0 B A !9 !8 y q w t !7 r e i u !3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.